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Yang R, Wei H, Tang G, Cao B, Chen K. Advanced Crystallization Methods for Thin-Film Lithium Niobate and Its Device Applications. MATERIALS (BASEL, SWITZERLAND) 2025; 18:951. [PMID: 40077179 PMCID: PMC11901258 DOI: 10.3390/ma18050951] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/31/2024] [Revised: 02/11/2025] [Accepted: 02/12/2025] [Indexed: 03/14/2025]
Abstract
Lithium niobate (LiNbO3) has remarkable ferroelectric properties, and its unique crystal structure allows it to undergo significant spontaneous polarization. Lithium niobate plays an important role in the fields of electro-optic modulation, sensing and acoustics due to its excellent electro-optic and piezoelectric properties. Thin-film LiNbO3 (TFLN) has attracted much attention due to its unique physical properties, stable properties and easy processing. This review introduces several main preparation methods for TFLN, including chemical vapor deposition (CVD), molecular beam epitaxy (MBE), pulsed laser deposition (PLD), magnetron sputtering and Smartcut technology. The development of TFLN devices, especially the recent research on sensors, memories, optical waveguides and EO modulators, is introduced. With the continuous advancement of manufacturing technology and integration technology, TFLN devices are expected to occupy a more important position in future photonic integrated circuits.
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Affiliation(s)
- Rongbang Yang
- Institute of Novel Semiconductors, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (R.Y.); (G.T.)
| | - Haoming Wei
- Shandong Provincial Key Laboratory of Laser Polarization and Information Technology, School of Physics and Physical Engineering, Qufu Normal University, Qufu 273165, China
| | - Gongbin Tang
- Institute of Novel Semiconductors, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (R.Y.); (G.T.)
| | - Bingqiang Cao
- School of Materials Science and Engineering, University of Jinan, Jinan 250022, China;
| | - Kunfeng Chen
- Institute of Novel Semiconductors, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (R.Y.); (G.T.)
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Wang C, Meng C, Mei X, Gui L, Thrane PCV, Chen H, Ding F, Xu K, Bozhevolnyi SI. MEMS-metasurface-enabled mode-switchable vortex lasers. SCIENCE ADVANCES 2024; 10:eadq6299. [PMID: 39565849 PMCID: PMC11578166 DOI: 10.1126/sciadv.adq6299] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/23/2024] [Accepted: 10/18/2024] [Indexed: 11/22/2024]
Abstract
Compared to conventional lasers limited to generating static modes, mode-switchable lasers equipped with adjustable optics significantly enhance the flexibility and versatility of coherent light sources. However, most current approaches to achieving mode-switchable lasers depend on conventional, i.e., inherently bulky and slow, optical components. Here, we demonstrate fiber lasers empowered by electrically actuated intracavity microelectromechanical system (MEMS)-based optical metasurface (MEMS-OMS) enabling mode switching between fundamental Gaussian and vortex modes at ~1030 nm. By finely adjusting the voltage applied to the MEMS mirror, high-contrast switching between Gaussian (l = 0) and vortex (l = 1, 2, 3, and 5, depending on the OMS arrangement) laser modes is achieved, featuring high mode purities (>95%) and fast responses (~100 microseconds). The proposed intracavity MEMS-OMS-enabled laser configuration provides an at-source solution for generating high-purity fast-switchable laser modes, with potential applications ranging from advanced optical imaging to optical tweezers, optical machining, and intelligent photonics.
