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Frewein MPK, Mason J, Maier B, Cölfen H, Medjahed A, Burghammer M, Allain M, Grünewald TA. Texture tomography, a versatile framework to study crystalline texture in 3D. IUCRJ 2024; 11:809-820. [PMID: 39046078 PMCID: PMC11364025 DOI: 10.1107/s2052252524006547] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/17/2024] [Accepted: 07/03/2024] [Indexed: 07/25/2024]
Abstract
Crystallographic texture is a key organization feature of many technical and biological materials. In these materials, especially hierarchically structured ones, the preferential alignment of the nano constituents heavily influences the macroscopic behavior of the material. To study local crystallographic texture with both high spatial and angular resolution, we developed Texture Tomography (TexTOM). This approach allows the user to model the diffraction data of polycrystalline materials using the full reciprocal space of the crystal ensemble and describe the texture in each voxel via an orientation distribution function, hence it provides 3D reconstructions of the local texture by measuring the probabilities of all crystal orientations. The TexTOM approach addresses limitations associated with existing models: it correlates the intensities from several Bragg reflections, thus reducing ambiguities resulting from symmetry. Further, it yields quantitative probability distributions of local real space crystal orientations without further assumptions about the sample structure. Finally, its efficient mathematical formulation enables reconstructions faster than the time scale of the experiment. This manuscript presents the mathematical model, the inversion strategy and its current experimental implementation. We show characterizations of simulated data as well as experimental data obtained from a synthetic, inorganic model sample: the silica-witherite biomorph. TexTOM provides a versatile framework to reconstruct 3D quantitative texture information for polycrystalline samples; it opens the door for unprecedented insights into the nanostructural makeup of natural and technical materials.
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Affiliation(s)
- M. P. K. Frewein
- Aix Marseille Univ, CNRS, Centrale MedInstitut Fresnel,MarseilleFrance
| | - J. Mason
- University of California, Davis, California, USA
| | - B. Maier
- University of Konstanz, Konstanz, Germany
| | - H. Cölfen
- University of Konstanz, Konstanz, Germany
| | - A. Medjahed
- European Synchrotron Radiation Facility, Grenoble, France
| | - M. Burghammer
- European Synchrotron Radiation Facility, Grenoble, France
| | - M. Allain
- Aix Marseille Univ, CNRS, Centrale MedInstitut Fresnel,MarseilleFrance
| | - T. A. Grünewald
- Aix Marseille Univ, CNRS, Centrale MedInstitut Fresnel,MarseilleFrance
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2
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Lechowski B, Kutukova K, Grenzer J, Panchenko I, Krueger P, Clausner A, Zschech E. Laboratory X-ray Microscopy of 3D Nanostructures in the Hard X-ray Regime Enabled by a Combination of Multilayer X-ray Optics. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:233. [PMID: 38276751 PMCID: PMC10819039 DOI: 10.3390/nano14020233] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/30/2023] [Revised: 01/16/2024] [Accepted: 01/17/2024] [Indexed: 01/27/2024]
Abstract
High-resolution imaging of buried metal interconnect structures in advanced microelectronic products with full-field X-ray microscopy is demonstrated in the hard X-ray regime, i.e., at photon energies > 10 keV. The combination of two multilayer optics-a side-by-side Montel (or nested Kirkpatrick-Baez) condenser optic and a high aspect-ratio multilayer Laue lens-results in an asymmetric optical path in the transmission X-ray microscope. This optics arrangement allows the imaging of 3D nanostructures in opaque objects at a photon energy of 24.2 keV (In-Kα X-ray line). Using a Siemens star test pattern with a minimal feature size of 150 nm, it was proven that features < 150 nm can be resolved. In-Kα radiation is generated from a Ga-In alloy target using a laboratory X-ray source that employs the liquid-metal-jet technology. Since the penetration depth of X-rays into the samples is significantly larger compared to 8 keV photons used in state-of-the-art laboratory X-ray microscopes (Cu-Kα radiation), 3D-nanopattered materials and structures can be imaged nondestructively in mm to cm thick samples. This means that destructive de-processing, thinning or cross-sectioning of the samples are not needed for the visualization of interconnect structures in microelectronic products manufactured using advanced packaging technologies. The application of laboratory transmission X-ray microscopy in the hard X-ray regime is demonstrated for Cu/Cu6Sn5/Cu microbump interconnects fabricated using solid-liquid interdiffusion (SLID) bonding.
