Subwavelength grating filtering devices

Anisotropic leaky-like perturbation with subwavelength gratings enables zero crosstalk

Electromagnetic coupling via an evanescent field or radiative wave is a primary characteristic of light, allowing optical signal/power transfer in a photonic circuit but limiting integration density. A leaky mode, which combines both evanescent field and radiative wave, causes stronger coupling and is thus considered not ideal for dense integration. Here we show that a leaky oscillation with anisotropic perturbation rather can achieve completely zero crosstalk realized by subwavelength grating (SWG) metamaterials. The oscillating fields in the SWGs enable coupling coefficients in each direction to counteract each other, resulting in completely zero crosstalk. We experimentally demonstrate such an extraordinarily low coupling between closely spaced identical leaky SWG waveguides, suppressing the crosstalk by ≈40 dB compared to conventional strip waveguides, corresponding to ≈100 times longer coupling length. This leaky-SWG suppresses the crosstalk of transverse-magnetic (TM) mode, which is challenging due to its low confinement, and marks a novel approach in electromagnetic coupling applicable to other spectral regimes and generic devices.

Strong pump rejection filter for polarization-diverse silicon platforms

Integrated wavelength filters with high optical rejection are key components in several silicon photonics circuits, including quantum photon-pair sources and spectrometers. Non-coherent cascading of modal-engineered Bragg filters allows for remarkable optical rejections in structures that only support transverse-electric (TE) polarized modes such as uncladded 220-nm-thick silicon. However, the restriction to TE-only platforms limits the versatility of the non-coherent cascading approach. Here, we propose and experimentally demonstrate a new, to the best of our knowledge, approach for high-rejection filters in polarization-diverse platforms by combining non-coherent cascading of modal-engineered Bragg filters and anisotropy-engineered metamaterial bends. Bragg filters provide a high rejection of the TE mode, while the metamaterial bends remove any residual power propagating in the transverse-magnetic (TM) mode, without any penalty in terms of insertion loss or device footprint. Based on this strategy, we demonstrate optical rejection exceeding 60 dB in 300-nm-thick, cladded silicon waveguides.

Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

Subwavelength grating (SWG) metamaterials have garnered a great interest for their singular capability to shape the material properties and the propagation of light, allowing the realization of devices with unprecedented performance. However, practical SWG implementations are limited by fabrication constraints, such as minimum feature size, that restrict the available design space or compromise compatibility with high-volume fabrication technologies. Indeed, most successful SWG realizations so far relied on electron-beam lithographic techniques, compromising the scalability of the approach. Here, we report the experimental demonstration of an SWG metamaterial engineered beam splitter fabricated with deep-ultraviolet immersion lithography in a 300-mm silicon-on-insulator technology. The metamaterial beam splitter exhibits high performance over a measured bandwidth exceeding 186 nm centered at 1550 nm. These results open a new route for the development of scalable silicon photonic circuits exploiting flexible metamaterial engineering.

Ultracompact bandwidth-tunable filter based on subwavelength grating-assisted contra-directional couplers

An ultracompact, bandwidth-tunable filter has been demonstrated using a silicon-on-insulator (SOI) wafer. The device is based on cascaded grating-assisted contra-directional couplers (GACDCs). It also involves the use of a subwavelength grating (SWG) structure. By heating one of the heaters on GACDCs, a bandwidth tunability of ∼6 nm is achieved. Owing to the benefit of having a large coupling coefficient between SWG and strip waveguides, the length of the coupling region is only 100 µm. Moreover, the combination of the curved SWG and the tapered strip waveguides effectively suppresses the sidelobes. The filter possesses features of simultaneous wavelength tuning with no free spectral range (FSR) limitation. A maximum bandwidth of 10 nm was experimentally measured with a high out-of-band contrast of 25 dB. Similarly, the minimum bandwidth recorded is 4 nm with an out-of-band contrast of 15 dB.

Bi-layered composite gratings with high diffraction efficiency enabled by near-field coupling

In this paper, we present a design method for bi-layered composite gratings to achieve high diffraction efficiency. These composite gratings feature strong near-field coupling between their constituent dielectric subwavelength gratings, thus enabling high-efficiency first-order diffraction in the far-field. An intuitive explanation based on a wavevector matching condition for such high diffraction efficiency composite gratings is provided. According to theoretical analysis, a design strategy for the proposed composite gratings is developed and verified by numerical simulations with gratings working in both TE and TM modes. The proposed strategy could open door to develop bi-layered composite gratings for manipulating diffracted waves with high efficiency, thus may potentially enable new applications in photonic systems.

