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Prencipe A, Gyger S, Baghban MA, Zichi J, Zeuner KD, Lettner T, Schweickert L, Steinhauer S, Elshaari AW, Gallo K, Zwiller V. Wavelength-Sensitive Superconducting Single-Photon Detectors on Thin Film Lithium Niobate Waveguides. Nano Lett 2023; 23:9748-9752. [PMID: 37871304 PMCID: PMC10636877 DOI: 10.1021/acs.nanolett.3c02324] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/21/2023] [Revised: 10/19/2023] [Accepted: 10/20/2023] [Indexed: 10/25/2023]
Abstract
Lithium niobate, because of its nonlinear and electro-optical properties, is one of the materials of choice for photonic applications. The development of nanostructuring capabilities of thin film lithium niobate (TFLN) permits fabrication of small footprint, low-loss optical circuits. With the recent implementation of on-chip single-photon detectors, this architecture is among the most promising for realizing on-chip quantum optics experiments. In this Letter, we report on the implementation of superconducting nanowire single-photon detectors (SNSPDs) based on NbTiN on 300 nm thick TFLN ridge nano-waveguides. We demonstrate a waveguide-integrated wavelength meter based on the photon energy dependence of the superconducting detectors. The device operates at the telecom C- and L-bands and has a footprint smaller than 300 × 180 μm2 and critical currents between ∼12 and ∼14 μA, which ensures operation with minimum heat dissipation. Our results hold promise for future densely packed on-chip wavelength-multiplexed quantum communication systems.
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Affiliation(s)
| | | | - Mohammad Amin Baghban
- Department of Applied Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, Stockholm SE-106 91, Sweden
| | - Julien Zichi
- Department of Applied Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, Stockholm SE-106 91, Sweden
| | - Katharina D. Zeuner
- Department of Applied Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, Stockholm SE-106 91, Sweden
| | - Thomas Lettner
- Department of Applied Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, Stockholm SE-106 91, Sweden
| | - Lucas Schweickert
- Department of Applied Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, Stockholm SE-106 91, Sweden
| | - Stephan Steinhauer
- Department of Applied Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, Stockholm SE-106 91, Sweden
| | - Ali W. Elshaari
- Department of Applied Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, Stockholm SE-106 91, Sweden
| | - Katia Gallo
- Department of Applied Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, Stockholm SE-106 91, Sweden
| | - Val Zwiller
- Department of Applied Physics, KTH Royal Institute of Technology, Roslagstullsbacken 21, Stockholm SE-106 91, Sweden
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Stern B, Kim K, Gariah H, Bitauld D. Athermal silicon photonic wavemeter for broadband and high-accuracy wavelength measurements. Opt Express 2021; 29:29946-29959. [PMID: 34614728 DOI: 10.1364/oe.432588] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/11/2021] [Accepted: 08/16/2021] [Indexed: 06/13/2023]
Abstract
We propose and demonstrate an integrated wavemeter capable of accurate and broadband measurements without control or knowledge of the temperature. In our design, interferometers composed of silicon and silicon nitride waveguides enable accurate measurements of an input optical wavelength despite large and rapid temperature fluctuations of 20°C by leveraging the disparity in thermo-optic properties of the waveguides. We derive formulas which resolve the wavelength and temperature ambiguity of the interferometers. The fabricated wavemeter chip is found to have a mean accuracy of 11 pm over an 80 nm range near 1550 nm. To our knowledge, this is the first demonstration of an athermal silicon wavemeter and the lowest measurement error across such a broad wavelength range using silicon photonics. This result may reduce the cost and size of wavemeters used in combination with integrated lasers for optical communications, sensing, and other applications.