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Affiliation(s)
| | | | - Joerg Grenzer
- deepXscan GmbH, Zeppelinstr. 1, 01324 Dresden, Germany
| | - Iuliana Panchenko
- Institute of Electronic Packaging Technology, Technische Universität Dresden, Helmholtzstr. 10, 01069 Dresden, Germany
- Fraunhofer Institute for Reliability and Microintegration, All Silicon System Integration Dresden, Ringstr. 12, 01468 Moritzburg, Germany
| | - Peter Krueger
- Fraunhofer Institute for Ceramic Technologies and Systems, Maria-Reiche-Str. 5, 01099 Dresden, Germany
| | - Andre Clausner
- Fraunhofer Institute for Ceramic Technologies and Systems, Maria-Reiche-Str. 5, 01099 Dresden, Germany
| | - Ehrenfried Zschech
- deepXscan GmbH, Zeppelinstr. 1, 01324 Dresden, Germany
- Research Area Nanomaterials, Brandenburg University of Technology Cottbus-Senftenberg, Konrad-Zuse-Str. 1, 03046 Cottbus, Germany
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3
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Matsuyama S, Inoue T, Hata K, Iriyama H, Yamauchi K. Wide field-of-view x-ray imaging optical system using grazing-incidence mirrors. APPLIED OPTICS 2022; 61:10465-10470. [PMID: 36607107 DOI: 10.1364/ao.475891] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/16/2022] [Accepted: 11/07/2022] [Indexed: 06/17/2023]
Abstract
A field-curvature-corrected imaging optical system for x-ray microscopy using only grazing-incidence mirrors is proposed. It combines a Wolter type I (WO1) mirror pair, which forms a real image, with field curvature correction (FCC) optics-a convex hyperbolic mirror pair-that form a virtual image; compensation of the field curvatures realizes a wide field-of-view (FOV) and high magnification. Ray-tracing and wave-optics simulations verified the efficacy of the design, for which a FOV width was 111 µm-4.7 times larger than that for the uncorrected WO1 design. The addition of FCC optics also produced a 2.3-fold increase in magnification.
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Ohba A, Nakano T, Onoda S, Mochizuki T, Nakamoto K, Hotaka H. Laboratory-size x-ray microscope using Wolter mirror optics and an electron-impact x-ray source. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2021; 92:093704. [PMID: 34598496 DOI: 10.1063/5.0059906] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/14/2021] [Accepted: 09/06/2021] [Indexed: 06/13/2023]
Abstract
We developed a laboratory-size three-dimensional water-window x-ray microscope using condenser and objective grazing incidence Wolter type I mirrors, an electron-impact-type x-ray source, and a back-illuminated CCD. The imaging system was improved for practical applications in life science research fields. Using a new objective mirror with reduced figure errors, a resolution limit of 3.1 line pairs/μm was achieved for two-dimensional transmission images and sub-micrometer-scale three-dimensional structures were resolved. Incorporating a cryogenic stage into the x-ray microscope, we observed biological samples embedded in ice to evaluate the usefulness of observation in the water-window region and multi-energy observation was demonstrated using an x-ray source with multiple x-ray tubes.
