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Yang Y, Jeon Y, Dong Z, Yang JKW, Haddadi Moghaddam M, Kim DS, Oh DK, Lee J, Hentschel M, Giessen H, Kang D, Kim G, Tanaka T, Zhao Y, Bürger J, Maier SA, Ren H, Jung W, Choi M, Bae G, Chen H, Jeon S, Kim J, Lee E, Kang H, Park Y, Du Nguyen D, Kim I, Cencillo-Abad P, Chanda D, Jing X, Liu N, Martynenko IV, Liedl T, Kwak Y, Nam JM, Park SM, Odom TW, Lee HE, Kim RM, Nam KT, Kwon H, Jeong HH, Fischer P, Yoon J, Kim SH, Shim S, Lee D, Pérez LA, Qi X, Mihi A, Keum H, Shim M, Kim S, Jang H, Jung YS, Rossner C, König TAF, Fery A, Li Z, Aydin K, Mirkin CA, Seong J, Jeon N, Xu Z, Gu T, Hu J, Kwon H, Jung H, Alijani H, Aharonovich I, Kim J, Rho J. Nanofabrication for Nanophotonics. ACS NANO 2025; 19:12491-12605. [PMID: 40152322 DOI: 10.1021/acsnano.4c10964] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 03/29/2025]
Abstract
Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field.
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Affiliation(s)
- Younghwan Yang
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Youngsun Jeon
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Zhaogang Dong
- Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR), Singapore 138634, Singapore
- Department of Materials Science and Engineering, National University of Singapore, Singapore 117575, Singapore
- Singapore University of Technology and Design, Singapore 487372, Singapore
| | - Joel K W Yang
- Singapore University of Technology and Design, Singapore 487372, Singapore
| | - Mahsa Haddadi Moghaddam
- Department of Physics, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea
| | - Dai-Sik Kim
- Department of Physics, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea
| | - Dong Kyo Oh
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Jihae Lee
- Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Mario Hentschel
- fourth Physics Institute and Research Center SCoPE, University of Stuttgart, Stuttgart 70569, Germany
| | - Harald Giessen
- fourth Physics Institute and Research Center SCoPE, University of Stuttgart, Stuttgart 70569, Germany
| | - Dohyun Kang
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Gyeongtae Kim
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Takuo Tanaka
- RIKEN Center for Advanced Photonics, Wako 351-0198, Japan
- Institute of Post-LED Photonics, Tokushima University, Tokushima 770-8501, Japan
| | - Yang Zhao
- Department of Electrical and Computer Engineering, Grainger College of Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States
| | - Johannes Bürger
- Chair in Hybrid Nanosystems, Nanoinstitute Munich, Ludwig-Maximilians-Universität, Munich 80539, Germany
| | - Stefan A Maier
- School of Physics and Astronomy, Monash University, Clayton, VIC 3800, Australia
- Department of Physics, Imperial College London, London SW72AZ, United Kingdom
| | - Haoran Ren
- School of Physics and Astronomy, Monash University, Clayton, VIC 3800, Australia
| | - Wooik Jung
- Department of Creative Convergence Engineering, Hanbat National University, Daejeon, 34158, Republic of Korea
| | - Mansoo Choi
- Global Frontier Center for Multiscale Energy Systems, Seoul National University, Seoul 08826, Republic of Korea
- Department of Mechanical Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Gwangmin Bae
- Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea
| | - Haomin Chen
- Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea
| | - Seokwoo Jeon
- Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea
| | - Jaekyung Kim
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Eunji Lee
- Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Hyunjung Kang
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Yujin Park
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Dang Du Nguyen
- Department of Biophysics, Sungkyunkwan University, Suwon 16419, Republic of Korea
- Department of Intelligent Precision Healthcare Convergence, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Inki Kim
- Department of Biophysics, Sungkyunkwan University, Suwon 16419, Republic of Korea
- Department of Intelligent Precision Healthcare Convergence, Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Pablo Cencillo-Abad
- NanoScience Technology Center, University of Central Florida, Florida 32826, United States
| | - Debashis Chanda
- NanoScience Technology Center, University of Central Florida, Florida 32826, United States
- Department of Physics, University of Central Florida, Florida 32816, United States
