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Jin HB, Jeon Y, Jung S, Modepalli V, Kang HS, Lee BC, Ko JH, Shin HJ, Yoo JW, Kim SY, Kwon SY, Eom D, Park K. Enhanced crystallinity of epitaxial graphene grown on hexagonal SiC surface with molybdenum plate capping. Sci Rep 2015; 5:9615. [PMID: 25905989 PMCID: PMC5386107 DOI: 10.1038/srep09615] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/06/2014] [Accepted: 03/09/2015] [Indexed: 11/20/2022] Open
Abstract
The crystallinity of epitaxial graphene (EG) grown on a Hexagonal-SiC substrate is found to be enhanced greatly by capping the substrate with a molybdenum plate (Mo-plate) during vacuum annealing. The crystallinity enhancement of EG layer grown with Mo-plate capping is confirmed by the significant change of measured Raman spectra, compared to the spectra for no capping. Mo-plate capping is considered to induce heat accumulation on SiC surface by thermal radiation mirroring and raise Si partial pressure near surface by confining the sublimated Si atoms between SiC substrate and Mo-plate, which would be the essential contributors of crystallinity enhancement.
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Affiliation(s)
- Han Byul Jin
- School of Electrical and Computer Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea
| | - Youngeun Jeon
- School of Electrical and Computer Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea
| | - Sungchul Jung
- Department of Physics, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea
| | - Vijayakumar Modepalli
- School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea
| | - Hyun Suk Kang
- Quantum Optics Laboratory, Korea Atomic Energy Research Institute, Daejeon 305-353, Republic of Korea
| | - Byung Cheol Lee
- Quantum Optics Laboratory, Korea Atomic Energy Research Institute, Daejeon 305-353, Republic of Korea
| | - Jae-Hyeon Ko
- Department of Physics, Hallym University, Chuncheon, Gangwondo 200-702, Republic of Korea
| | - Hyung-Joon Shin
- School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea
| | - Jung-Woo Yoo
- School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea
| | - Sung Youb Kim
- School of Mechanical and Nuclear Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea
| | - Soon-Yong Kwon
- School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea
| | - Daejin Eom
- Korea Research Institute of Standards and Science, Daejeon 305-340, Republic of Korea
| | - Kibog Park
- 1] School of Electrical and Computer Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea [2] Department of Physics, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea
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