Broadband out-of-plane coupling at visible wavelengths

Curved GaAs cantilever waveguides for the vertical coupling to photonic integrated circuits

We report the nanofabrication and characterization of optical spot-size converter couplers based on curved GaAs cantilever waveguides. Using the stress mismatch between the GaAs substrate and deposited Cr-Ni-Au strips, single-mode waveguides can be bent out-of-plane in a controllable manner. A stable and vertical orientation of the out-coupler is achieved by locking the spot-size converter at a fixed 90 ∘ angle via short-range forces. The optical transmission is characterized as a function of temperature and polarization, resulting in a broad-band chip-to-fiber coupling extending over 150 nm wavelength bandwidth at cryogenic temperatures, with the lower bound for the coupling efficiency into the TE mode being 16±2% in the interval 900-1050 nm. The methods reported here are fully compatible with quantum photonic integrated circuit technology with quantum dot emitters, and open opportunities to design novel photonic devices with enhanced functionality.

An electroluminescent and tunable cavity-enhanced carbon-nanotube-emitter in the telecom band

Emerging photonic information processing systems require chip-level integration of controllable nanoscale light sources at telecommunication wavelengths. Currently, substantial challenges remain in the dynamic control of the sources, the low-loss integration into a photonic environment, and in the site-selective placement at desired positions on a chip. Here, we overcome these challenges using heterogeneous integration of electroluminescent (EL), semiconducting carbon nanotubes (sCNTs) into hybrid two dimensional - three dimensional (2D-3D) photonic circuits. We demonstrate enhanced spectral line shaping of the EL sCNT emission. By back-gating the sCNT-nanoemitter we achieve full electrical dynamic control of the EL sCNT emission with high on-off ratio and strong enhancement in the telecommunication band. Using nanographene as a low-loss material to electrically contact sCNT emitters directly within a photonic crystal cavity enables highly efficient EL coupling without compromising the optical quality of the cavity. Our versatile approach paves the way for controllable integrated photonic circuits.

Micro-dispenser-based optical packaging scheme for grating couplers

Due to their sub-millimeter spatial resolution, ink-based additive manufacturing tools are typically considered less attractive than nanophotonics. Among these tools, precision micro-dispensers with sub-nanoliter volumetric control offer the finest spatial resolution: down to 50 µm. Within a sub-second, a flawless, surface-tension-driven spherical shape of the dielectric dot is formed as a self-assembled µlens. When combined with dispersive nanophotonic structures defined on a silicon-on-insulator substrate, we show that the dispensed dielectric µlenses [numerical aperture (NA) = 0.36] engineer the angular field distribution of vertically coupled nanostructures. The µlenses improve the angular tolerance for the input and reduces the angular spread of the output beam in the far field. The micro-dispenser is fast, scalable, and back-end-of-line compatible, allowing geometric-offset-caused efficiency reductions and center wavelength drift to be easily fixed. The design concept is experimentally verified by comparing several exemplary grating couplers with and without a µlens on top. A difference of less than 1 dB between incident angles of 7° and 14° is observed in the index-matched µlens, while the reference grating coupler shows around 5 dB contrast.

Low-Divergence hBN Single-Photon Source with a 3D-Printed Low-Fluorescence Elliptical Polymer Microlens

Efficiently collecting light from single-photon emitters is crucial for photonic quantum technologies. Here, we develop and use an ultralow fluorescence photopolymer to three-dimensionally print micrometer-sized elliptical lenses on individual precharacterized single-photon emitters in hexagonal boron nitride (hBN) nanocrystals, operating in the visible regime. The elliptical lens design beams the light highly efficiently into the far field, rendering bulky objective lenses obsolete. Using back focal plane imaging, we confirm that the emission is collimated to a narrow low-divergence beam with a half width at half-maximum of 2.2°. Using photon correlation measurements, we demonstrate that the single-photon character remains undisturbed by the polymer lens. The strongly directed emission and increased collection efficiency is highly beneficial for quantum optical experiments. Furthermore, our approach paves the way for a highly parallel fiber-based detection of single photons from hBN nanocrystals.

