Crack-free conditions in welding of glass by ultrashort laser pulse

Ultra-short pulse burst laser around 1.98 µm obtained through an all-fiber nonlinear wavelength converter and Tm-doped fiber amplifier

We report an all-fiber ultra-short pulse burst laser operating at around 1.98 µm that is obtained through a nonlinear wavelength converter and Tm-doped fiber amplifier. A mode-locked Er-doped fiber laser was first built and then amplified in subsequent amplifiers to an average power of 1.3 W. Ultra-short pulse burst output was achieved through a pulse multiplier and a fiber-pigtailed acousto-optic modulator. It was then injected into an all-fiber nonlinear wavelength converter constructed from P-doped fiber and Tm-doped fiber, obtaining an ultra-short pulse burst laser of 540 mW around 1.98 µm. Its average output power was then amplified to 4.33 W in a Tm-doped fiber amplifier with an intra-burst pulse repetition frequency of 0.9 GHz, a burst repetition frequency of 200 kHz, and a duty cycle of 2%, corresponding to about 200 pulses within each burst. This 1.98 µm pulse burst laser has enormous potential to be applied in bio-medical areas.

Prediction of internal modification size in glass induced by ultrafast laser scanning

The modification at the interface between glass plates induced by ultrafast laser is important for the glass welding strength, therefore the relationship between the modification size and processing parameters should be identified. The experimental method has its limitation in understanding the nature of the modification. In this study, a numerical model for the temperature distribution determining the modification size induced by ultrafast laser scanning is developed, in which a three-dimensional steady model for the beam propagation with a transient ionization model is established to estimate the free electron density by the single laser pulse, and then a heat accumulation model for multiple laser pulses is employed to describe energy transportation within the irradiated bulk. The experiment for the internal modifications in single-piece fused silica samples irradiated by a picosecond laser with different pulse energies and scanning velocities is performed to validate the present model.

Damage Inside Borosilicate Glass by a Single Picosecond Laser Pulse

We investigate damage inside the bulk of borosilicate glass by a single shot of IR picosecond laser pulse both experimentally and numerically. In our experiments, bulk damage of borosilicate glass with aspect ratio of about 1:10 is generated. The shape and size of the damage site are shown to correspond to an electron cloud with density of about 1020 cm−3. The underlying mechanism of electron generation by multiphoton ionization and avalanche ionization is numerically investigated. The multiphoton ionization rate and avalanche ionization rate are determined by fitting experimental results. The relative role of multiphoton ionization and avalanche ionization are numerically studied and the percentage of electron contribution from each ionization channel is determined.

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

The rapid expansion of femtosecond (fs) laser technology brought previously unavailable capabilities to laser material processing. One of the areas which benefited the most due to these advances was the 3D processing of transparent dielectrics, namely glasses and crystals. This review is dedicated to overviewing the significant advances in the field. First, the underlying physical mechanism of material interaction with ultrashort pulses is discussed, highlighting how it can be exploited for volumetric, high-precision 3D processing. Next, three distinct transparent material modification types are introduced, fundamental differences between them are explained, possible applications are highlighted. It is shown that, due to the flexibility of fs pulse fabrication, an array of structures can be produced, starting with nanophotonic elements like integrated waveguides and photonic crystals, ending with a cm-scale microfluidic system with micro-precision integrated elements. Possible limitations to each processing regime as well as how these could be overcome are discussed. Further directions for the field development are highlighted, taking into account how it could synergize with other fs-laser-based manufacturing techniques.

Dynamic pulse propagation modelling for predictive femtosecond-laser-microbonding of transparent materials

A dynamic pulse propagation modeling for femtosecond laser bonding of Borofloat glass is presented. The temperature evolution and internal modifications are predicted by incorporating the nonlinear electron dynamics along with temperature dependent thermal properties. The modelling predicts the spatial and temporal distribution of absorption coefficient and plasma density that gives quantitative estimations of the heat affected zone and weld geometry. The impact of focusing condition on heat affected zone and weld geometry is investigated, which for the first time to our knowledge allows to numerically determine the desired relative position between the geometrical focus of a femtosecond-laser-pulse and the interface of the two substrates to be welded. The prediction of the modelling on the offset distance is applied to weld Borofloat glass plates having optical contact and can be applied to other dielectric solids.

Active fiber loop for synthesizing GHz bursts of equidistant ultrashort pulses

We demonstrate a method to synthesize ultra-high repetition rate bursts of ultrashort laser pulses containing any number of pulses within a burst with identical pulse separation and adjustable amplitude. The key element to synthesize the GHz bursts of ultrashort laser pulses is an active fiber loop. The method was implemented in the fiber chirped pulse amplification system to obtain 72 nJ-energy bursts of 20 pulses with a 2.65 GHz intra-burst pulse repetition rate and a 500 kHz burst repetition rate. The dispersion compensation mechanism ensured a mean pulse duration of 570 fs within the bursts.