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Affiliation(s)
- Akira Ohba
- Hamamatsu Photonics K.K., 5000 Hirakuchi Hamakita-ku, Hamamatsu City 434-8601, Japan
| | - Tomoyasu Nakano
- Hamamatsu Photonics K.K., 5000 Hirakuchi Hamakita-ku, Hamamatsu City 434-8601, Japan
| | - Shinobu Onoda
- Hamamatsu Photonics K.K., 5000 Hirakuchi Hamakita-ku, Hamamatsu City 434-8601, Japan
| | - Takahiro Mochizuki
- Hamamatsu Photonics K.K., 5000 Hirakuchi Hamakita-ku, Hamamatsu City 434-8601, Japan
| | - Katsuhiro Nakamoto
- Hamamatsu Photonics K.K., 5000 Hirakuchi Hamakita-ku, Hamamatsu City 434-8601, Japan
| | - Hisaya Hotaka
- Hamamatsu Photonics K.K., 5000 Hirakuchi Hamakita-ku, Hamamatsu City 434-8601, Japan
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5
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Xu W, Xu W, Bouet N, Zhou J, Yan H, Huang X, Lu M, Zalalutdinov M, Chu YS, Nazaretski E. Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy. MICROMACHINES 2020; 11:E939. [PMID: 33076523 PMCID: PMC7602850 DOI: 10.3390/mi11100939] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/25/2020] [Revised: 10/10/2020] [Accepted: 10/13/2020] [Indexed: 11/16/2022]
Abstract
We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm2 and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion etching. The platform accommodates two linear MLLs in a pre-defined configuration with precise angular and lateral position control. In this work, we discuss the design and microfabrication of the platform, and characterization regarding MLLs assembly, position control, repeatability, and stability. The results demonstrate that a micromachined platform can be used for the assembly of a variety of MLLs with different dimensions and optical parameters. The angular misalignment of 2D MLLs is well controlled in the range of the designed accuracy, down to a few millidegrees. The separation distance between MLLs is adjustable from hundreds to more than one thousand micrometers. The use of the developed platform greatly simplifies the alignment procedure of the MLL optics and reduces the complexity of the X-ray microscope. It is a significant step forward for the development of monolithic 2D MLL nanofocusing optics for high-resolution X-ray microscopy.
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Affiliation(s)
- Wei Xu
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA; (W.X.); (W.X.); (N.B.); (J.Z.); (H.Y.); (X.H.); (Y.S.C.)
| | - Weihe Xu
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA; (W.X.); (W.X.); (N.B.); (J.Z.); (H.Y.); (X.H.); (Y.S.C.)
| | - Nathalie Bouet
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA; (W.X.); (W.X.); (N.B.); (J.Z.); (H.Y.); (X.H.); (Y.S.C.)
| | - Juan Zhou
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA; (W.X.); (W.X.); (N.B.); (J.Z.); (H.Y.); (X.H.); (Y.S.C.)
| | - Hanfei Yan
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA; (W.X.); (W.X.); (N.B.); (J.Z.); (H.Y.); (X.H.); (Y.S.C.)
| | - Xiaojing Huang
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA; (W.X.); (W.X.); (N.B.); (J.Z.); (H.Y.); (X.H.); (Y.S.C.)
| | - Ming Lu
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA;
| | | | - Yong S. Chu
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA; (W.X.); (W.X.); (N.B.); (J.Z.); (H.Y.); (X.H.); (Y.S.C.)
| | - Evgeny Nazaretski
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA; (W.X.); (W.X.); (N.B.); (J.Z.); (H.Y.); (X.H.); (Y.S.C.)
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6
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Xu W, Xu W, Bouet N, Zhou J, Yan H, Huang X, Pattammattel A, Gao Y, Lu M, Zalalutdinov M, Chu YS, Nazaretski E. 2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy. OPTICS EXPRESS 2020; 28:17660-17671. [PMID: 32679971 DOI: 10.1364/oe.389555] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/31/2020] [Accepted: 05/21/2020] [Indexed: 06/11/2023]
Abstract
We report on the development of 2D integrated multilayer Laue lens (MLL) nanofocusing optics used for high-resolution x-ray microscopy. A Micro-Electro-Mechanical-Systems (MEMS) - based template has been designed and fabricated to accommodate two linear MLL optics in pre-aligned configuration. The orthogonality requirement between two MLLs has been satisfied to a better than 6 millidegrees level, and the separation along the x-ray beam direction was controlled on a micrometer scale. Developed planar 2D MLL structure has demonstrated astigmatism free point focus of ∼14 nm by ∼13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy. Approaching 10 nm resolution with integrated 2D MLL optic is a significant step forward in applications of multilayer Laue lenses for high-resolution hard x-ray microscopy and their adoption by the general x-ray microscopy community.
