Pressure sensing with high-finesse monolithic buckled-dome microcavities

Ultrasonic spectroscopy of sessile droplets coupled to optomechanical sensors

We describe a system for interrogating the acoustic properties of sub-nanoliter liquid samples within an open microfluidics platform. Sessile droplets were deposited onto integrated optomechanical sensors, which possess ambient-medium-noise-limited sensitivity and can thus passively sense the thermally driven acoustic spectrum of the droplets. The droplet acoustic breathing modes manifest as resonant features in the thermomechanical noise spectrum of the sensor, in some cases hybridized with the sensor's own vibrational modes. Excellent agreement is found between experimental observations and theoretical predictions, over the entire ∼0-40 MHz operating range of our sensors. As an application example, we used the technique to monitor the temporal evolution of evaporating droplets. With suitable control over droplet size and morphology, this technique has the potential for precision acoustic sensing of small-volume biological and chemical samples.

All-Optical, Air-Coupled Ultrasonic Detection of Low-Pressure Gas Leaks and Observation of Jet Tones in the MHz Range

We used an ultrasensitive, broadband optomechanical ultrasound sensor to study the acoustic signals produced by pressurized nitrogen escaping from a variety of small syringes. Harmonically related jet tones extending into the MHz region were observed for a certain range of flow (i.e., Reynolds number), which is in qualitative agreement with historical studies on gas jets emitted from pipes and orifices of much larger dimensions. For higher turbulent flow rates, we observed broadband ultrasonic emission in the ~0-5 MHz range, which was likely limited on the upper end due to attenuation in air. These observations are made possible by the broadband, ultrasensitive response (for air-coupled ultrasound) of our optomechanical devices. Aside from being of theoretical interest, our results could have practical implications for the non-contact monitoring and detection of early-stage leaks in pressured fluid systems.

ABCD transfer matrix model of Gaussian beam propagation in plano-concave optical microresonators

Plano-concave optical microresonators (PCMRs) are optical microcavities formed of one planar and one concave mirror separated by a spacer. PCMRs illuminated by Gaussian laser beams are used as sensors and filters in fields including quantum electrodynamics, temperature sensing, and photoacoustic imaging. To predict characteristics such as the sensitivity of PCMRs, a model of Gaussian beam propagation through PCMRs based on the ABCD matrix method was developed. To validate the model, interferometer transfer functions (ITFs) calculated for a range of PCMRs and beams were compared to experimental measurements. A good agreement was observed, suggesting the model is valid. It could therefore constitute a useful tool for designing and evaluating PCMR systems in various fields. The computer code implementing the model has been made available online.

Ultrasound sensing at thermomechanical limits with optomechanical buckled-dome microcavities

We describe the use of monolithic, buckled-dome cavities as ultrasound sensors. Patterned delamination within a compressively stressed thin film stack produces high-finesse plano-concave optical resonators with sealed and empty cavity regions. The buckled mirror also functions as a flexible membrane, highly responsive to changes in external pressure. Owing to their efficient opto-acousto-mechanical coupling, thermal-displacement-noise limited sensitivity is achieved at low optical interrogation powers and for modest optical (Q ∼ 10³) and mechanical (Q ∼ 10²) quality factors. We predict and verify broadband (up to ∼ 5 MHz), air-coupled ultrasound detection with noise-equivalent pressure (NEP) as low as ∼ 30-100 µPa/Hz^1/2. This corresponds to an ultrasonic force sensitivity ∼ 2 × 10^-13 N/Hz^1/2 and enables the detection of MHz-range signals propagated over distances as large as ∼ 20 cm in air. In water, thermal-noise-limited sensitivity is demonstrated over a wide frequency range (up to ∼ 30 MHz), with NEP as low as ∼ 100-800 µPa/Hz^1/2. These cavities exhibit a nearly omnidirectional response, while being ∼ 3-4 orders of magnitude more sensitive than piezoelectric devices of similar size. Easily realized as large arrays and naturally suited to direct coupling by free-space beams or optical fibers, they offer significant practical advantages over competing optical devices, and thus could be of interest for several emerging applications in medical and industrial ultrasound imaging.