Subwavelength structure enabled ultra-long waveguide grating antenna

Because of the high index contrast, current silicon photonics based optical phased arrays cannot achieve small beam divergence and large field-of-view simultaneously without increasing fabrication complexity. To resolve the dilemma, we propose an ultra-long waveguide grating antenna formed by placing subwavelength segments within the evanescent field of a conventional strip waveguide. Bound state in the continuum effect is leveraged to suppress the sidewall emission. As a proof of concept, we theoretically demonstrated a millimeter-long through-etched waveguide grating antenna with a divergence angle of 0.081° and a feature size compatible with current silicon photonics foundries.

Subwavelength grating waveguide filter based on cladding modulation with a phase-change material grating

Subwavelength engineering and utilizing phase-change materials with large contrast in their optical properties have become powerful design tools for integrated silicon photonics. Reversible phase-transition of phase-change materials such as Ge₂Sb₂Te₅ (GST) provide a new degree of freedom and open up the possibility of adding new functionalities to the designed devices. We present an optical filter based on a silicon subwavelength grating (SWG) waveguide evanescently coupled to phase-change material loading segments arranged periodically around the SWG core. The effect of the GST loading segments' geometry and their distance from the SWG core on the filter's central wavelength and bandwidth are studied with three-dimensional finite-difference time-domain simulations. The employment of GST in the structure adds a switching functionality with an extinction ratio of 28.8 dB. We also examine the possibility of using the proposed structure as a reconfigurable filter by controlling the partial crystallization of the GST offering a blueshift of more than 4 nm.

Polarization-dependent tuning of Bragg reflection enabled through tilted subwavelength grating waveguide Bragg gratings

We propose and demonstrate experimentally tilted subwavelength grating (SWG) waveguide Bragg gratings (WBGs). By tilting the SWG segments and optimizing the duty cycle, we can achieve polarization-dependent tuning of the spectral response of the SWG WBG, namely, the spectral response of the fundamental transverse electric (TE) mode shifts toward shorter wavelengths, while that for the transverse magnetic (TM) mode remains almost unchanged. In particular, for tilting angles of 5° and 30°, we can obtain a blueshift in the Bragg wavelength of 7 and 35 nm for the TE mode, while the Bragg wavelength for the TM mode remains within 0.5 nm. The proposed tilted SWG WBGs provide a novel method to manage polarization and/or obtain polarization-dependent wavelength selectivity with integrated WBG devices.

Low-loss polysilicon subwavelength grating waveguides and narrowband Bragg reflectors in bulk CMOS

The performance of a photonic functional device in bulk CMOS has been limited by the high propagation loss in polysilicon strip waveguide. Based on the zero-process-change methodology, we successfully reduce the propagation loss of polysilicon waveguide from 112 dB/cm to only 38 dB/cm by solely engineering the waveguide geometry for the first time. Low propagation loss is attributed to a significantly reduced optical overlap factor of 0.09 to bulk polysilicon using subwavelength grating (SWG) waveguide design. These findings prompt us to demonstrate a narrowband SWG-based cladding-modulated Bragg reflector in bulk CMOS, which provides a full-width at half maximum (FWHM) of 1.63 nm, an extinction ratio of 24.5 dB, and a reduced temperature sensitivity of 27.3 pm/°C. Further reducing the FWHM to 0.848 nm is also achieved by decreasing the grating coupling strength. We believe the achievements made in this work validate a promising design path towards practical photonic-electronic applications in bulk CMOS.

Side-mode suppressed filter based on anangular grating-subwavelength grating microring resonator with high flexibility in wavelength design

The subwavelength grating microring resonator (SWGMRR)-based filter is a promising device in optical sensing and communication. However, its comb spectrum nature is not suitable for the track or extraction of a single wavelength of a broadband light source. In this paper, we propose a silicon-photonic side-mode suppressed filter based on angular grating-SWGMRR (AG-SWGMRR) with high flexibility in wavelength design in the silicon-on-insulator (SOI) waveguide for the first time. With the periodical arrangement of the silicon pillars in three different widths, the effective index along the inner sidewall of the SWGMRR will be engineered and, finally, the characteristic of wavelength selection can be realized. The impacts of several key parameters on the center wavelength, side-mode suppressed ratio, and quality factor of this filter, as well as the process of optimization, are investigated and presented, giving a constructive direction in the design of this kind of structure. The simulated results in bulk sensing application indicate that this AG-SWGMRR obtains a high sensitivity of 672.8 nm/RIU and a low limit of detection of 6.69×10^-5, which is not restricted by the free spectral range for its side-mode suppression. Additionally, a cascaded system for wavelength multiplexing applications comprising six AG-SWGMRRs with different center wavelengths by tuning the widths of silicon pillars is also demonstrated. The good performance, compact volume, compatibility with other SWG waveguide-based devices, and flexibility in design of our proposed structure guarantee its great potential in both compact biomedical sensing and optical communication systems.