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7
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Egawa S, Owada S, Motoyama H, Yamaguchi G, Matsuzawa Y, Kume T, Kubota Y, Tono K, Yabashi M, Ohashi H, Mimura H. Full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers. OPTICS EXPRESS 2019; 27:33889-33897. [PMID: 31878448 DOI: 10.1364/oe.27.033889] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/12/2019] [Accepted: 10/21/2019] [Indexed: 06/10/2023]
Abstract
We developed a full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers. The Wolter mirrors for a condenser and an objective were fabricated using an electroforming process with a precisely figured master mandrel. In the imaging system constructed at SACLA BL1, sub-micrometer spatial resolution was achieved at wavelengths of 10.3 and 3.4 nm. Single-shot bright-field images were acquired with a maximum illumination intensity of 7×1014 W/cm2.
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8
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Murray KT, Pedersen AF, Mohacsi I, Detlefs C, Morgan AJ, Prasciolu M, Yildirim C, Simons H, Jakobsen AC, Chapman HN, Poulsen HF, Bajt S. Multilayer Laue lenses at high X-ray energies: performance and applications. OPTICS EXPRESS 2019; 27:7120-7138. [PMID: 30876283 DOI: 10.1364/oe.27.007120] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/21/2018] [Accepted: 02/17/2019] [Indexed: 06/09/2023]
Abstract
X-ray microscopy at photon energies above 15 keV is very attractive for the investigation of atomic and nanoscale properties of technologically relevant structural and bio materials. This method is limited by the quality of X-ray optics. Multilayer Laue lenses (MLLs) have the potential to make a major impact in this field because, as compared to other X-ray optics, they become more efficient and effective with increasing photon energy. In this work, MLLs were utilized with hard X-rays at photon energies up to 34.5 keV. The design, fabrication, and performance of these lenses are presented, and their application in several imaging configurations is described. In particular, two "full field" modes of imaging were explored, which provide various contrast modalities that are useful for materials characterisation. These include point projection imaging (or Gabor holography) for phase contrast imaging and direct imaging with both bright-field and dark-field illumination. With high-efficiency MLLs, such modes offer rapid data collection as compared with scanning methods as well as a large field of views.
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9
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Leake SJ, Chahine GA, Djazouli H, Zhou T, Richter C, Hilhorst J, Petit L, Richard MI, Morawe C, Barrett R, Zhang L, Homs-Regojo RA, Favre-Nicolin V, Boesecke P, Schülli TU. The Nanodiffraction beamline ID01/ESRF: a microscope for imaging strain and structure. JOURNAL OF SYNCHROTRON RADIATION 2019; 26:571-584. [PMID: 30855270 PMCID: PMC6412176 DOI: 10.1107/s160057751900078x] [Citation(s) in RCA: 27] [Impact Index Per Article: 5.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/30/2018] [Accepted: 01/16/2019] [Indexed: 06/02/2023]
Abstract
The ID01 beamline has been built to combine Bragg diffraction with imaging techniques to produce a strain and mosaicity microscope for materials in their native or operando state. A scanning probe with nano-focused beams, objective-lens-based full-field microscopy and coherent diffraction imaging provide a suite of tools which deliver micrometre to few nanometre spatial resolution combined with 10-5 strain and 10-3 tilt sensitivity. A detailed description of the beamline from source to sample is provided and serves as a reference for the user community. The anticipated impact of the impending upgrade to the ESRF - Extremely Brilliant Source is also discussed.