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Affiliation(s)
- Chuanshuo Wang
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
- Centre for Nano Optics, University of Southern Denmark, Campusvej 55, Odense M DK-5230, Denmark
| | - Chao Meng
- Centre for Nano Optics, University of Southern Denmark, Campusvej 55, Odense M DK-5230, Denmark
| | - Xianglong Mei
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
| | - Lili Gui
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
| | - Paul C. V. Thrane
- Centre for Nano Optics, University of Southern Denmark, Campusvej 55, Odense M DK-5230, Denmark
- SINTEF Smart Sensors and Microsystems, Gaustadalleen 23C, 0737 Oslo, Norway
| | - Hao Chen
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
| | - Fei Ding
- Centre for Nano Optics, University of Southern Denmark, Campusvej 55, Odense M DK-5230, Denmark
| | - Kun Xu
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
| | - Sergey I. Bozhevolnyi
- Centre for Nano Optics, University of Southern Denmark, Campusvej 55, Odense M DK-5230, Denmark
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Ju Y, Zhou H, Huang Y, Zhao Y, Deng X, Yang Z, Wang F, Gu Q, Deng G, Zuo H. The electro-optic spatial light modulator of lithium niobate metasurface based on plasmonic quasi-bound states in the continuum. NANOSCALE 2023; 15:13965-13970. [PMID: 37565589 DOI: 10.1039/d3nr02278a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/12/2023]
Abstract
Metasurface has attracted massive interest owing to its ability to control light arbitrarily in a wide range of applications, such as high-speed imaging, optical interconnection, and spectroscopy. Here we propose a free space light modulator combined with a gold grating metasurface based on lithium niobate (LiNbO3). The quasi-bound states in the continuum (quasi-BIC) are achieved in the metasurface. In addition, the plasmonic quasi-BIC and the guided-mode resonance (GMR) can be modulated by controlling the polarization of the incident light without any geometric adjustment. Thus, the working wavelength range from 1480 nm to 1620 nm was achieved, and the maximum resonance depth reached about 51% at the resonant wavelength. In addition, the insertion loss of the device was -2.8 dB at a wavelength of 1510 nm. Furthermore, the dynamic modulation speed reached up to 190 MHz and the highest signal-to-noise ratio (SNR) could reach about 49 dB at a frequency of 65 MHz. The data showed potential for the material for applications such as near-infrared imaging, beam steering, and free-space optical communication links.
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Affiliation(s)
- Yao Ju
- College of Physics, Sichuan University, Chengdu 610064, China
| | - Hao Zhou
- College of Electronics and Information Engineering, Sichuan University, Chengdu 610064, China.
| | - Yulei Huang
- College of Electronics and Information Engineering, Sichuan University, Chengdu 610064, China.
| | - Yin Zhao
- College of Physics, Sichuan University, Chengdu 610064, China
| | - Xin Deng
- College of Physics, Sichuan University, Chengdu 610064, China
| | - Zuogang Yang
- College of Physics, Sichuan University, Chengdu 610064, China
| | - Fangjie Wang
- College of Electronics and Information Engineering, Sichuan University, Chengdu 610064, China.
| | - Qiongqiong Gu
- College of Electronics and Information Engineering, Sichuan University, Chengdu 610064, China.
| | - Guoliang Deng
- College of Electronics and Information Engineering, Sichuan University, Chengdu 610064, China.
| | - Haoyi Zuo
- College of Physics, Sichuan University, Chengdu 610064, China
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Ni F, Li H, Liu H, Zheng Y, Chen X. High-speed optical pulse shaping based on programmable lithium niobate spatial light modulators. OPTICS LETTERS 2023; 48:884-887. [PMID: 36790966 DOI: 10.1364/ol.477967] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/11/2022] [Accepted: 01/06/2023] [Indexed: 06/18/2023]
Abstract
Pulse shaping plays a key role in various applications of ultrafast lasers, such as optical communications, laser micromachining, microscopy, and quantum coherent control. Conventional pulse shaping devices based on liquid crystal spatial light modulators (LCSLMs) or digital micromirror devices (DMDs) only have the shaping speed of several hertz to kilohertz, which is not suitable for applications requiring a high-speed response. Here, we demonstrate a high-speed programmable lithium niobate spatial light modulator (LNSLM) with 128 individual modulation channels and a modulation speed that can reach 1 MHz. Then we establish a high-speed LNSLM-based Fourier-transform (FT) pulse shaper to realize high-speed pulse shaping, and the update rate can reach 350 kHz, only limited by the electric circuit. The proposed high-speed pulse shaper scheme opens new avenues for future applications of ultrafast science, such as microscopic imaging, interaction between light and matter, and spectroscopy.