Label-free biosensing with a multi-box sub-wavelength phase-shifted Bragg grating waveguide

Sub-wavelength grating (SWG) metamaterials have been considered to provide promising solutions in the development of next-generation photonic integrated circuits. In recent years, increasied interest has been paid to silicon photonic planar biosensors based on SWG geometries for performance enhancement. In this work, we demonstrate a highly sensitive label-free phase-shifted Bragg grating (PSBG) sensing configuration, which consists of sub-wavelength block arrays in both propagation and transverse directions. By introducing salt serial dilutions and electrostatic polymers assays, bulk and surface sensitivities of the proposed sensor are characterized, obtaining measured results up to 579.2 nm/RIU and 1914 pm/nm, respectively. Moreover, the proposed multi-box PSBG sensor presents an improved quality factor as high as ∼ 8000 , roughly 3-fold of the microring-based counterpart, which further improves the detection limit. At last, by employing a biotin-streptavidin affinity assay, the capability for small molecule monitoring is exemplified with a minimum detectable concentration of biotin down to 2.28 × 10 - 8 M .

Sub-wavelength grating interdigitated combs as photonic waveguides

In this Letter, we demonstrate a new, to the best of our knowledge, kind of photonic waveguide, in which the light propagates in the overlap of sub-wavelength patterned interdigitated combs. We present the fabrication and characterization of this waveguide, along with an adiabatic taper ensuring lossless transition with classical photonic waveguides. Finally, we explore some practical applications of this waveguide, as a bio-photonic sensor or as an optomechanical transduction scheme.

Bragg filter bandwidth engineering in subwavelength grating metamaterial waveguides

Bragg gratings are fundamental building blocks for integrated photonic circuits. In the high-index contrast silicon-on-insulator material platform, it is challenging to accurately control the grating strength and achieve narrow spectral bandwidths. Here we demonstrate a novel Bragg grating geometry utilizing a silicon subwavelength grating (SWG) waveguide with evanescently coupled periodic Bragg loading segments placed outside the SWG core. We report experimental 3 dB filter bandwidths in a range from 8 nm to 150 pm by adjusting the distance of the Bragg loading segments from the core and the relative phase shift of the segments on the two sides of the waveguide, with a structure that has a minimum feature size of 100 nm.

Subwavelength-grating contradirectional couplers for large stopband filters

Manipulating the coupling coefficient at subwavelength scales provides an additional degree of freedom in designing integrated Bragg gratings. We demonstrate asymmetric contradirectional couplers (contra-DCs) using sidewall-corrugated subwavelength grating (SWG) waveguides for broadband add-drop Bragg filters. We show that a SWG can effectively increase the overlap of coupled modes and thus the photonic band gap. The measured spectra show good agreement with the prediction of photonic band structure simulations. A record bandwidth of 4.07 THz (33.4 nm) has been achieved experimentally. A four-port Bragg resonating filter made of a phase-shifted Bragg grating SWG contra-DC is also demonstrated for narrow-band (near 100 GHz) filtering. All these devices are achieved on the 220-nm silicon-on-insulator platform with a compact length of less than 150 μm. These large stopband filters may find important applications such as band splitting, reconfigurable channel band switching, bandwidth-tunable filtering, and dispersion engineering.

Design of narrowband Bragg spectral filters in subwavelength grating metamaterial waveguides

Properties of reflection and transmission spectral filters based on Bragg gratings in subwavelength grating (SWG) metamaterial waveguides on silicon-on-insulator platform have been analyzed using proprietary 2D and 3D simulation tools based on Fourier modal method and the coupled-mode theory. We also demonstrate that the coupled Bloch mode theory can be advantageously applied to design of Bragg gratings in SWG waveguides. By combining different techniques, including judiciously positioning silicon loading segments within the evanescent field of the SWG waveguide and making use of its dispersion properties, it is possible to attain sub-nanometer spectral bandwidths for both reflection and transmission filters in the wavelength range of 1550 nm while keeping minimum structural features of the filters as large as 100 nm. Numerical simulations have also shown that a few nanometer jitter in the size and position of Si segments is well tolerated in our filter designs.

