Lissajous scanning structured illumination microscopy

Miniature side-view dual axes confocal endomicroscope for repetitive in vivo imaging

A side-view dual axes confocal endomicroscope is demonstrated that can be inserted repetitively in hollow organs of genetically engineered mice for in vivo real-time imaging in horizontal and vertical planes. Near infrared (NIR) excitation at λex = 785 nm was used. A monolithic 3-axis parametric resonance scan mirror was fabricated using micro-electro-mechanical systems (MEMS) technology to perform post-objective scanning in the distal end of a 4.19 mm diameter instrument. Torsional and serpentine springs were designed to "switch" the mode of imaging between vertical and horizontal planes by tuning the actuation frequency. This system demonstrated real-time in-vivo images in horizontal and vertical planes with 310 µm depth and 1.75 and 7.5 µm lateral and axial resolution. Individual cells and discrete mucosal structures could be identified.

Spatial and directional contrast dependence in Lissajous-scanning projection systems

Scanning-based image formation fundamentally differs from its classical lens-based counterpart. Therefore, established classical performance evaluation methods fail to determine the theoretical limitations of scanning-based optical systems. We developed a simulation framework and a novel performance evaluation process to evaluate the achievable contrast in scanning systems. Applying these tools, we conducted a study determining the resolution limits of different Lissajous scanning approaches. For the first time, we identify and quantify spatial and directional dependencies of the optical contrast and demonstrate their significant impact on the perceived image quality. We prove that the observed effects are more pronounced for Lissajous systems with high ratios of the two scanning frequencies. The presented method and results can lay the foundation for a more sophisticated application-specific design of next-generation scanning systems.

Piezoelectric MEMS Mirror with Lissajous Scanning for Automobile Adaptive Laser Headlights

The emergence of smart headlights with reconfigurable light distributions that provide optimal illumination, highlight road objects, and project symbols to communicate with traffic participants further enhances road safety. Integrating all these functions in a single headlight usually suffers from issues of bulky multi-functional add-on modules with high cost or the use of conventional spatial light modulators with low optical efficiency and complex thermal design requirements. This paper presents a novel laser headlight prototype based on biaxially resonant microelectromechanical systems (MEMS) mirror light modulator for mapping blue laser patterns on phosphor plate to create structured white illumination and tunable road projection. The proposed headlight prototype system enables reconfigurable light distribution by leveraging laser beam scanning with fewer back-end lens and simple thermal design requirements. Built with thin-film lead zirconate titanate oxide (PbZrTiO3) actuators, the MEMS mirror achieved high-frequency biaxial resonance of 17.328 kHz, 4.81 kHz, and optical scan angle of 12.9°. The large mirror design of 2.0 mm facilitates more refined resolvable projection pixels, delivers more optical power, and provides moderate optical aperture to possibly serve as the common spatial light modulator of headlight and the light detection and ranging (LiDAR) towards all-in-one integration. The carefully designed bi-axial resonant frequency improves the device’s robustness by offsetting the lowest eigenmode away from the vehicle vibration. By establishing the laser headlight prototype systems of both 1D and 2D scanning modes, a mathematical model of laser modulation and MEMS electrical control principles of Lissajous scanning are proposed to tune the projection pattern density and shapes. It laid the foundation for developing a laser scanning control system with more complex project functions and prompting the application of MEMS for compact headlight system that addresses night driving visibility, eliminates glare effect, and renders interactive projection capabilities.

Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim

A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation. However, the ultrathin mirror is significantly vulnerable to diverse film deformation due to residual thin film stresses, so that high flatness of the mirror is hardly achieved. Here, we report a MEMS mirror of large-area and ultrathin membrane with high flatness by using the silicon rim microstructure (SRM). The ultrathin MEMS mirror with SRM (SRM-mirror) consists of aluminum (Al) deposited silicon nitride membrane, bimorph actuator, and the SRM. The SRM is simply fabricated underneath the silicon nitride membrane, and thus effectively inhibits the tensile stress relaxation of the membrane. As a result, the membrane has high flatness of 10.6 m⁻¹ film curvature at minimum without any deformation. The electrothermal actuation of the SRM-mirror shows large tilting angles from 15° to −45° depending on the applied DC voltage of 0~4 V_DC, preserving high flatness of the tilting membrane. This stable and statically actuated SRM-mirror spurs diverse micro-optic applications such as optical sensing, beam alignment, or optical switching.