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Wagner S, Treptow K, Weser S, Drexler M, Sahakalkan S, Eberhardt W, Guenther T, Pruss C, Herkommer A, Zimmermann A. Injection Molding of Encapsulated Diffractive Optical Elements. MICROMACHINES 2023; 14:1223. [PMID: 37374806 DOI: 10.3390/mi14061223] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/05/2023] [Revised: 06/02/2023] [Accepted: 06/08/2023] [Indexed: 06/29/2023]
Abstract
Microstructuring techniques, such as laser direct writing, enable the integration of microstructures into conventional polymer lens systems and may be used to generate advanced functionality. Hybrid polymer lenses combining multiple functions such as diffraction and refraction in a single component become possible. In this paper, a process chain to enable encapsulated and aligned optical systems with advanced functionality in a cost-efficient way is presented. Within a surface diameter of 30 mm, diffractive optical microstructures are integrated in an optical system based on two conventional polymer lenses. To ensure precise alignment between the lens surfaces and the microstructure, resist-coated ultra-precision-turned brass substrates are structured via laser direct writing, and the resulting master structures with a height of less than 0.002 mm are replicated into metallic nickel plates via electroforming. The functionality of the lens system is demonstrated through the production of a zero refractive element. This approach provides a cost-efficient and highly accurate method for producing complicated optical systems with integrated alignment and advanced functionality.
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Affiliation(s)
- Stefan Wagner
- Hahn-Schickard, Allmandring 9B, 70569 Stuttgart, Germany
- Institute for Micro Integration (IFM), Faculty 7-Engineering Design, Production Engineering and Automotive Engineering, University of Stuttgart, Allmandring 9B, 70569 Stuttgart, Germany
| | - Kevin Treptow
- Institute for Micro Integration (IFM), Faculty 7-Engineering Design, Production Engineering and Automotive Engineering, University of Stuttgart, Allmandring 9B, 70569 Stuttgart, Germany
| | - Sascha Weser
- Hahn-Schickard, Allmandring 9B, 70569 Stuttgart, Germany
| | - Marc Drexler
- Hahn-Schickard, Allmandring 9B, 70569 Stuttgart, Germany
| | | | | | - Thomas Guenther
- Hahn-Schickard, Allmandring 9B, 70569 Stuttgart, Germany
- Institute for Micro Integration (IFM), Faculty 7-Engineering Design, Production Engineering and Automotive Engineering, University of Stuttgart, Allmandring 9B, 70569 Stuttgart, Germany
| | - Christof Pruss
- Institute for Applied Optics, Pfaffenwaldring 9, 70569 Stuttgart, Germany
| | - Alois Herkommer
- Institute for Applied Optics, Pfaffenwaldring 9, 70569 Stuttgart, Germany
| | - André Zimmermann
- Hahn-Schickard, Allmandring 9B, 70569 Stuttgart, Germany
- Institute for Micro Integration (IFM), Faculty 7-Engineering Design, Production Engineering and Automotive Engineering, University of Stuttgart, Allmandring 9B, 70569 Stuttgart, Germany
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Wang S, Zhou C, Ru H, Zhang Y. Optimized condition for etching fused-silica phase gratings with inductively coupled plasma technology. APPLIED OPTICS 2005; 44:4429-34. [PMID: 16047890 DOI: 10.1364/ao.44.004429] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
Polymer deposition is a serious problem associated with the etching of fused silica by use of inductively coupled plasma (ICP) technology, and it usually prevents further etching. We report an optimized etching condition under which no polymer deposition will occur for etching fused silica with ICP technology. Under the optimized etching condition, surfaces of the fabricated fused silica gratings are smooth and clean. Etch rate of fused silica is relatively high, and it demonstrates a linear relation between etched depth and working time. Results of the diffraction of gratings fabricated under the optimized etching condition match theoretical results well.
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Affiliation(s)
- Shunquan Wang
- Shanghai Institute of Optics and Fine Mechanics, Academia Sinica, China
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