Compact fabrication-tolerant subwavelength-grating-based two-mode division (de)multiplexer

Regarding the importance of bandwidth and capacity expansion in communication systems, a novel mode division (de)multiplexer based on subwavelength grating (SWG) is proposed. SWG-based devices could have smaller sizes, be much more fabrication-tolerant, and have much wider bandwidths due to the reduced confinement of the field and dispersion. It is also feasible to reduce the loss of a SWG-based device by tuning the duty cycle of the grating. Owing to these properties of SWGs, we have designed a compact fabrication-tolerant two-mode division (de)multiplexer. A flat-top transmission of >0.89 (loss <0.5  dB) is obtained over 65 nm from 1500 to 1565 nm, completely covering the entire C-band used for dense wavelength division multiplexing. Moreover, the cross-talk is <-10  dB for a broad bandwidth of ∼120  nm over which the loss of the complete device including both multiplexer and demultiplexer is <1  dB. Therefore, the proposed device is promising for high-capacity optical communications in both conventional and entirely SWG-based silicon photonic circuits.

Dispersion control of silicon nanophotonic waveguides using sub-wavelength grating metamaterials in near- and mid-IR wavelengths

Controlling the group velocity dispersion of silicon nanophotonic waveguides has been recognized as a key ingredient to enhance the development of various on-chip optical applications. However, the strong wavelength dependence of the dispersion in waveguides implemented on the high index contrast silicon-on-insulator (SOI) platform substantially hinders their wideband operation, which in turn, limits their deployment. In this work, we exploit the potential of non-resonant sub-wavelength grating (SWG) nanostructures to perform a flexible and wideband control of dispersion in SOI waveguides. In particular, we demonstrated that the overall dispersion of the SWG-engineered metamaterial waveguides can be tailored across the transparency window of the SOI platform, keeping easy-to-handle single-etch step manufacturing. The SWG silicon waveguides overcladded by silicon nitride exhibit significant reduction of wavelength dependence of dispersion, yet providing intriguing and customizable synthesis of various attractive dispersion profiles. These include large normal up to low anomalous operation regimes, both of which could make a great promise for plethora of emerging applications in silicon photonics.

Silicon photonic bandpass filter based on apodized subwavelength grating with high suppression ratio and short coupling length

A compact silicon bandpass filter with high sidelobe suppression is proposed and experimentally demonstrated using an apodized subwavelength grating (SWG) coupler. The device is implemented by placing a SWG waveguide next to a strip waveguide, and apodization is employed with a Gaussian profile to taper the gap between the two waveguides. A high sidelobe suppression ratio of 27 dB can be obtained with a 3-dB bandwidth of 8.8 nm and an insertion loss of 2.5 dB. Owing to the large optical phase mismatch between the two waveguides and the presence of the SWG waveguide, the coupling length of the device is reduced to 100.3 μm. The experimental results validate our proposed apodized-SWG-based contradirectional coupler (contra-DC) as a promising device in suppressing out-of-band components in coarse wavelength division multiplexed (CWDM) optical communication systems.

Optical pump-rejection filter based on silicon sub-wavelength engineered photonic structures

The high index contrast of the silicon-on-insulator (SOI) platform allows the realization of ultra-compact photonic circuits. However, this high contrast hinders the implementation of narrow-band Bragg filters. These typically require corrugation widths of a few nanometers or double-etch geometries, hampering device fabrication. Here we report, for the first time, to the best of our knowledge, on the realization of SOI Bragg filters based on sub-wavelength index engineering in a differential corrugation width configuration. The proposed double periodicity structure allows narrow-band rejection with a single etch step and relaxed width constraints. Based on this concept, we experimentally demonstrate a single-etch, 220 nm thick, Si Bragg filter featuring a corrugation width of 150 nm, a rejection bandwidth of 1.1 nm, and an extinction ratio exceeding 40 dB. This represents a 10-fold width increase, compared to conventional single-periodicity, single-etch counterparts with similar bandwidths.