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Affiliation(s)
- Steven J. Leake
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Gilbert A. Chahine
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Hamid Djazouli
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Tao Zhou
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Carsten Richter
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Jan Hilhorst
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Lucien Petit
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Marie-Ingrid Richard
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
- Aix Marseille Université, CNRS, Université de Toulon, IM2NP UMR 7334, 13397 Marseille, France
| | - Christian Morawe
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Raymond Barrett
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Lin Zhang
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | | | | | - Peter Boesecke
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
| | - Tobias U. Schülli
- ESRF – The European Synchrotron, 71 Avenue des Martyrs, 38000 Grenoble, France
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10
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Zschech E, Löffler M, Krüger P, Gluch J, Kutukova K, Zgłobicka I, Silomon J, Rosenkranz R, Standke Y, Topal E. Laboratory Computed X-Ray Tomography – A Nondestructive Technique for 3D Microstructure Analyis of Materials. ACTA ACUST UNITED AC 2018. [DOI: 10.3139/147.110537] [Citation(s) in RCA: 14] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]
Affiliation(s)
- E. Zschech
- Fraunhofer Institute for Ceramic Technologies and Systems Dresden , Maria-Reiche-Strasse 2, 01109 Dresden , Germany; e-mail:
| | - M. Löffler
- Dresden University of Technology , Dresden Center for Nanoanalysis, 01062 Dresden , Germany
| | - P. Krüger
- Fraunhofer Institute for Ceramic Technologies and Systems Dresden , Maria-Reiche-Strasse 2, 01109 Dresden , Germany; e-mail:
| | - J. Gluch
- Fraunhofer Institute for Ceramic Technologies and Systems Dresden , Maria-Reiche-Strasse 2, 01109 Dresden , Germany; e-mail:
| | - K. Kutukova
- Fraunhofer Institute for Ceramic Technologies and Systems Dresden , Maria-Reiche-Strasse 2, 01109 Dresden , Germany; e-mail:
| | - I. Zgłobicka
- Warsaw University of Technology , ul. Woloska 141, 02 – 507 Warszawa , Poland
| | - J. Silomon
- Fraunhofer Institute for Ceramic Technologies and Systems Dresden , Maria-Reiche-Strasse 2, 01109 Dresden , Germany; e-mail:
| | - R. Rosenkranz
- Fraunhofer Institute for Ceramic Technologies and Systems Dresden , Maria-Reiche-Strasse 2, 01109 Dresden , Germany; e-mail:
| | - Y. Standke
- Fraunhofer Institute for Ceramic Technologies and Systems Dresden , Maria-Reiche-Strasse 2, 01109 Dresden , Germany; e-mail:
| | - E. Topal
- Dresden University of Technology , Dresden Center for Nanoanalysis, 01062 Dresden , Germany
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11
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Keskinbora K, Sanli UT, Baluktsian M, Grévent C, Weigand M, Schütz G. High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:2049-2056. [PMID: 30116695 PMCID: PMC6071703 DOI: 10.3762/bjnano.9.194] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/21/2018] [Accepted: 07/13/2018] [Indexed: 06/08/2023]
Abstract
Fresnel zone plates (FZP) are diffractive photonic devices used for high-resolution imaging and lithography at short wavelengths. Their fabrication requires nano-machining capabilities with exceptional precision and strict tolerances such as those enabled by modern lithography methods. In particular, ion beam lithography (IBL) is a noteworthy method thanks to its robust direct writing/milling capability. IBL allows for rapid prototyping of high-resolution FZPs that can be used for high-resolution imaging at soft X-ray energies. Here, we discuss improvements in the process enabling us to write zones down to 15 nm in width, achieving an effective outermost zone width of 30 nm. With a 35% reduction in process time and an increase in resolution by 26% compared to our previous results, we were able to resolve 21 nm features of a test sample using the FZP. The new process conditions are then applied for fabrication of large arrays of high-resolution zone plates. Results show that relatively large areas can be decorated with nanostructured devices via IBL by using multipurpose SEM/FIB instruments with potential applications in FEL focusing, extreme UV and soft X-ray lithography and as wavefront sensing devices for beam diagnostics.
