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Ma ZC, Fan J, Wang H, Chen W, Yang GZ, Han B. Microfluidic Approaches for Microactuators: From Fabrication, Actuation, to Functionalization. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2023; 19:e2300469. [PMID: 36855777 DOI: 10.1002/smll.202300469] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/10/2023] [Indexed: 06/02/2023]
Abstract
Microactuators can autonomously convert external energy into specific mechanical motions. With the feature sizes varying from the micrometer to millimeter scale, microactuators offer many operation and control possibilities for miniaturized devices. In recent years, advanced microfluidic techniques have revolutionized the fabrication, actuation, and functionalization of microactuators. Microfluidics can not only facilitate fabrication with continuously changing materials but also deliver various signals to stimulate the microactuators as desired, and consequently improve microfluidic chips with multiple functions. Herein, this cross-field that systematically correlates microactuator properties and microfluidic functions is comprehensively reviewed. The fabrication strategies are classified into two types according to the flow state of the microfluids: stop-flow and continuous-flow prototyping. The working mechanism of microactuators in microfluidic chips is discussed in detail. Finally, the applications of microactuator-enriched functional chips, which include tunable imaging devices, micromanipulation tools, micromotors, and microsensors, are summarized. The existing challenges and future perspectives are also discussed. It is believed that with the rapid progress of this cutting-edge field, intelligent microsystems may realize high-throughput manipulation, characterization, and analysis of tiny objects and find broad applications in various fields, such as tissue engineering, micro/nanorobotics, and analytical devices.
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Affiliation(s)
- Zhuo-Chen Ma
- Department of Automation, Shanghai Jiao Tong University, Shanghai, 200240, China
- Key Laboratory of System Control and Information Processing, Ministry of Education of China, Shanghai, 200240, China
- Shanghai Engineering Research Center of Intelligent Control and Management, Shanghai, 200240, China
- Institute of Medical Robotics, School of Biomedical Engineering, Shanghai Jiao Tong University, No. 800 Dongchuan Road, Shanghai, 200240, China
| | - Jiahao Fan
- Department of Automation, Shanghai Jiao Tong University, Shanghai, 200240, China
- Key Laboratory of System Control and Information Processing, Ministry of Education of China, Shanghai, 200240, China
- Shanghai Engineering Research Center of Intelligent Control and Management, Shanghai, 200240, China
| | - Hesheng Wang
- Department of Automation, Shanghai Jiao Tong University, Shanghai, 200240, China
- Key Laboratory of System Control and Information Processing, Ministry of Education of China, Shanghai, 200240, China
- Shanghai Engineering Research Center of Intelligent Control and Management, Shanghai, 200240, China
| | - Weidong Chen
- Department of Automation, Shanghai Jiao Tong University, Shanghai, 200240, China
- Key Laboratory of System Control and Information Processing, Ministry of Education of China, Shanghai, 200240, China
- Shanghai Engineering Research Center of Intelligent Control and Management, Shanghai, 200240, China
- Institute of Medical Robotics, School of Biomedical Engineering, Shanghai Jiao Tong University, No. 800 Dongchuan Road, Shanghai, 200240, China
| | - Guang-Zhong Yang
- Institute of Medical Robotics, School of Biomedical Engineering, Shanghai Jiao Tong University, No. 800 Dongchuan Road, Shanghai, 200240, China
| | - Bing Han
- Institute of Medical Robotics, School of Biomedical Engineering, Shanghai Jiao Tong University, No. 800 Dongchuan Road, Shanghai, 200240, China
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