On the reliability of reverse engineering results

Reverse engineering of e-beam deposited optical filters based on multi-sample photometric and ellipsometric data

A post-production characterization approach based on spectral photometric and ellipsometric data related to a specially prepared set of samples is proposed. Single-layer (SL) and multilayer (ML) sets of samples presenting building blocks of the final sample were measured ex-situ, and reliable thicknesses and refractive indices of the final ML were determined. Different characterization strategies based on ex-situ measurements of the final ML sample were tried, reliability of their results was compared, and the best characterization approach for practical use, when preparation of the mentioned set of samples would be a luxury, is proposed.

Design, production and reverse engineering of ultra-steep hot mirrors

We present the whole design-production chain of an ultra-steep hot mirror produced using the indirect monochromatic monitoring technique. The hot mirror without thin layers is designed utilizing the stochastic optimization procedure that takes in account upper and lower constraints for layer optical thickness. We produced the hot mirror with the ion-assisted electron beam deposition technique using indirect monochromatic monitoring strategy, performed reverse engineering of the deposited coatings, and illustrated that the random variation of the tooling factors in low-index layers is the main factor causing production errors. We modified the monitoring strategy with low-index layers monitored by quartz crystal monitor, and demonstrated the excellent correspondence to the theoretical spectral performance.

Reverse engineering of multilayer coatings for ultrafast laser applications

We propose a reliable reverse engineering approach for a postproduction characterization of complicated optical coatings for ultrafast laser applications. We perform the postproduction characterization on the basis of in situ broadband monitoring data and validate the results using ex situ transmittance data and group delay measurements.

Quality control of oblique incidence optical coatings based on normal incidence measurement data

We demonstrate selection of reliable approaches for post-production characterization of oblique incidence multilayer optical coatings. The approaches include choice of input information, selection of adequate coating model, corresponding numerical characterization algorithm, and verification of the results. Applications of the approaches are illustrated with post-production characterization of oblique incidence edge filter, oblique incidence beam splitter and oblique incidence 43-layer quarter-wave mirror.

Measurements of the group delay and the group delay dispersion with resonance scanning interferometer

We developed a method for group delay and group delay dispersion measurements, based on location of interference resonance peaks. Such resonance peaks can be observed in transmittance or in reflectance when two mirrors are placed parallel to each other and separated by a thin air spacer. By using a novel approach, based on simultaneous processing of the data acquired for different spacer distances we obtained reliable results with high resolution. Measurements were performed both in transmittance and reflectance layouts depending on the reflectivity of the mirror to be measured. The developed method allows dispersion measurements of ultraviolet mirrors and ultra-broadband mirrors spanning more than one optical octave to be performed.