Higher-order optical resonance node detection of integrated disk microresonator

Focused ion beam engineered whispering gallery mode resonators with open cavity structure

We report the realization of an open cavity whispering gallery mode optical resonator, in which the circulating light traverses a free space gap. We utilize focused ion beam microfabrication to precisely cut a 10 μm wide notch into the perimeter of a crystalline disc. We have shown that this modified resonator structure supports high quality modes, and demonstrated qualify factor, Q ~/= 10(6), limited by the notch surface roughness due to the ion milling process. Furthermore, we investigated the spatial profile of the modes inside the open cavity with a microfabricated probe mechanism. This new type of resonator structure facilitates interaction of the cavity's optical field with mechanical resonators as well as individual atoms or molecules.