Ultrafast quantum key distribution using fully parallelized quantum channels

The field of quantum information processing offers secure communication protected by the laws of quantum mechanics and is on the verge of finding wider application for the information transfer of sensitive data. To improve cost-efficiency, extensive research is being carried out on the various components required for high data throughput using quantum key distribution (QKD). Aiming for an application-oriented solution, we report the realization of a multichannel QKD system for plug-and-play high-bandwidth secure communication at telecom wavelengths. We designed a rack-sized multichannel superconducting nanowire single photon detector (SNSPD) system, as well as a highly parallelized time-correlated single photon counting (TCSPC) unit. Our system is linked to an FPGA-controlled QKD evaluation setup for continuous operation, allowing us to achieve high secret key rates using a coherent-one-way protocol.

Cryo-compatible opto-mechanical low-voltage phase-modulator integrated with superconducting single-photon detectors

Photonic integrated circuits (PICs) have enabled novel functionality in quantum optics, quantum information processing and quantum communication. PICs based on Silicon Nitride (Si₃N₄) provide low-loss passive components and are compatible with efficient superconducting nanowire single-photon detectors (SNSPDs). For realizing functional quantum photonic systems, the integration with active phase-shifters is needed which is challenging at the cryogenic temperatures needed for operating SNSPDs. Here we demonstrate a cryo-compatible phase shifter using a low-voltage opto-mechanical modulator and show joint operation with SNSPDs at 1.3 K. We achieve a half-wave voltage of 4.6 V, single-photon detection with 88% on-chip detection efficiency (OCDE) and a low timing jitter of 12.2 ps. Our approach allows for operating reconfigurable quantum photonic circuits with low dissipation in a cryogenic setting.

Efficient four-way vertical coupler array for chip-scale space-division-multiplexing applications

We propose and demonstrate a three-dimensional nano-printed four-channel vertical coupler array on the silicon-on-insulator platform for efficient chip-to-multicore fiber coupling. The proposed structure provides less than 1 dB loss in a single lane and around 2-4 dB loss in multicore fiber coupling, over 100 nm 1 dB bandwidth, and large 1 dB misalignment tolerances of more than 5 µm in the xy plane and 20 µm in the z direction. The device shows great promise for photonic integrated devices for space-division-multiplexing technology based on multicore fiber.

Efficient self-imaging grating couplers on a lithium-niobate-on-insulator platform at near-visible and telecom wavelengths

Lithium-niobate-on-insulator (LNOI) has emerged as a promising platform in the field of integrated photonics. Nonlinear optical processes and fast electro-optic modulation have been reported with outstanding performance in ultra-low loss waveguides. In order to harness the advantages offered by the LNOI technology, suitable fiber-to-chip interconnects operating at different wavelength ranges are demanded. Here we present easily manufacturable, self-imaging apodized grating couplers, featuring a coupling efficiency of the TE₀ mode as high as ≃47.1% at λ=1550 nm and ≃44.9% at λ=775 nm. Our approach avoids the use of any metal back-reflector for an improved directivity or multi-layer structures for an enhanced grating strength.

Parallel convolutional processing using an integrated photonic tensor core

With the proliferation of ultrahigh-speed mobile networks and internet-connected devices, along with the rise of artificial intelligence (AI)¹, the world is generating exponentially increasing amounts of data that need to be processed in a fast and efficient way. Highly parallelized, fast and scalable hardware is therefore becoming progressively more important². Here we demonstrate a computationally specific integrated photonic hardware accelerator (tensor core) that is capable of operating at speeds of trillions of multiply-accumulate operations per second (10¹² MAC operations per second or tera-MACs per second). The tensor core can be considered as the optical analogue of an application-specific integrated circuit (ASIC). It achieves parallelized photonic in-memory computing using phase-change-material memory arrays and photonic chip-based optical frequency combs (soliton microcombs³). The computation is reduced to measuring the optical transmission of reconfigurable and non-resonant passive components and can operate at a bandwidth exceeding 14 gigahertz, limited only by the speed of the modulators and photodetectors. Given recent advances in hybrid integration of soliton microcombs at microwave line rates^3-5, ultralow-loss silicon nitride waveguides^6,7, and high-speed on-chip detectors and modulators, our approach provides a path towards full complementary metal-oxide-semiconductor (CMOS) wafer-scale integration of the photonic tensor core. Although we focus on convolutional processing, more generally our results indicate the potential of integrated photonics for parallel, fast, and efficient computational hardware in data-heavy AI applications such as autonomous driving, live video processing, and next-generation cloud computing services.