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Li Z, Zheng Y, Diao X, Li R, Sun N, Xu Y, Li X, Duan S, Gong W, Si K. Robust and adjustable dynamic scattering compensation for high-precision deep tissue optogenetics. Commun Biol 2023; 6:128. [PMID: 36721006 PMCID: PMC9889738 DOI: 10.1038/s42003-023-04487-w] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/14/2022] [Accepted: 01/16/2023] [Indexed: 02/02/2023] Open
Abstract
The development of high-precision optogenetics in deep tissue is limited due to the strong optical scattering induced by biological tissue. Although various wavefront shaping techniques have been developed to compensate the scattering, it is still a challenge to non-invasively characterize the dynamic scattered optical wavefront inside the living tissue. Here, we present a non-invasive scattering compensation system with fast multidither coherent optical adaptive technique (fCOAT), which allows the rapid wavefront correction and stable focusing in dynamic scattering medium. We achieve subcellular-resolution focusing through 500-μm-thickness brain slices, or even three pieces overlapped mouse skulls after just one iteration with a 589 nm CW laser. Further, focusing through dynamic scattering medium such as live rat ear is also successfully achieved. The formed focus can maintain longer than 60 s, which satisfies the requirements of stable optogenetics manipulation. Moreover, the focus size is adjustable from subcellular level to tens of microns to freely match the various manipulation targets. With the specially designed fCOAT system, we successfully achieve single-cellular optogenetic manipulation through the brain tissue, with a stimulation efficiency enhancement up to 300% compared with that of the speckle.
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Affiliation(s)
- Zhenghan Li
- State Key Laboratory of Modern Optical Instrumentation, Department of Psychiatry of the First Affiliated Hospital, Zhejiang University School of Medicine, Hangzhou, China
- College of Optical Science and Engineering, Zhejiang University, Hangzhou, China
| | - Yameng Zheng
- Liangzhu Laboratory, MOE Frontier Science Center for Brain Science and Brain-machine Integration, State Key Laboratory of Brain-machine Intelligence, Zhejiang University, Hangzhou, China
| | - Xintong Diao
- Liangzhu Laboratory, MOE Frontier Science Center for Brain Science and Brain-machine Integration, State Key Laboratory of Brain-machine Intelligence, Zhejiang University, Hangzhou, China
| | - Rongrong Li
- Liangzhu Laboratory, MOE Frontier Science Center for Brain Science and Brain-machine Integration, State Key Laboratory of Brain-machine Intelligence, Zhejiang University, Hangzhou, China
| | - Ning Sun
- Liangzhu Laboratory, MOE Frontier Science Center for Brain Science and Brain-machine Integration, State Key Laboratory of Brain-machine Intelligence, Zhejiang University, Hangzhou, China
| | - Yongxian Xu
- Liangzhu Laboratory, MOE Frontier Science Center for Brain Science and Brain-machine Integration, State Key Laboratory of Brain-machine Intelligence, Zhejiang University, Hangzhou, China
| | - Xiaoming Li
- Liangzhu Laboratory, MOE Frontier Science Center for Brain Science and Brain-machine Integration, State Key Laboratory of Brain-machine Intelligence, Zhejiang University, Hangzhou, China
| | - Shumin Duan
- Liangzhu Laboratory, MOE Frontier Science Center for Brain Science and Brain-machine Integration, State Key Laboratory of Brain-machine Intelligence, Zhejiang University, Hangzhou, China
| | - Wei Gong
- Liangzhu Laboratory, MOE Frontier Science Center for Brain Science and Brain-machine Integration, State Key Laboratory of Brain-machine Intelligence, Zhejiang University, Hangzhou, China.
| | - Ke Si
- State Key Laboratory of Modern Optical Instrumentation, Department of Psychiatry of the First Affiliated Hospital, Zhejiang University School of Medicine, Hangzhou, China.
- College of Optical Science and Engineering, Zhejiang University, Hangzhou, China.
- Liangzhu Laboratory, MOE Frontier Science Center for Brain Science and Brain-machine Integration, State Key Laboratory of Brain-machine Intelligence, Zhejiang University, Hangzhou, China.
