Relation between light scattering and the microstructure of optical thin films

Immediate and one-point roughness measurements using spectrally shaped light

Capitalizing on a previous theoretical paper, we propose a novel approach, to our knowledge, that is different from the usual scattering measurements, one that is free of any mechanical movement or scanning. Scattering is measured along a single direction. Wide-band illumination with a properly chosen wavelength spectrum makes the signal proportional to the sample roughness, or to the higher-order roughness moments. Spectral shaping is carried out with gratings and a spatial light modulator. We validate the technique by cross-checking with a classical angle-resolved scattering set-up. Though the bandwidth is reduced, this white light technique may be of key interest for on-line measurements, large components that cannot be displaced, or other parts that do not allow mechanical movement around them.

Trapped light scattering within optical coatings: a multilayer roughness-coupling process

Despite numerous works devoted to light scattering in multilayer optics, trapped scattering has not been considered until now. This consists in a roughness-coupling process at each interface of the multilayer, giving rise to electromagnetic modes traveling within the stack. Such a modal scattering component is today necessary for completing the energy balance within high-precision optics including mirrors for gyro-lasers and detection of gravitational waves, where every ppm (part per million) must be accounted for. We show how to calculate this trapped light and compare its order of magnitude with the free space scattering component emerging outside the multilayer.

Light scattering characterization of single-layer nanoporous SiO2 antireflection coating in visible light

Antireflective coatings are widely applied on transparent optical components to reduce reflections at surfaces. Nanoporous silica (NP SiO₂) thin films with tailored refractive index properties are used as single-layer antireflective coatings providing nearly zero reflectivity. In this work, light scattering properties of nanoporous silica single-layer antireflective coatings are investigated in order to determine their optical quality by means of total scattering and detailed roughness analysis. Scattering and roughness characterization of the samples coated with different film thicknesses were realized to distinguish the influences of nanopores and surface roughness on scattering losses in the visible (VIS) spectral range. No significant correlation of scattering losses with the film thickness is found, showing negligible influence of the nanopores to the overall scattering properties compared with the dominating effect of interface roughness. Moreover, the scattering losses from coated fused silica glass were observed as low as 20 ppm (0.002%). It is confirmed that NP SiO₂ single-layer antireflective coatings are suitable to be used in optics demanding extremely low scattering characteristics.

Instantaneous one-angle white-light scatterometer

We present a white light scatterometer operating at a unique scattering direction. Mechanical motions and wavelength scans are removed. The technique provides an immediate flexible characterization of roughness with no loss of resolution.

Calculation method for light scattering caused by multilayer coated mirrors in gravitational wave detectors

Scattered light in inteferometric gravitational wave detectors needs to be reduced so that it will not harm the actual signals coming from a gravitational wave. In this paper, we report on the application of the theory of light scattering from mirrors in interferometric detectors having multilayer coatings on their surfaces and compared the results with single-surface scattering theories, which are traditionally used in the field of gravitational wave detectors. For the first time in this field, we have calculated the scattering distributions of the power-recycling, the signal-recycling, and the beam-splitter mirrors in KAGRA (a cryogenic interferometric gravitational wave detector currently under construction in the Kamioka mine in Japan) by using models of their multilayer coatings. Furthermore, we have performed simulations to show the differences between multilayer scattering and single-surface scattering models in the back-scattering of mechanical structures close to the mirrors and the impact on the sensitivity of the KAGRA detector. We show that the back-scattering by using those coatings can be larger by up to almost two orders of magnitude and they also give rise to additional scattering features that should be taken into account for all optical applications in gravitational wave detectors.

Light scattered by optical coatings: numerical predictions and comparison to experiment for a global analysis

Complex optical coatings may present highly disturbed scattering patterns, both spectrally and angularly. We show in this paper how the development of an accurate dedicated metrology allowed the optimization of numerical models. Our prediction is compared to our measurement.

Low switching voltage ZnO quantum dots doped polymer-dispersed liquid crystal film

This paper investigates the effects of ZnO nanoparticles (NPs) on the switching voltages of polymer dispersed liquid crystal (PDLC) films. The threshold and driving electric fields of PDLC film doped with 2.44 wt% ZnO NPs were 0.13 and 0.31 V/μm, respectively, with a contrast ratio of 26. The results of field emission scanning electron microscopy show that the size of the droplets in doped PDLC films increases with the doping concentration. The development of ZnO-doped PDLC films with low driving voltages greatly broadens the applicability of these devices.

Characterization of optical coatings using a multisource table-top scatterometer

Light scattering measurement and analysis is a powerful tool for the characterization of optical and nonoptical surfaces. To enable a more comprehensive postmeasurement characterization, three visible laser sources were recently implemented in a highly sensitive table-top scatterometer with 3D spherical detection capability. Based on wavelength scaling, the instrument is utilized to characterize thin-film coatings and their substrates with respect to surface roughness, roughness growth, and contamination. Topographic measurement techniques are used to verify the results. The spectral sensitivity to contamination (scatter loss) is demonstrated to be significantly different for single surfaces and interference coatings. In addition, power losses of a highly reflective coating are analyzed.

Characterization of zirconia- and niobia-silica mixture coatings produced by ion-beam sputtering

ZrO2-SiO2 and Nb2O5-SiO2 mixture coatings as well as those of pure zirconia (ZrO2), niobia (Nb2O5), and silica (SiO2) deposited by ion-beam sputtering were investigated. Refractive-index dispersions, bandgaps, and volumetric fractions of materials in mixed coatings were analyzed from spectrophotometric data. Optical scattering, surface roughness, nanostructure, and optical resistance were also studied. Zirconia-silica mixtures experience the transition from crystalline to amorphous phase by increasing the content of SiO2. This also results in reduced surface roughness. All niobia and silica coatings and their mixtures were amorphous. The obtained laser-induced damage thresholds in the subpicosecond range also correlates with respect to the silica content in both zirconia- and niobia-silica mixtures.