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Affiliation(s)
- Kahraman Keskinbora
- Max Planck Institute for Intelligent Systems, Heisenbergstrasse 3, 70569 Stuttgart, Germany
| | - Umut Tunca Sanli
- Max Planck Institute for Intelligent Systems, Heisenbergstrasse 3, 70569 Stuttgart, Germany
| | - Margarita Baluktsian
- Max Planck Institute for Intelligent Systems, Heisenbergstrasse 3, 70569 Stuttgart, Germany
| | - Corinne Grévent
- Max Planck Institute for Intelligent Systems, Heisenbergstrasse 3, 70569 Stuttgart, Germany
| | - Markus Weigand
- Max Planck Institute for Intelligent Systems, Heisenbergstrasse 3, 70569 Stuttgart, Germany
| | - Gisela Schütz
- Max Planck Institute for Intelligent Systems, Heisenbergstrasse 3, 70569 Stuttgart, Germany
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12
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Huang X, Xu W, Nazaretski E, Bouet N, Zhou J, Chu YS, Yan H. Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses. OPTICS EXPRESS 2017; 25:8698-8704. [PMID: 28437947 DOI: 10.1364/oe.25.008698] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
We report scanning hard x-ray imaging with a monolithic focusing optic consisting of two multilayer Laue lenses (MLLs) bonded together. With optics pre-characterization and accurate control of the bonding process, we show that a common focal plane for both MLLs can be realized at 9.317 keV. Using bonded MLLs, we obtained a scanning transmission image of a star test pattern with a resolution of 50 × 50 nm2. By applying a ptychography algorithm, we obtained a probe size of 17 × 38 nm2 and an object image with a resolution of 13 × 13 nm2. The significant reduction in alignment complexity for bonded MLLs will greatly extend the application range in both scanning and full-field x-ray microscopies.
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13
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Abstract
Multi-keV X-ray microscopy has been particularly successful in bridging the resolution gap between optical and electron microscopy. However, resolutions below 20 nm are still considered challenging, as high throughput direct imaging methods are limited by the availability of suitable optical elements. In order to bridge this gap, we present a new type of Fresnel zone plate lenses aimed at the sub-20 and the sub-10 nm resolution range. By extending the concept of double-sided zone plate stacking, we demonstrate the doubling of the effective line density and thus the resolution and provide large aperture, singlechip optical devices with 15 and 7 nm smallest zone widths. The detailed characterization of these lenses shows excellent optical properties with focal spots down to 7.8 nm. Beyond wave front characterization, the zone plates also excel in typical imaging scenarios, verifying their resolution close to their diffraction limited optical performance.
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14
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Kubec A, Melzer K, Gluch J, Niese S, Braun S, Patommel J, Burghammer M, Leson A. Point focusing with flat and wedged crossed multilayer Laue lenses. JOURNAL OF SYNCHROTRON RADIATION 2017; 24:413-421. [PMID: 28244434 DOI: 10.1107/s1600577517001722] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/10/2016] [Accepted: 02/01/2017] [Indexed: 06/06/2023]
Abstract
Point focusing measurements using pairs of directly bonded crossed multilayer Laue lenses (MLLs) are reported. Several flat and wedged MLLs have been fabricated out of a single deposition and assembled to realise point focusing devices. The wedged lenses have been manufactured by adding a stress layer onto flat lenses. Subsequent bending of the structure changes the relative orientation of the layer interfaces towards the stress-wedged geometry. The characterization at ESRF beamline ID13 at a photon energy of 10.5 keV demonstrated a nearly diffraction-limited focusing to a clean spot of 43 nm × 44 nm without significant side lobes with two wedged crossed MLLs using an illuminated aperture of approximately 17 µm × 17 µm to eliminate aberrations originating from layer placement errors in the full 52.7 µm × 52.7 µm aperture. These MLLs have an average individual diffraction efficiency of 44.5%. Scanning transmission X-ray microscopy measurements with convenient working distances were performed to demonstrate that the lenses are suitable for user experiments. Also discussed are the diffraction and focusing properties of crossed flat lenses made from the same deposition, which have been used as a reference. Here a focal spot size of 28 nm × 33 nm was achieved and significant side lobes were noticed at an illuminated aperture of approximately 23 µm × 23 µm.
