Passive-demodulation pulse interferometry for ultrasound detection with a high dynamic range

Silicon photonic acoustic detector (SPADE) using a silicon nitride microring resonator

Silicon photonics is an emerging platform for acoustic sensing, offering exceptional miniaturization and sensitivity. While efforts have focused on silicon-based resonators, silicon nitride resonators can potentially achieve higher Q-factors, further enhancing sensitivity. In this work, a 30 µm silicon nitride microring resonator was fabricated and coated with an elastomer to optimize acoustic sensitivity and signal fidelity. The resonator was characterized acoustically, and its capability for optoacoustic tomography was demonstrated. An acoustic bandwidth of 120 MHz and a noise-equivalent pressure of ∼ 7 mPa/Hz1/2 were demonstrated. The spatially dependent impulse response agreed with theoretical predictions, and spurious acoustic signals, such as reverberations and surface acoustic waves, had a marginal impact. High image fidelity optoacoustic tomography of a 20 µm knot was achieved, confirming the detector's imaging capabilities. The results show that silicon nitride offers low signal distortion and high-resolution optoacoustic imaging, proving its versatility for acoustic imaging applications.

Miniaturized ultrasound detector arrays in silicon photonics using pulse transmission amplitude monitoring

Silicon photonics holds promise for a new generation of ultrasound-detection technology, based on optical resonators, with unparalleled miniaturization levels, sensitivities, and bandwidths, creating new possibilities for minimally invasive medical devices. While existing fabrication technologies are capable of producing dense resonator arrays whose resonance frequency is pressure sensitive, simultaneously monitoring the ultrasound-induced frequency modulation of numerous resonators has remained a challenge. Conventional techniques, which are based on tuning a continuous wave laser to the resonator wavelength, are not scalable due to the wavelength disparity between the resonators, requiring a separate laser for each resonator. In this work, we show that the Q-factor and transmission peak of silicon-based resonators can also be pressure sensitive, exploit this phenomenon to develop a readout scheme based on monitoring the amplitude, rather than frequency, at the output of the resonators using a single-pulse source, and demonstrate its compatibility with optoacoustic tomography.

Silicon-photonics acoustic detector for optoacoustic micro-tomography

Medical ultrasound and optoacoustic (photoacoustic) imaging commonly rely on the concepts of beam-forming and tomography for image formation, enabled by piezoelectric array transducers whose element size is comparable to the desired resolution. However, the tomographic measurement of acoustic signals becomes increasingly impractical for resolutions beyond 100 µm due to the reduced efficiency of piezoelectric elements upon miniaturization. For higher resolutions, a microscopy approach is preferred, in which a single focused ultrasound transducer images the object point-by-point, but the bulky apparatus and long acquisition time of this approach limit clinical applications. In this work, we demonstrate a miniaturized acoustic detector capable of tomographic imaging with spread functions whose width is below 20 µm. The detector is based on an optical resonator fabricated in a silicon-photonics platform coated by a sensitivity-enhancing elastomer, which also effectively eliminates the parasitic effect of surface acoustic waves. The detector is demonstrated in vivo in high-resolution optoacoustic tomography.

Burst-mode pulse interferometry for enabling low-noise multi-channel optical detection of ultrasound

Ultrasound detection via optical resonators can achieve high levels of miniaturization and sensitivity as compared to piezoelectric detectors, but its scale-up from a single detector to an array is highly challenging. While the use of wideband sources may enable parallel interrogation of multiple resonators, it comes at the cost of reduction in the optical power, and ultimately in sensitivity, per channel. In this work we have developed a new interferometric approach to overcome this signal loss by using high-power bursts that are synchronized with the time window in which ultrasound detection is performed. Each burst is composed of a train of low-noise optical pulses which are sufficiently wideband to interrogate an array of resonators with non-overlapping spectra. We demonstrate our method, termed burst-mode pulse interferometry, for interrogating a single resonator in which the optical power was reduced to emulate the power loss per channel that occurs in parallel interrogation of 20 to 200 resonators. The use of bursts has led to up 25-fold improvement in sensitivity without affecting the shape of the acoustic signals, potentially enabling parallel low-noise interrogation of resonator arrays with a single source.

Real-time ultrasound sensing with a mode-optimized photonic crystal slab

Integrated photonic sensors can provide large scale, flexible detection schemes. Photonic crystal slabs (PCSs) offer a miniaturized platform for wideband, sensitive ultrasound detection by exploiting the photoelastic effect in water. However, poor modal overlap with the sensing medium and non-negligible absorption loss of the aqueous medium have previously limited PCS sensor performance. In this study, we detail the development and optimization of a PCS-based acoustic sensor by adding to it a low-loss high-index polymer cladding layer. Exploiting a mode-optimized TM-like optical resonance present in a PCS, with high bulk index sensitivity (>600nm/RIU) and quality factor Q (>8000), we demonstrate real-time ultrasound sensing at a noise equivalent pressure of 170 Pa (1.9Pa/Hz). The PCS sensor is backside-coupled to an optical fiber, which, along with its intensity-based ultrasound-sensing architecture, will allow us to scale up easily to a 2D array. This work paves the way to a sensitive compact ultrasound detector for photoacoustic-based diagnostics and monitoring of tissue.

Simultaneous multi-channel ultrasound detection via phase modulated pulse interferometry

In optical detection of ultrasound, resonators with high Q-factors are often used to maximize sensitivity. However, in order to perform parallel interrogation, conventional interferometric techniques require an overlap between the spectra of all the resonators, which is difficult to achieve with high Q-factor resonators. In this paper, a new method is developed for parallel interrogation of optical resonators with non-overlapping spectra. The method is based on a phase-modulation scheme for pulse interferometry (PM-PI) and requires only a single photodetector and sampling channel per ultrasound detector. Using PM-PI, parallel ultrasound detection is demonstrated with four high Q-factor resonators.

Ultrasound detection via low-noise pulse interferometry using a free-space Fabry-Pérot

Coherence-restored pulse interferometry (CRPI) is a recently developed method for optical detection of ultrasound that achieves shot-noise-limited sensitivity and high dynamic range. In principle, the wideband source employed in CRPI may enable the interrogation of multiple detectors by using wavelength multiplexing. However, the noise-reduction scheme in CRPI has not been shown to be compatible with wideband operation. In this work, we introduce a new scheme for CRPI that relies on a free-space Fabry-Pérot filter for noise reduction and a pulse stretcher for reducing nonlinear effects. Using our scheme, we demonstrate that shot-noise-limited detection may be achieved for a spectral band of 80 nm and powers of up to 5 mW.