Measurements of light scattering from glass substrates by total integrated scattering

A total integrated scattering (TIS) measurement was performed to investigate the surface and volume scattering of K9 glass substrates with low reflectance. Ag layers with thicknesses of 60 nm were deposited on the front and back surfaces of the K9 glass substrates by the magnetron sputtering technique. Surface scattering of the K9 glass substrate was obtained by the TIS measurement of the Ag layers on the assumption that the Ag layers and the K9 substrate had the same surface profile. Volume scattering of the substrates was deduced by subtracting the front and back surface scattering from the total scattering of the substrates.

Comparative study of the roughness of optical surfaces and thin films by use of X-ray scattering and atomic force microscopy

The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.

Interfacial roughness and related scatter in ultraviolet optical coatings: a systematic experimental approach

For a variety of UV optical coatings, surface roughness was measured by use of an atomic-force microscope (AFM) to study its dependence on the film material and thickness, coating design, and deposition process. After analyzing the corresponding power spectral density functions, we propose a simple classification model for coatings according to the contributions of substrate roughness and intrinsic film roughness to the scattering. Results of scattering measurements on different types of coatings are presented and are found to be in good agreement with predictions based on the AFM data. Consequences for a scatter reduction strategy are discussed.

Scattering in twin-cavity narrow-band interference filters illuminated by a monochromatic beam

The scattering behavior of the all-dielectric twin-cavity narrow-band interference filter is studied both in theory and in experiment in two cases, l(1) = l(2) and l (1) not equal l(2), where l(1) and l(2) are the optical thicknesses of the two cavities. It has been shown that the scattering properties are determined mainly by the spacers in which the electric-field intensities are large because of the presence of large standing-wave fields. The scattered light cones are found on both sides of the filter illuminated by a monochromatic light of which the wavelength (lambda(L)) is shorter than the peak wavelength (lambda(0)?) of the filter. The scattering angle of each cone is equal to the tilted angle of the filter when the peak wavelength of the filter shifts to the illumination wavelength. For the case l(1) not equal l(2), the distributions of the scattered light on both sides of the filter are quite different. The analytical calculations are in good agreement with experimental results. The possible applications of scattering in the twin-cavity filter in determining the bandwidth of the peak transmittance and the optical thicknesses of two spacers are addressed.

Second-harmonic specular and scattered generated light: application to the experimental study of zinc-sulfide thin films

We present measurements of second-harmonic generation with zinc-sulfide thin films. Both scattered light and specular light are investigated in linear optics as well as in second-harmonic generation. We show that second-harmonic generation is a powerful tool for understanding the nonlinear properties of thin films; it allows the study of the anisotropy found in the scattered and specular second harmonic. Using the symmetry of susceptibility tensors, we show that the films cannot be considered homogeneous when the crystallites are large. Finally, we outline nonlinear scattering measurements, which bring out the usefulness of second-harmonic light in probing the structure of thin films.

Scattering-reduction effect with overcoated rough surfaces: theory and experiment

We show that a scattering-reduction effect is obtained by coating a rough surface with an antireflection layer. This research is a generalization of Amra's [J. Opt. Soc. Am. A 10, 365-374 (1993)] study of smooth surfaces conducted with a first-order theory to the case of rough surfaces. We show that the differential method with the R matrix algorithm can be used to study scattering from multilayered rough surfaces. A comparison between numerical and experimental results is given.

Ellipsometry of light scattering from multilayer coatings

A scatterometer is extended and allows us to perform ellipsometric measurements on scattered light in each direction of space. Experimental data are given for single thin-film layers and optical coatings and reveal unexpected results. The phenomena are investigated by means of the electromagnetic theories of surface and bulk scattering that emphasize the role of partial correlation and localized defects.

Low-level scattering and localized defects

We investigate the origin of low-level scattering from high-quality coatings produced by ion-assisted deposition and ion plating. For this purpose we use the polarization ratio of light scattering to separate surface and bulk effects that characterize the intrinsic action of the thin-film materials. In the first step the method is tested and validated at scattering levels greater than 10(-5). In the second step it is applied at low levels, and the results reveal some anomalies. To conclude, we perform a detailed analysis of scattering resulting from the presence of a few localized defects in the coatings.

Combination of surface characterization techniques for investigating optical thin-film components

To meet the requirements of comprehensively characterizing the morphology of thin films and substrates, a suitable combination of different measuring techniques should be chosen, i.e., a nonoptical surface profile measurement should be used together with optical analysis. It is demonstrated on selected examples of fluoride and oxide films that the use of atomic force microscopy and light scattering fulfills the demand of appropriate quantitative characterization over a sufficiently large range of bandwidths.

Scatter from tilted-columnar birefringent thin films: observation and measurement of anisotropic scatter distributions

<p>We show that the angular distribution of scattered light (haze) from tilted-columnar birefringent thin films is highly anisotropic. When a narrow laser beam is incident normally upon a substrate coated with a tilted-columnar film, such as titania deposited at 60° to a thickness of ≈2 µm, the distribution of light scattered into the surrounding transmission and reflection air spaces has the form of one or more arcs. Scatter of light into the substrate is also highly anisotropic, and secondary scatter from the trapped substrate flux produces characteristic bright patterns that appear superposed on the coating.</p><p>When viewed in transmission the bright pattern typically consists of two strong lobes and in reflection four weaker lobes that make a cross. The various anisotropic distributions are shown to be consistent with interference of light from scattering centers that are correlated along the column direction and hence can be described as reflections from the tilted-columnar thin-film microstructure.</p>