Automated on-axis direct laser writing of coupling elements for photonic chips

Direct laser writing (DLW) has recently been used to create versatile micro-optic structures that facilitate photonic-chip coupling, like free-form lenses, free-form mirrors, and photonic wirebonds. However, at the edges of photonic chips, the top-down/off-axis printing orientation typically used limits the size and complexity of structures and the range of materials compatible with the DLW process. To avoid these issues, we develop a DLW method in which the photonic chip's optical input/output (IO) ports are co-linear with the axis of the lithography beam (on-axis printing). Alignment automation and port identification are enabled by a 1-dimensional barcode-like pattern that is fabricated within the chip's device layer and surrounds the IO waveguides to increase their visibility. We demonstrate passive alignment to these markers using standard machine vision techniques, and print single-element elliptical lenses along an array of 42 ports with a 100 % fabrication yield. These lenses improve fiber-to-chip misalignment tolerance relative to other fiber-based coupling techniques. The 1 dB excess loss diameter increases from ≈ 2.3 μm when using a lensed fiber to ≈ 9.9 μm when using the DLW printed micro-optic and a cleaved fiber. The insertion loss penalty introduced by moving to this misalignment-tolerant coupling approach is limited, with an additional loss (in comparison to the lensed fiber) as small as ≈1 dB and ≈2 dB on average. Going forward, on-axis printing can accommodate a variety of multi-element free-space and guided wave coupling elements, without requiring calibration of printing dose specific to the geometry of the 3D printed structure or to the materials comprising the photonic chip. It also enables novel methods for interconnection between chips. To that end, we fabricate a proof-of-concept 3D photonic wire bond between two vertically stacked photonic chips.

Integration of Diamond-Based Quantum Emitters with Nanophotonic Circuits

Nanophotonics provides a promising approach to advance quantum technology by replicating fundamental building blocks of nanoscale quantum optic systems in large numbers with high reproducibility on monolithic chips. While photonic integrated circuit components and single-photon detectors offer attractive performance on silicon chips, the large-scale integration of individually accessible quantum emitters has remained a challenge. Here, we demonstrate simultaneous optical access to several integrated solid-state spin systems with Purcell-enhanced coupling of single photons with high modal purity from lithographically positioned nitrogen vacancy centers into photonic integrated circuits. Photonic crystal cavities embedded in networks of tantalum pentoxide-on-insulator waveguides provide efficient interfaces to quantum emitters that allow us to optically detect magnetic resonances (ODMR) as desired in quantum sensing. Nanophotonic networks that provide configurable optical interfaces to nanoscale quantum emitters via many independent channels will allow for novel functionality in photonic quantum information processors and quantum sensing schemes.

Tantalum pentoxide nanophotonic circuits for integrated quantum technology

Nanophotonics holds great promise for integrated quantum technologies, but realizing all functionalities for processing quantum states of light in optical waveguides poses an outstanding challenge. Here we show that tantalum pentoxide-on-insulator offers significant advantages for such purpose and experimentally demonstrate crucial photonic integrated circuit components. Exploiting advanced nanophotonic design and state-of-the-art nanofabrication processes, we realize low-loss waveguiding with 1 dB/cm propagation loss, efficient optical fiber-chip interfaces with more than 100 nm bandwidth, micro-ring resonators with quality factors of 357,200 and tunable directional couplers. We further achieve active functionality with nano-electromechanical phase-shifters. Our work enables reconfigurable photonic circuit configurations in the Ta₂O₅ material system with highly favorable optical properties for integrated quantum photonics.