Fabrication-friendly subwavelength-structure-assisted waveguide for dispersion engineering

A subwavelength structure deposited on top of a silicon strip is utilized as a novel tool for dispersion engineering. The equivalent refractive index of the subwavelength structure can be tailored through adjusting its period and duty cycle. As finding suitable materials with both appropriate refractive index and fabrication compatibility is one of the main difficulties in dispersion engineering, the possibility of refractive index engineering is the most significant advantage of the proposed waveguide. It can be beneficial for controlling the properties of the fundamental quasi-TM mode and consequently its dispersion characteristics without any concern about material compatibility. Utilizing this waveguide geometry, a wide and flattened low-dispersion bandwidth can be achieved. Moreover, high anomalous and normal dispersion is realizable without any degradation in dispersion flatness over bandwidth. Therefore, the proposed waveguide structure is promising for dispersion tailoring in both linear and nonlinear applications.

Silicon photonic contradirectional couplers using subwavelength grating waveguides

We propose and demonstrate a novel design of contradirectional couplers in which a subwavelength grating (SWG) waveguide replaces one of the asymmetric waveguides of the conventional designs. The fabricated devices in silicon-on-insulator (SOI) platform show over 35 dB suppression of undesired codirectional coupling and larger than 120 nm operating range free from the interference of intrawaveguide reflections thanks to the large optical phase-mismatch between the segmented SWG waveguide and its nearby continuous waveguide. We study the effects of tailoring the period of the SWG waveguide, the gap distance between the two waveguides, and the coupling length on the spectral characteristics of the device where changing the gap distance from 100 nm up to 500 nm allows for bandwidths from 18.2 nm down to 0.9 nm.

Differential evolution algorithm based photonic structure design: numerical and experimental verification of subwavelength λ/5 focusing of light

Photonic structure designs based on optimization algorithms provide superior properties compared to those using intuition-based approaches. In the present study, we numerically and experimentally demonstrate subwavelength focusing of light using wavelength scale absorption-free dielectric scattering objects embedded in an air background. An optimization algorithm based on differential evolution integrated into the finite-difference time-domain method was applied to determine the locations of each circular dielectric object with a constant radius and refractive index. The multiobjective cost function defined inside the algorithm ensures strong focusing of light with low intensity side lobes. The temporal and spectral responses of the designed compact photonic structure provided a beam spot size in air with a full width at half maximum value of 0.19λ, where λ is the wavelength of light. The experiments were carried out in the microwave region to verify numerical findings, and very good agreement between the two approaches was found. The subwavelength light focusing is associated with a strong interference effect due to nonuniformly arranged scatterers and an irregular index gradient. Improving the focusing capability of optical elements by surpassing the diffraction limit of light is of paramount importance in optical imaging, lithography, data storage, and strong light-matter interaction.

Air and dielectric bands photonic crystal microringresonator for refractive index sensing

We present the experimental and numerical analysis of a microring resonator with an integrated one-dimensional photonic crystal fabricated on a silicon-on-insulator platform and show its applicability in bulk refractive index sensing. The photonic crystal is formed by periodically patterned, partially etched cylindrical perforations, whose induced photonic bandgap is narrower than the range of measurable wavelengths (1520-1620 nm). Of particular interest is that the microring operates in both air and dielectric bands, and the sensitivities of the resonances on both edges of the bandgap were investigated. We showed that a higher field localization inside the volume of the perforations for the air band mode leads to an increase in sensitivity.

Subwavelength grating enabled on-chip ultra-compact optical true time delay line

An optical true time delay line (OTTDL) is a basic photonic building block that enables many microwave photonic and optical processing operations. The conventional design for an integrated OTTDL that is based on spatial diversity uses a length-variable waveguide array to create the optical time delays, which can introduce complexities in the integrated circuit design. Here we report the first ever demonstration of an integrated index-variable OTTDL that exploits spatial diversity in an equal length waveguide array. The approach uses subwavelength grating waveguides in silicon-on-insulator (SOI), which enables the realization of OTTDLs having a simple geometry and that occupy a compact chip area. Moreover, compared to conventional wavelength-variable delay lines with a few THz operation bandwidth, our index-variable OTTDL has an extremely broad operation bandwidth practically exceeding several tens of THz, which supports operation for various input optical signals with broad ranges of central wavelength and bandwidth.

