Optical constants of float glass, nickel, and carbon from soft-x-ray reflectivity measurements

Determination of optical constants of thin films in the EUV

The determination of fundamental optical parameters is essential for the development of new optical elements such as mirrors, gratings, or photomasks. Especially in the extreme ultraviolet (EUV) and soft x-ray spectral range, the existing databases for the refractive indices of many materials and compositions are insufficient or are a mixture of experimentally measured and calculated values from atomic scattering factors. Since the physical properties of bulk materials and thin films with thicknesses in the nanometer range are not identical, measurements need to be performed on thin layers. In this study we demonstrate how optical constants of various thin film samples on a bulk substrate can be determined from reflection measurements in the EUV photon energy range from 62 eV to 124 eV. Thin films with thickness of 20 nm to 50 nm of pure Mo, Ni, Pt, Ru, Ta, and Te and different compositions of Ni_xAl_x, PtTe, Pt_xMo, Ru_xTa_x, Ru₃Re, Ru₂W, and TaTeN were prepared by DC magnetron sputtering and measured using EUV reflectometry. The determination optical constants of the different materials are discussed and compared to existing tabulated values.

Influence of spin orbit splitting and satellite transitions on nickel soft X-ray optical properties near its L2,3 absorption edge region

Transition elements exhibit strong correlations and configuration interactions between core and valence excited states, which give rise to different excitations inside materials. Nickel exhibits satellite features in its emission and absorption spectra. Effects of such transitions on the optical constants of nickel have not been reported earlier and the available database of Henke et al. does not represent such fine features. In this study, the optical behaviour of ion beam sputter deposited Ni thin film near the L_2,3-edge region is investigated using reflection spectroscopy techniques, and distinct signatures of various transitions are observed. The soft X-ray reflectivity measurements in the 500-1500 eV photon energy region are performed using the soft X-ray reflectivity beamline at the Indus-2 synchrotron radiation source. Kramers-Kronig analysis of the measured reflectivity data exhibit features corresponding to spin orbital splitting and satellite transitions in the real and imaginary part of the refractive index (refraction and absorption spectra). Details of fine features observed in the optical spectra are discussed. To the best of our knowledge, this is the first study reporting fine features in the measured optical spectra of Ni near its L_2,3-edge region.

Effect of tin diffusion on the optical behavior of float glass in the soft-x-ray region

The optical responses of two sides of float glass in the soft-x-ray region were studied at the Indus-1 synchrotron facility. To the best of our knowledge these are the first experimentally obtained optical data for both sides of float glass in the soft-x-ray region. Optical constants delta and beta were determined by use of angle-dependent reflectance techniques in the wavelength range 80-200 A. On the side of the glass that was tin indiffused, a significant difference in delta value from that of the non-tin-side surface was observed. The measured data were compared with Henke's tabulated value of SiO2. The surface roughness of float glass was separately determined by hard-x-ray reflectivity to minimize the number of fitting variables. The effect of a contamination layer on the determination of optical constants was avoided by an appropriate sample-cleaning method.

Characterization of sputtered nickel/carbon multilayers with soft-x-ray reflectivity measurements

Several sputtered Ni/C multilayer mirrors with periods between 3.8 and 6.0 nm were investigated with the HASYLAB reflectometer to determine the peak reflectivity and the internal structure of the multilayers. The enhanced reflectivity in the Bragg maximum, especially below 284 eV (carbon K edge), is interesting for practical applications. For both materials (Ni and C), the optical constants were previously obtained from angular-dependent reflectivity measurements. The layer thicknesses, interface roughnesses, and mean thickness errors of multilayer mirrors are obtained from least-squares fits of theoretical reflectivity curves. A model is presented to describe the influence of interface roughness on other parameters obtained from the analysis. All Ni/C multilayers, with Ar as the sputter gas, were produced in the low-pressure triode-assisted sputtering facility of Sincrotrone Trieste.