- The College of Optics and Photonics, University of Central Florida, Orlando, Florida 32816, United States
| | - Xinxin Jing
- Second Physics Institute, University of Stuttgart Pfaffenwaldring 57, Stuttgart 70569, Germany
- Max Planck Institute for Solid State Research, Heisenbergstrasse 1, Stuttgart D-70569, Germany
| | - Na Liu
- Second Physics Institute, University of Stuttgart Pfaffenwaldring 57, Stuttgart 70569, Germany
- Max Planck Institute for Solid State Research, Heisenbergstrasse 1, Stuttgart D-70569, Germany
| | - Irina V Martynenko
- Faculty of Physics and Center for NanoScience (CeNS) Ludwig-Maxim8ilians-University, Munich 80539, Germany
- Skolkovo Institute of Science and Technology, Moscow 121205, Russia
| | - Tim Liedl
- Faculty of Physics and Center for NanoScience (CeNS) Ludwig-Maxim8ilians-University, Munich 80539, Germany
| | - Yuna Kwak
- Department of Chemistry, Seoul National University, Seoul 08826, Republic of Korea
| | - Jwa-Min Nam
- Department of Chemistry, Seoul National University, Seoul 08826, Republic of Korea
| | - Sang-Min Park
- Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States
| | - Teri W Odom
- Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States
| | - Hye-Eun Lee
- Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Ryeong Myeong Kim
- Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Ki Tae Nam
- Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Hyunah Kwon
- Max Planck Institute for Medical Research, Heidelberg 69120, Germany
- Institute for Molecular Systems Engineering and Advanced Materials, Heidelberg University, Heidelberg 69120, Germany
| | - Hyeon-Ho Jeong
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Gwangju, 61005, Republic of Korea
| | - Peer Fischer
- Max Planck Institute for Medical Research, Heidelberg 69120, Germany
- Institute for Molecular Systems Engineering and Advanced Materials, Heidelberg University, Heidelberg 69120, Germany
- Center for Nanomedicine, Institute for Basic Science (IBS), Seoul 03722, Republic of Korea
- Department of Nano Biomedical Engineering (NanoBME), Yonsei University, Seoul, 03722, Republic of Korea
| | - Jiwon Yoon
- Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Shin-Hyun Kim
- Department of Biomedical Engineering, Yonsei University, Wonju 26493, Republic of Korea
| | - Sangmin Shim
- Department of Biomedical Engineering, Yonsei University, Wonju 26493, Republic of Korea
| | - Dasol Lee
- Department of Biomedical Engineering, Yonsei University, Wonju 26493, Republic of Korea
| | - Luis A Pérez
- Institute of Materials Science of Barcelona (ICMAB-CSIC), Bellaterra, 08193 Spain
| | - Xiaoyu Qi
- Institute of Materials Science of Barcelona (ICMAB-CSIC), Bellaterra, 08193 Spain
| | - Agustin Mihi
- Institute of Materials Science of Barcelona (ICMAB-CSIC), Bellaterra, 08193 Spain
| | - Hohyun Keum
- Digital Health Care R&D Department, Korea Institute of Industrial Technology (KITECH), Cheonan 31056, Republic of Korea
| | - Moonsub Shim
- Department of Materials Science and Engineering, University of Illinois, Urbana-Champaign, Illinois 61801, United States
| | - Seok Kim
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Hanhwi Jang
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Yeon Sik Jung
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Christian Rossner
- Leibniz-Institut für Polymerforschung Dresden e. V., Dresden 01069, Germany
- Faculty of Chemistry and Food Chemistry, Technische Universität Dresden, Dresden 01069, Germany
- Dresden Center for Intelligent Materials (DCIM), Technische Universität Dresden, Dresden 01069, Germany
- Department of Polymers, University of Chemistry and Technology Prague, Prague 6 166 28, Czech Republic
| | - Tobias A F König
- Leibniz-Institut für Polymerforschung Dresden e. V., Dresden 01069, Germany
- Faculty of Chemistry and Food Chemistry, Technische Universität Dresden, Dresden 01069, Germany
- Dresden Center for Intelligent Materials (DCIM), Technische Universität Dresden, Dresden 01069, Germany
- Center for Advancing Electronics Dresden (cfaed), Technische Universität Dresden, Dresden 01069, Germany
| | - Andreas Fery
- Leibniz-Institut für Polymerforschung Dresden e. V., Dresden 01069, Germany
- Center for Advancing Electronics Dresden (cfaed), Technische Universität Dresden, Dresden 01069, Germany
- Physical Chemistry of Polymeric Materials, Technische Universität Dresden, Dresden 01069, Germany
| | - Zhiwei Li
- Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States