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Affiliation(s)
- Adam Kubec
- Fraunhofer IWS Dresden, Winterbergstraße 28, 01277 Dresden, Germany
| | - Kathleen Melzer
- Fraunhofer IKTS, Maria-Reiche-Straße 2, 01109 Dresden, Germany
| | - Jürgen Gluch
- Fraunhofer IKTS, Maria-Reiche-Straße 2, 01109 Dresden, Germany
| | - Sven Niese
- AXO DRESDEN GmbH, Gasanstaltstraße 8b, 01237 Dresden, Germany
| | - Stefan Braun
- Fraunhofer IWS Dresden, Winterbergstraße 28, 01277 Dresden, Germany
| | - Jens Patommel
- Institute of Structural Physics, Technische Universität Dresden, 01069 Dresden, Germany
| | | | - Andreas Leson
- Fraunhofer IWS Dresden, Winterbergstraße 28, 01277 Dresden, Germany
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15
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Li Q, Gluch J, Krüger P, Gall M, Neinhuis C, Zschech E. Pollen structure visualization using high-resolution laboratory-based hard X-ray tomography. Biochem Biophys Res Commun 2016; 479:272-276. [PMID: 27639647 DOI: 10.1016/j.bbrc.2016.09.058] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/10/2016] [Accepted: 09/12/2016] [Indexed: 11/25/2022]
Abstract
A laboratory-based X-ray microscope is used to investigate the 3D structure of unstained whole pollen grains. For the first time, high-resolution laboratory-based hard X-ray microscopy is applied to study pollen grains. Based on the efficient acquisition of statistically relevant information-rich images using Zernike phase contrast, both surface- and internal structures of pine pollen - including exine, intine and cellular structures - are clearly visualized. The specific volumes of these structures are calculated from the tomographic data. The systematic three-dimensional study of pollen grains provides morphological and structural information about taxonomic characters that are essential in palynology. Such studies have a direct impact on disciplines such as forestry, agriculture, horticulture, plant breeding and biodiversity.
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Affiliation(s)
- Qiong Li
- Fraunhofer-Institut für Keramische Technologien und Systeme, Maria-Reiche-Straße 2, 01109, Dresden, Germany.
| | - Jürgen Gluch
- Fraunhofer-Institut für Keramische Technologien und Systeme, Maria-Reiche-Straße 2, 01109, Dresden, Germany
| | - Peter Krüger
- Fraunhofer-Institut für Keramische Technologien und Systeme, Maria-Reiche-Straße 2, 01109, Dresden, Germany
| | - Martin Gall
- Fraunhofer-Institut für Keramische Technologien und Systeme, Maria-Reiche-Straße 2, 01109, Dresden, Germany
| | - Christoph Neinhuis
- Department of Biology, Technische Universität Dresden, Zellescher Weg 20b, 01062, Dresden, Germany
| | - Ehrenfried Zschech
- Fraunhofer-Institut für Keramische Technologien und Systeme, Maria-Reiche-Straße 2, 01109, Dresden, Germany
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16
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Conley R, Bouet N, Chu YS, Huang X, Kang HC, Macrander AT, Maser J, Nazaretski E, Stephenson GB, Yan H. Multilayer Laue Lens: A Brief History and Current Status. ACTA ACUST UNITED AC 2016. [DOI: 10.1080/08940886.2016.1198669] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/21/2022]
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17
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Huang X, Conley R, Bouet N, Zhou J, Macrander A, Maser J, Yan H, Nazaretski E, Lauer K, Harder R, Robinson IK, Kalbfleisch S, Chu YS. Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens. OPTICS EXPRESS 2015; 23:12496-12507. [PMID: 26074505 DOI: 10.1364/oe.23.012496] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
We report on the fabrication and the characterization of a wedged multilayer Laue lens for x-ray nanofocusing. The lens was fabricated using a sputtering deposition technique, in which a specially designed mask was employed to introduce a thickness gradient in the lateral direction of the multilayer. X-ray characterization shows an efficiency of 27% and a focus size of 26 nm at 14.6 keV, in a good agreement with theoretical calculations. These results indicate that the desired wedging is achieved in the fabricated structure. We anticipate that continuous development on wedged MLLs will advance x-ray nanofocusing optics to new frontiers and enrich capabilities and opportunities for hard X-ray microscopy.
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