- Intelligent Optics & Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing, Zhejiang, China.
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Ju Y, Zhou H, Zhao Y, Wang F, Yang Z, Deng X, Wu Z, Guoliang D, Zuo H. Hybrid resonance metasurface for a lithium niobate electro-optical modulator. OPTICS LETTERS 2022; 47:5905-5908. [PMID: 37219133 DOI: 10.1364/ol.474784] [Citation(s) in RCA: 7] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/06/2022] [Accepted: 10/15/2022] [Indexed: 05/24/2023]
Abstract
Electrically tunable metasurfaces can realize two-dimensional pixelated spatial light modulation and have a wide range of applications in optical switching, free-space communication, high-speed imaging, and so on, arousing the interest of researchers. Here, a gold nanodisk metasurface on a lithium-niobate-on-insulator (LNOI) substrate is fabricated and experimentally demonstrated as an electrically tunable optical metasurface for transmissive free-space light modulation. Using the hybrid resonance formed by the localized surface plasmon resonance (LSPR) of gold nanodisks and the Fabry-Perot (FP) resonance, the incident light is trapped in the gold nanodisk edges and a thin lithium niobate layer to realize field enhancement. In this way, an extinction ratio of 40% is achieved at the resonance wavelength. In addition, the proportion of hybrid resonance components can be adjusted by the size of the gold nanodisks. By applying a driving voltage of ± 2.8 V, a dynamic modulation of 135 MHz is achieved at resonant wavelength. The highest signal-to-noise ratio (SNR) is up to 48 dB at 75 MHz. This work paves the way for the realization of spatial light modulators based on CMOS-compatible LiNbO3 planar optics, which can be used in lidar, tunable displays, and so on.
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Yu Z, Li H, Zhong T, Park JH, Cheng S, Woo CM, Zhao Q, Yao J, Zhou Y, Huang X, Pang W, Yoon H, Shen Y, Liu H, Zheng Y, Park Y, Wang LV, Lai P. Wavefront shaping: A versatile tool to conquer multiple scattering in multidisciplinary fields. Innovation (N Y) 2022; 3:100292. [PMID: 36032195 PMCID: PMC9405113 DOI: 10.1016/j.xinn.2022.100292] [Citation(s) in RCA: 26] [Impact Index Per Article: 8.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/30/2022] [Accepted: 07/23/2022] [Indexed: 10/26/2022] Open
Abstract
Optical techniques offer a wide variety of applications as light-matter interactions provide extremely sensitive mechanisms to probe or treat target media. Most of these implementations rely on the usage of ballistic or quasi-ballistic photons to achieve high spatial resolution. However, the inherent scattering nature of light in biological tissues or tissue-like scattering media constitutes a critical obstacle that has restricted the penetration depth of non-scattered photons and hence limited the implementation of most optical techniques for wider applications. In addition, the components of an optical system are usually designed and manufactured for a fixed function or performance. Recent advances in wavefront shaping have demonstrated that scattering- or component-induced phase distortions can be compensated by optimizing the wavefront of the input light pattern through iteration or by conjugating the transmission matrix of the scattering medium. This offers unprecedented opportunities in many applications to achieve controllable optical delivery or detection at depths or dynamically configurable functionalities by using scattering media to substitute conventional optical components. In this article, the recent progress of wavefront shaping in multidisciplinary fields is reviewed, from optical focusing and imaging with scattering media, functionalized devices, modulation of mode coupling, and nonlinearity in multimode fiber to multimode fiber-based applications. Apart from insights into the underlying principles and recent advances in wavefront shaping implementations, practical limitations and roadmap for future development are discussed in depth. Looking back and looking forward, it is believed that wavefront shaping holds a bright future that will open new avenues for noninvasive or minimally invasive optical interactions and arbitrary control inside deep tissues. The high degree of freedom with multiple scattering will also provide unprecedented opportunities to develop novel optical devices based on a single scattering medium (generic or customized) that can outperform traditional optical components.
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