Resuscitation of carbon-contaminated mirrors and gratings by oxygen-discharge cleaning. in the 4-40-eV range

Refurbishment of an Au-coated toroidal mirror by capacitively coupled RF plasma discharge

Deposition of synchrotron-radiation-induced carbon contamination on beamline optics causes their performance to deteriorate, especially near the carbon K edge. The photon flux losses due to carbon contamination have spurred researchers to search for a suitable decontamination technique to restore the optical surface and retain its performance. Several in situ and ex situ refurbishing strategies for beamline optics are still under development to solve this serious issue. In this work, the carbon contamination is removed from a large (340 mm × 60 mm) Au-coated toroidal mirror surface using a capacitively coupled low-pressure RF plasma. Before and after RF plasma cleaning, the mirror was characterized by Raman spectroscopy, soft X-ray reflectivity (SXR) and atomic force microscopy (AFM) techniques. The Raman spectra of the contaminated mirror clearly show the G (1575-1590 cm^-1) and D (1362-1380 cm^-1) bands of graphitic carbon. The SXR curve of the contaminated mirror shows a clear dip near the critical momentum transfer of carbon, indicating the presence of carbon contamination on the mirror surface. This dip disappears after removal of the contamination layer by RF plasma exposure. A decrease in the intensities of the CO bands is also observed by optical emission spectrometry during plasma exposure. The AFM and SXR results suggest that the root-mean-square (r.m.s.) roughness of the mirror surface does not increase after plasma exposure.

Damage threshold of platinum coating used for optics for self-seeding of soft X-ray free electron laser

We investigated the experimental damage threshold of platinum coating on a silicon substrate illuminated by soft x-ray radiation at grazing incidence angle of 2 degrees. The coating was the same as the blazed grating used for the soft X-ray self-seeding optics of the Linac Coherent Light Source free electron laser. The irradiation condition was chosen such that the absorbed dose was similar to the maximum dose expected for the grating. The expected dose was simulated by solving the Helmholtz equation in non-homogenous media. The experiment was performed at 900 eV photon energy for both single pulse and multi-shot conditions. We have not observed single shot damage. This corresponds to a single shot damage threshold being higher than 3 J/cm(2). The multiple shot damage threshold measured for 10 shots and about 600 shots was determined to be 0.95 J/cm(2) and 0.75 J/cm(2) respectively. The damage threshold occurred at an instantaneous dose which is higher that the melt dose of platinum.

Restoration of absolute diffraction efficiency and blaze angle of carbon contaminated gratings by ultraviolet cleaning

An UV cleaning technique has been used for the removal of carbon contamination from grating surface, using oxygen free-radicals generated by the absorption of UV radiation (172 nm) in atmospheric oxygen. The extent of restoration of absolute diffraction efficiency (ADE) and grating blaze angle of a carbon-contaminated variable line-spaced concave grating (average line spacing of 1200 lines/mm, blaze angle 3.2 deg, and blaze wavelength 10 nm) has been studied over a 5-70 nm wavelength range. The contamination (due to prolonged use in extreme-ultraviolet spectrograph) resulted in a drastic reduction in the diffraction efficiency of grating, along with a change in the blaze angle. The UV cleaning led to the restoration of blaze angle as well as to an increase in the ADE by more than an order of magnitude for the first two diffraction orders (i.e., from ~0.2 to ~7.2%) for the first diffraction order and 0.1 to ~5% for the second diffraction order at the blaze wavelength. The study is useful for the restoration of carbon-contaminated costly optics.

In situ removal of carbon contamination from optics in a vacuum ultraviolet and soft X-ray undulator beamline using oxygen activated by zeroth-order synchrotron radiation

Carbon contamination of optics is a serious issue in all soft X-ray beamlines because it decreases the quality of experimental data, such as near-edge X-ray absorption fine structure, resonant photoemission and resonant soft X-ray emission spectra in the carbon K-edge region. Here an in situ method involving the use of oxygen activated by zeroth-order synchrotron radiation was used to clean the optics in a vacuum ultraviolet and soft X-ray undulator beamline, BL-13A at the Photon Factory in Tsukuba, Japan. The carbon contamination of the optics was removed by exposing them to oxygen at a pressure of 10(-1)-10(-4) Pa for 17-20 h and simultaneously irradiating them with zeroth-order synchrotron radiation. After the cleaning, the decrease in the photon intensity in the carbon K-edge region reduced to 2-5%. The base pressure of the beamline recovered to 10(-7)-10(-8) Pa in one day without baking. The beamline can be used without additional commissioning.

Resuscitation of carbon-contaminated mirrors and gratings by oxygen-discharge cleaning. 2: Efficiency recovery in the 100-1000-eV range

The capability of dc oxygen-discharge cleaning to resuscitate the efficiencies of mirrors and gratings contaminated by synchrotron radiation has been studied over the 100-1000-eV photon-energy range. The contamination- induced efficiency degradation was severe at the carbon K edge, even for a low contamination level. A large reduction in the mirror reflectance was also observed just below the carbon K edge and at high energies, which was shown by a model calculation to be ascribable to an interference effect in the carbon film. Cleaning resulted in a dramatic recovery of the efficiencies; their increase amounted to more than 1 order of magnitude at these energies. The removal of contaminant deposits also led to a reduced scattering level and a restoration of the grating-blaze effect; these contribute to an improvement in the monochromator performance, both regarding the stray-light level and the diffracted-light intensity.