Speckle and speckle-shearing interferometers combined for the stimultaneous determination of out-of-plane displacement and slope

Novel scanning electron microscope bulge test technique integrated with loading function

Membranes and film-on-substrate structures are critical elements for some devices in electronics industry and for Micro Electro Mechanical Systems devices. These structures are normally at the scale of micrometer or even nanometer. Thus, the measurement for the mechanical property of these membranes poses a challenge over the conventional measurements at macro-scales. In this study, a novel bulge test method is presented for the evaluation of mechanical property of micro thin membranes. Three aspects are discussed in the study: (a) A novel bulge test with a Scanning Electron Microscope system realizing the function of loading and measuring simultaneously; (b) a simplified Digital Image Correlation method for a height measurement; and (c) an imaging distortion correction by the introduction of a scanning Moiré method. Combined with the above techniques, biaxial modulus as well as Young's modulus of the polyimide film can be determined. Besides, a standard tensile test is conducted as an auxiliary experiment to validate the feasibility of the proposed method.

Real-time slope mapping and defect detection in bent plates using Talbot interferometry

We demonstrate a simple method for obtaining slope contours of bent plates using Talbot interferometry. The technique has been used to map slope contours of polymethyl methacrylate specimens of different shapes. The Talbot image of a coarse grating is projected onto a specimen such that the self-image is backreflected onto the same grating again. As a Talbot interferometer is basically a grating shearing interferometer, it results in the generation of characteristic slope maps of the specimen under test. Results of the investigation match well with other slope-mapping techniques. Validation of experimental results with theoretical predictions in the case of a cantilever beam specimen has been undertaken. Accuracy of about 4.7% with respect to theoretical predictions is obtained.

Speckle correlation method used to detect an object's surface slope

We present a technique employing a speckle pattern correlation method for detection of the slope of an object's surface. Controlled translation of an object under investigation and numerical correlation of speckle patterns recorded during its motion give information used to evaluate the tilt of the object. The proposed optical setup uses a symmetrical arrangement of detection planes in the image field and enables one to detect the tilt of an object's surface within the interval (10 degrees-30 degrees). Simulation analysis shows how to control the measuring range. The presented theory, simulation analysis, and setup are verified through an experiment by measurement of the slope of a surface of a cube made out of steel.

Phase-object detection by use of double-exposure fringe-modulated speckle patterns

We study the properties of a double-exposure image specklegram of a diffuse object obtained by use of a double-aperture pupil. A phase object is placed in front of one aperture during the first or the second exposure. Also, it is assumed that a uniform displacement of the diffuser between exposures is produced. The recorded specklegram is coherently illuminated and analyzed by Fourier transform operations. The average intensity distribution and the interference fringe visibility in the Fourier plane are investigated. On this basis, an alternative interference technique to detect phase objects is proposed.

Phase-object analysis with a speckle interferometer

We describe the characteristics of a double-exposure specklegram obtained through a double-aperture system, by introduction of a wedge in front of one aperture in one exposure. It is assumed that a uniform displacement of the diffuser is produced between exposures. The average intensity distribution and visibility of the interferometric fringes in the Fourier plane are analyzed. An alternative interferometric technique for phase-object detection is proposed.

Simultaneous measurement of pure curvature and twist distribution fields by a five-aperture shearing and two-fourier filtering technique

A five-aperture shearing and two-Fourier filtering technique to measure simultaneously pure curvature and twist distribution fields of a deformed object is proposed. In this method the slope fringes that are contained in the patterns of curvature and twist fringes can be completely eliminated. Thus patterns of pure curvature and twist fringes with a good contrast can be obtained. A theoretical analysis and experimental results are given.

Multiple-image shearography: a direct method to determine curvatures

We present a modified method of shearography, known herein as multiple-image shearography, whereby the curvatures of an object can be measured directly from the resulting fringes. It employs an image-shearing camera that produces three sheared images simultaneously to interfere with each other in the image plane. When film is doubly exposed before and after an object is deformed, three sets of fringes are observed of which one set would depict the second-order derivatives of surface displacement.The theory of the multiple-image shearography technique and its application to curvature measurements in plate bending are presented.

White-light reconstruction setup for shearograms using optical-fiber waveguides

A white-light reconstruction setup for shearograms using optical-fiber waveguides is presented. The setup is compact, is not susceptible to dust and scratches, and enables the two-dimensional fringe pattern on shearograms to be viewed directly under uniform and enhanced illumination with minimal image distortion.

Electronic speckle pattern interferometry for simultaneous measurement of out-of-plane displacement and slope

An optical configuration is presented for simultaneous measurement of out-of-plane displacement and slope change in electronic speckle pattern interferometry. Experimental results for a rectangular plate clamped along the edges and loaded at the center are presented.

White light reconstruction setup for shearograms

A reconstruction setup for the shearographic camera is discussed that is simpler than a Fourier processor and gives bright reconstructions with white light.