Design of zero reference codes by means of a global optimization method

Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating

In this paper, a novel optical encoder enabling the simultaneous measurement of displacement and the position of precision stages is presented. The encoder is composed of an improved single-track scale grating and a compact two-probe reading head. In the scale grating, multiple reference codes are physically superimposed onto the incremental grooves, in contrast to conventional designs, where an additional track is necessary. The distribution of the reference codes follows a specific mathematical algorithm. For the reading head, a two-probe structure is designed to identify the discrete reference codes by means of the superimposition of the codes with a stationary mask and to read the continuous incremental grooves by means of a grating interferometry, respectively. A prototype encoder was designed, constructed and evaluated, and experimental results show that the distance code precision achieved is 0.5 μm, while the linearity error of the linear displacement measurement is less than 0.06%.

Simultaneous multi-channel absolute position alignment by multi-order grating interferometry

A simultaneous multi-channel absolute position alignment system is investigated to determine the absolute position of a grating mark. By employing a multi-order grating interferometer and a multi-channel phase extraction method, many equivalent measurement results are generated simultaneously for stable and consistent measurement. By combining measurement results of different orders, low-order signals enabled large unambiguous measurement ranges, and high-order signals enhanced the measurement accuracy. Comparison experiments performed using an incremental HeNe reference interferometer yielded the standard deviations of smaller than 11.48nm under laboratory conditions. The proposed scheme will enable a new class of absolute position alignment system for industrial applications.

Design of zero reference codes using cross-entropy method

This paper considers the use of autocorrelation properties to design zero reference codes (ZRCs) for optical applications. Based on the properties of the autocorrelation function, the design of an optimum ZRC problem is transformed into a minimization problem with binary variables, and the objective is to minimize the second maximum of the autocorrelation signal sigma. However, the considerable computational complexity for an exhaustive search through all combinations of (nn (1)l) different code patterns is a potential problem especially for large codes, where n and n1 are the length of the ZRC and the number of transparent slits, respectively. To minimize sigma while reducing the computational complexity at the same time, we introduce the Cross-Entropy (CE) method, an effective algorithm that solves various combinatorial optimization problems to obtain a good code. The computer simulation results show that compared with the conventional genetic algorithm (GA), the proposed CE obtains the better sigma with low computational complexity.

Correlation technique for the compensation of diffraction widening of optical reference signals

Two-grating measurement systems are routinely employed for high-resolution measurements of angular and linear displacement. Usually, these systems incorporate zero reference codes (ZRCs) to obtain a zero reference signal (ZRS), which is used as a stage-homing signal. This signal provides absolute information of the position to the otherwise relative information provided by the two-grating incremental subsystems. A zero reference signal is commonly obtained illuminating the superposition of two identical pseudorandom codes and registering the transmitted light by means of a photodiode. To increase the resolution of the system, a reduction of the grating period and the ZRC widths is required. Due to this reduction, the diffractive effects produce a widening of the ZRS and, in turn, a loss of the measuring accuracy. In this work, we propose a method to narrow the distorted signal obtained with a Lau-based encoder, reinstating the accuracy of the ZRS. The method consists of the inclusion of a correlation mask on the detector. A theoretical model to design the mask has been developed, and experimental results have been obtained that validate the proposed technique.

Design of two-dimensional zero reference codes with a genetic algorithm

In mask-alignment systems a reference signal is needed to align the mask with the silicon wafers. The optical reference signal is the autocorrelation of two two-dimensional (2D) codes with binary transmittance. For a long time, one-dimensional codes have been used in grating-measurement systems to obtain a reference signal. The design of this type of code has needed a great computational effort, which limits the size of the code to about 100 elements. Recently, we have applied genetic algorithms to design codes with arbitrary length. We propose the application of these algorithms to design 2D codes to generate 2D optical signals used in mask-alignment systems.

Optimal design of optical reference signals by use of a genetic algorithm

A new technique for the generation of optical reference signals with optimal properties is presented. In grating measurement systems a reference signal is needed to achieve an absolute measurement of the position. The optical signal is the autocorrelation of two codes with binary transmittance. For a long time, the design of this type of code has required great computational effort, which limits the size of the code to approximately 30 elements. Recently, the application of the dividing rectangles (DIRECT) algorithm has allowed the automatic design of codes up to 100 elements. Because of the binary nature of the problem and the parallel processing of the genetic algorithms, these algorithms are efficient tools for obtaining codes with particular autocorrelation properties. We design optimum zero reference codes with arbitrary length by means of a genetic algorithm enhanced with a restricted search operator.