Frequency dependence of nonlinear absorption in fused silica measured with picosecond pulses at various focal lengths

Nonlinear absorption is the key process to generate laser-induced in-volume modifications in transparent dielectrics such as waveguides or three-dimensional data matrix codes. We present a comprehensive parameter study about nonlinear absorption in fused silica using a picosecond laser at various focal lengths. Beginning at a focal length of 100 mm, we measure a strong frequency dependence of the saturation absorption. Reducing the focal length results in a decrease of the saturation absorption. After passing a threshold focal length, the saturation absorption increases drastically and the frequency dependence starts to decrease. At the final focal length of 6 mm we measure almost no frequency dependence. In order to explain our measurements, we used the theory of optical breakdown and filamentation. Nonlinear absorption measurement can become a promising tool for better process control during the generation of in-volume modifications in transparent dielectrics.

Characteristics of an Implantable Blood Pressure Sensor Packaged by Ultrafast Laser Microwelding

We propose a new packaging process for an implantable blood pressure sensor using ultrafast laser micro-welding. The sensor is a membrane type, passive device that uses the change in the capacitance caused by the membrane deformation due to applied pressure. Components of the sensor such as inductors and capacitors were fabricated on two glass (quartz) wafers and the two wafers were bonded into a single package. Conventional bonding methods such as adhesive bonding, thermal bonding, and anodic bonding require considerable effort and cost. Therefore CO₂ laser cutting was used due to its fast and easy operation providing melting and bonding of the interface at the same time. However, a severe heat process leading to a large temperature gradient by rapid heating and quenching at the interface causes microcracks in brittle glass and results in low durability and production yield. In this paper, we introduce an ultrafast laser process for glass bonding because it can optimize the heat accumulation inside the glass by a short pulse width within a few picoseconds and a high pulse repetition rate. As a result, the ultrafast laser welding provides microscale bonding for glass pressure sensor packaging. The packaging process was performed with a minimized welding seam width of 100 μm with a minute. The minimized welding seam allows a drastic reduction of the sensor size, which is a significant benefit for implantable sensors. The fabricated pressure sensor was operated with resonance frequencies corresponding to applied pressures and there was no air leakage through the welded interface. In addition, in vitro cytotoxicity tests with the sensor showed that there was no elution of inner components and the ultrafast laser packaged sensor is non-toxic. The ultrafast laser welding provides a fast and robust glass chip packaging, which has advantages in hermeticity, bio-compatibility, and cost-effectiveness in the manufacturing of compact implantable sensors.

Evolution of polarization dependent microstructures induced by high repetition rate femtosecond laser irradiation in glass

We report the observation of an anomalous polarization dependent process in an isotropic glass induced by long time stationary irradiation of a high repetition rate near-infrared femtosecond laser. Two distinctive types of polarization dependent microstructures were induced at different irradiation stages. At early stage (a few seconds), a dumbbell-shaped structure elongated perpendicularly to the laser polarization formed at the top of the modified region, which was later erased by further irradiation. At later stage (above 30 s), bubbles filled with O₂ formed by the irradiation, which were distributed along the laser polarization at a distance far beyond the radius of the laser beam. Based on a simple modeling of light reflection on boundaries, a thermal accumulation process was proposed to explain the formation and evolution of the dumbbell-shaped microstructure. The possible factors responsible for polarization dependent distribution of bubbles are discussed, which needs further systematic investigations. The results may be helpful in the development of femtosecond laser microprocessing for various applications.

Avoiding the requirement for pre-existing optical contact during picosecond laser glass-to-glass welding

Previous reports of ultrafast laser welding of glass-to-glass have indicated that a pre-existing optical contact (or very close to) between the parts to be joined is essential. In this paper, the capability of picosecond laser welding to bridge micron-scale gaps is investigated, and successful welding, without cracking, of two glasses with a pre-existing gap of 3 µm is demonstrated. It is shown that the maximum gap that can be welded is not significantly affected by welding speeds, but is strongly dependent on the laser power and focal position relative to the interface between the materials. Five distinct types of material modification were observed over a range of different powers and surface separations, and a mechanism is proposed to explain the observations.

High speed, high strength microwelding of Si/glass using ps-laser pulses

A novel microwelding procedure to join Si-to-glass using ps-laser pulses with high repetition rates is presented. The procedure provides weld joint with mechanical strength as high as 85 MPa and 45 MPa in sample pairs of Si/aluminosilicate (Si/SW-Y) and Si/borosilicate (Si/Borofloat 33), respectively, which are higher than anodic bonding, at high spatial resolution (< 20 µm) and very high throughput without pre- and post-heating. Laser-matter interaction analysis indicates that excellent weld joint of Si/glass is obtained by avoiding violent evaporation of Si substrate using ps-laser pulses. Laser welded Si/glass samples can be singulated along the weld lines by standard blade dicer without defects, demonstrating welding by ps-laser pulses is applicable to wafer-level packaging.

Gas bubble formation in fused silica generated by ultra-short laser pulses

During processing of glass using ultra-fast lasers the formation of bubble-like structures can be observed in several glass types such as fused silica. Their formation can be exploited to generate periodic gratings in glasses but for other glass processing techniques such as waveguide-writing or glass welding by ultra-fast lasers the bubble formation proves often detrimental. In this work we present experiments and their results in order to gain understanding of the origins and on the underlying formation and transportation mechanisms of the gas bubbles.