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Hillmer H, Woidt C, Istock A, Kobylinskiy A, Nguyen DT, Ahmed N, Brunner R, Kusserow T. Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers. Nanomaterials (Basel) 2021; 11:E164. [PMID: 33440826 DOI: 10.3390/nano11010164] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/30/2020] [Revised: 12/23/2020] [Accepted: 01/04/2021] [Indexed: 01/21/2023]
Abstract
Optical spectrometers and sensors have gained enormous importance in metrology and information technology, frequently involving the question of size, resolution, sensitivity, spectral range, efficiency, reliability, and cost. Nanomaterials and nanotechnological fabrication technologies have huge potential to enable an optimization between these demands, which in some cases are counteracting each other. This paper focuses on the visible and near infrared spectral range and on five types of optical sensors (optical spectrometers): classical grating-based miniaturized spectrometers, arrayed waveguide grating devices, static Fabry–Pérot (FP) filter arrays on sensor arrays, tunable microelectromechanical systems (MEMS) FP filter arrays, and MEMS tunable photonic crystal filters. The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated.
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Nicholas Porter J, Jackson JS, Durfee DS, Sandberg RL. Laser wavelength metrology with low-finesse etalons and Bayer filters. Opt Express 2020; 28:37788-37797. [PMID: 33379607 DOI: 10.1364/oe.409466] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/08/2020] [Accepted: 11/18/2020] [Indexed: 06/12/2023]
Abstract
We present a wavelength meter with picometer-scale resolution based on etaloning effects of inexpensive glass slides and the built-in color filters of a consumer grade CMOS camera. After calibrating the device to a commercial meter, we tested the device's calibration stability using two tunable visible lasers for a period of over 16 days. The wavelength error over that entire period has a standard deviation of 5.29 parts per million (ppm) about a most probable error of 0.90 ppm. Within 24 hours of calibration, this improves to 0.04 ppm with a standard deviation of 3.94 ppm.
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Meng F, Zhao Y, Wang H, Zhang Y. High-performance compact spectrometer based on multimode interference in a tapered spiral-shaped waveguide. Opt Express 2019; 27:38349-38358. [PMID: 31878603 DOI: 10.1364/oe.27.038349] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/30/2019] [Accepted: 11/25/2019] [Indexed: 06/10/2023]
Abstract
Multimode interference patterns are strongly dependent on spectral components and can be used as fingerprints to reconstruct a spectrum with random amplitudes. Motivated by this concept, we designed and realized a high-performance compact spectrometer based on a tapered spiral-shaped waveguide with a detector array integrated directly on top. The device relies on imaging the multimode interference from leaky modes, resulting in a resolution of 20 pm in the visible range and a bandwidth from 545 to 725 nm with a 250 µm radius structure. Spectra of multiple narrow lines and synthesized broadband are well reconstructed. The ability to achieve such high resolution and broad bandwidth in a compact footprint is expected to have a significant role in low-cost and multifunctional integrated systems.
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Zobenica Ž, van der Heijden RW, Petruzzella M, Pagliano F, Leijssen R, Xia T, Midolo L, Cotrufo M, Cho Y, van Otten FWM, Verhagen E, Fiore A. Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology. Nat Commun 2017; 8:2216. [PMID: 29263425 PMCID: PMC5738394 DOI: 10.1038/s41467-017-02392-5] [Citation(s) in RCA: 32] [Impact Index Per Article: 4.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/31/2017] [Accepted: 11/26/2017] [Indexed: 11/09/2022] Open
Abstract
Spectrometry is widely used for the characterization of materials, tissues, and gases, and the need for size and cost scaling is driving the development of mini and microspectrometers. While nanophotonic devices provide narrowband filtering that can be used for spectrometry, their practical application has been hampered by the difficulty of integrating tuning and read-out structures. Here, a nano-opto-electro-mechanical system is presented where the three functionalities of transduction, actuation, and detection are integrated, resulting in a high-resolution spectrometer with a micrometer-scale footprint. The system consists of an electromechanically tunable double-membrane photonic crystal cavity with an integrated quantum dot photodiode. Using this structure, we demonstrate a resonance modulation spectroscopy technique that provides subpicometer wavelength resolution. We show its application in the measurement of narrow gas absorption lines and in the interrogation of fiber Bragg gratings. We also explore its operation as displacement-to-photocurrent transducer, demonstrating optomechanical displacement sensing with integrated photocurrent read-out.
