Feng D, Yan Y, Jin G, Fan S. Design and fabrication of continuous-profile diffractive micro-optical elements as a beam splitter.
APPLIED OPTICS 2004;
43:5476-5480. [PMID:
15508604 DOI:
10.1364/ao.43.005476]
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Abstract
An optimization algorithm that combines a rigorous electromagnetic computation model with an effective iterative method is utilized to design diffractive micro-optical elements that exhibit fast convergence and better design quality. The design example is a two-dimensional 1-to-2 beam splitter that can symmetrically generate two focal lines separated by 80 microm at the observation plane with a small angle separation of +/- 16 degrees. Experimental results are presented for an element with continuous profiles fabricated into a monocrystalline silicon substrate that has a width of 160 microm and a focal length of 140 microm at a free-space wavelength of 10.6 microm.
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