High quality factor subwavelength grating waveguide micro-ring resonator based on trapezoidal silicon pillars

Subwavelength grating waveguide-based micro-ring resonators (SWGMRs) are a promising platform for research in light-matter interaction. However, it is extremely difficult to achieve small radius SWGMR devices (e.g., 5 μm) with satisfying quality factors (e.g., ∼10,000). One major issue is the large bend loss of small radius SWGMRs. In this work, we report the use of trapezoidal silicon pillars instead of conventional rectangular silicon pillars as building blocks of SWGMRs. We found that an asymmetric effective refractive index profile created by trapezoidal silicon pillars can significantly reduce the bend loss and therefore increase the quality factors of SWGMRs. For the first time to the best of our knowledge, we have experimentally demonstrated a 5 μm radius SWGMR made of trapezoidal silicon pillars (T-SWGMR) with an applicable quality factor as high as 11,500, 4.6 times of that (∼2800) offered by a conventional SWGMR made of rectangular silicon pillars, which indicates an 81.4% reduction of the propagation loss. This approach can also be readily employed to enhance SWGMRs with larger radii. We have also experimentally demonstrated a 10 μm radius T-SWGMR with a quality factor as high as 45,000, which indicates a propagation loss as low as 6.07 dB/cm.

Sub-wavelength grating for enhanced ring resonator biosensor

While silicon photonic resonant cavities have been widely investigated for biosensing applications, enhancing their sensitivity and detection limit continues to be an area of active research. Here, we describe how to engineer the effective refractive index and mode profile of a silicon-on-insulator (SOI) waveguide using sub-wavelength gratings (SWG) and report on its observed performance as a biosensor. We designed a 30 μm diameter SWG ring resonator and fabricated it using Ebeam lithography. Its characterization resulted in a quality factor, Q, of 7 · 10³, bulk sensitivity Sb = 490 nm/RIU, and system limit of detection sLoD = 2 · 10^-6 RIU. Finally we employ a model biological sandwich assay to demonstrate its utility for biosensing applications.

Broadband 2 × 2 adiabatic 3 dB coupler using silicon-on-insulator sub-wavelength grating waveguides

We report on a compact, broadband, 2×2 adiabatic 3 dB coupler using sub-wavelength gratings (SWGs) for silicon-on-insulator waveguides. In our device, two SWG waveguides that support two transverse electric modes and have tapered waveguide widths were used to achieve an adiabatic mode evolution of the two-waveguide system for broadband 3 dB power splitting. We present results for a SWG adiabatic 3 dB coupler that has an overall coupler length of 50 μm and achieves broadband power splitting over a 130 nm wavelength range with an imbalance of no greater than ±0.3  dB and with low excess losses of less than 0.5 dB.

Geometrical tuning art for entirely subwavelength grating waveguide based integrated photonics circuits

Subwavelength grating (SWG) waveguide is an intriguing alternative to conventional optical waveguides due to the extra degree of freedom it offers in tuning a few important waveguide properties, such as dispersion and refractive index. Devices based on SWG waveguides have demonstrated impressive performances compared to conventional waveguides. However, the high loss of SWG waveguide bends jeopardizes their applications in integrated photonic circuits. In this work, we propose a geometrical tuning art, which realizes a pre-distorted refractive index profile in SWG waveguide bends. The pre-distorted refractive index profile can effectively reduce the mode mismatch and radiation loss simultaneously, thus significantly reduce the bend loss. This geometry tuning art has been numerically optimized and experimentally demonstrated in present study. Through such tuning, the average insertion loss of a 5 μm SWG waveguide bend is reduced drastically from 5.43 dB to 1.10 dB per 90° bend for quasi-TE polarization. In the future, the proposed scheme will be utilized to enhance performance of a wide range of SWG waveguide based photonics devices.

Design and fabrication of SOI micro-ring resonators based on sub-wavelength grating waveguides

Standard silicon photonic strip waveguides offer a high intrinsic refractive index contrast; this permits strong light confinement, leading to compact bends, which in turn facilitates the fabrication of devices with small footprints. Sub-wavelength grating (SWG) based waveguides can allow the fabrication of low loss devices with specific, engineered optical properties. The combination of SWG waveguides with optical micro-resonators can offer the possibility of achieving resonators with properties different from the traditional SOI rings. One important property that SWG rings can offer is decreased light confinement in the waveguide core; this improves the resonator's sensitivity to changes in the cladding refractive index, making the rings ideal for refractive index sensing applications. In this paper, we present the design and experimental characterization of SWG based rings realized on SOI chips without upper cladding (permitting their use as sensors). The fabricated rings offer quality factors in the range of ~1k-6k, depending on SWG parameters. Based on the comparison of experimental and simulated data we expect sensitivities exceeding 383 nm/RIU in water and 270 nm/RIU in air, showing excellent potential for use in sensing applications.