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Affiliation(s)
- Žarko Zobenica
- Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
| | - Rob W van der Heijden
- Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands
| | - Maurangelo Petruzzella
- Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands
| | - Francesco Pagliano
- Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands
| | - Rick Leijssen
- Center for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098 XG, Amsterdam, The Netherlands
| | - Tian Xia
- Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands
| | - Leonardo Midolo
- Niels Bohr Institute, University of Copenhagen, Blegdamsvej 17, 2100, Copenhagen, Denmark
| | - Michele Cotrufo
- Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands
| | - YongJin Cho
- Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands
| | - Frank W M van Otten
- Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands
| | - Ewold Verhagen
- Center for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098 XG, Amsterdam, The Netherlands
| | - Andrea Fiore
- Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands
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Muneeb M, Vasiliev A, Ruocco A, Malik A, Chen H, Nedeljkovic M, Penades JS, Cerutti L, Rodriguez JB, Mashanovich GZ, Smit MK, Tourni E, Roelkens G. III-V-on-silicon integrated micro - spectrometer for the 3 μm wavelength range. Opt Express 2016; 24:9465-9472. [PMID: 27137560 DOI: 10.1364/oe.24.009465] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
A compact (1.2 mm2) fully integrated mid-IR spectrometer operating in the 3 μm wavelength range is presented. To our knowledge this is the longest wavelength integrated spectrometer operating in the important wavelength window for spectroscopy of organic compounds. The spectrometer is based on a silicon-on-insulator arrayed waveguide grating filter. An array of InAs0.91Sb0.09 p-i-n photodiodes is heterogeneously integrated on the spectrometers output grating couplers using adhesive bonding. The spectrometer insertion loss is less than 3 dB and the waveguide-referred responsivity of the integrated photodiodes at room temperature is 0.3 A/W.
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Jones TB, Otterstrom N, Jackson J, Archibald J, Durfee DS. Laser wavelength metrology with color sensor chips. Opt Express 2015; 23:32471-32480. [PMID: 26699036 DOI: 10.1364/oe.23.032471] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
We present a laser wavelength meter based on a commercial color sensor chip. The chip consists of an array of photodiodes with different absorptive color filters. By comparing the relative amplitudes of light on the photodiodes, the wavelength of light can be determined. In addition to absorption in the filters, etalon effects add additional spectral features which improve the precision of the device. Comparing the measurements from the device to a commercial wavelength meter and to an atomic reference, we found that the device has picometer-level precision and picometer-scale drift over a period longer than a month.
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Roelkens G, Abassi A, Cardile P, Dave U, de Groote A, de Koninck Y, Dhoore S, Fu X, Gassenq A, Hattasan N, Huang Q, Kumari S, Keyvaninia S, Kuyken B, Li L, Mechet P, Muneeb M, Sanchez D, Shao H, Spuesens T, Subramanian A, Uvin S, Tassaert M, van Gasse K, Verbist J, Wang R, Wang Z, Zhang J, van Campenhout J, Yin X, Bauwelinck J, Morthier G, Baets R, van Thourhout D. III-V-on-Silicon Photonic Devices for Optical Communication and Sensing. Photonics 2015; 2:969-1004. [DOI: 10.3390/photonics2030969] [Citation(s) in RCA: 94] [Impact Index Per Article: 10.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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Wan NH, Meng F, Schröder T, Shiue RJ, Chen EH, Englund D. High-resolution optical spectroscopy using multimode interference in a compact tapered fibre. Nat Commun 2015. [DOI: 10.1038/ncomms8762] [Citation(s) in RCA: 59] [Impact Index Per Article: 6.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022] Open
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