- International Institute for Nanotechnology, Northwestern University, Evanston, Illinois 60208, United States
- Department of Chemistry and Biochemistry, University of Maryland, College Park, Mayland 20742, United States
| | - Koray Aydin
- International Institute for Nanotechnology, Northwestern University, Evanston, Illinois 60208, United States
- Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois 60208, United States
| | - Chad A Mirkin
- Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States
- International Institute for Nanotechnology, Northwestern University, Evanston, Illinois 60208, United States
- Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois 60208, United States
| | - Junhwa Seong
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Nara Jeon
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Zhiyun Xu
- Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Tian Gu
- Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Juejun Hu
- Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Hyounghan Kwon
- Center for Quantum Information, Korea Institute of Science and Technology (KIST), Seoul 02792, Republic of Korea
- Division of Quantum Information, KIST School, Korea University of Science and Technology, Seoul 02792, Republic of Korea
| | - Hojoong Jung
- Center for Quantum Information, Korea Institute of Science and Technology (KIST), Seoul 02792, Republic of Korea
| | - Hossein Alijani
- School of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, Australia
- ARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), University of Technology Sydney, Ultimo, New South Wales 2007, Australia
| | - Igor Aharonovich
- School of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, Australia
- ARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), University of Technology Sydney, Ultimo, New South Wales 2007, Australia
| | - Joohoon Kim
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Junsuk Rho
- Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
- Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
- Department of Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
- POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics, Pohang 37673, Republic of Korea
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Ko JH, Yeo JE, Jeong HE, Yoo DE, Lee DW, Oh YW, Jung S, Kang IS, Jeong HH, Song YM. Electrochromic nanopixels with optical duality for optical encryption applications. NANOPHOTONICS (BERLIN, GERMANY) 2024; 13:1119-1129. [PMID: 39633997 PMCID: PMC11501882 DOI: 10.1515/nanoph-2023-0737] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/26/2023] [Accepted: 12/12/2023] [Indexed: 12/07/2024]
Abstract
Advances in nanophotonics have created numerous pathways for light-matter interactions in nanometer scale, enriched by physical and chemical mechanisms. Over the avenue, electrically tunable photonic response is highly desired for optical encryption, optical switch, and structural color display. However, the perceived obstacle, which lies in the energy-efficient tuning mechanism and/or its weak light-matter interaction, is treated as a barrier. Here, we introduce electrochromic nanopixels made of hybrid nanowires integrated with polyaniline (PANI). The device shows optical duality between two resonators: (i) surface plasmon polariton (SPP)-induced waveguide (wavelength-selective absorber) and (ii) ultrathin resonator (broadband absorber). With switching effect of between resonant modes, we achieve enhanced chromatic variation spanning from red to green and blue while operating at a sub-1-volt level, ensuring compatibility with the CMOS voltage range. This modulation is achieved by improving the light-matter interaction, effectively harnessing the intrinsic optical property transition of PANI from lossy to dielectric in response to the redox states. In our experimental approach, we successfully scaled up device fabrication to an 8-inch wafer, tailoring the nanowire array to different dimensions for optical information encryption. Demonstrating distinct chromaticity modulation, we achieve optical encryption of multiple data bits, up to 8 bits per unit cell. By capitalizing on the remarkable sensitivity to the angular dependence of the waveguiding mode, we further enhance the information capacity to an impressive 10 bits per unit cell.
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Affiliation(s)
- Joo Hwan Ko
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Cheomdangwagi-ro 123, Buk-gu, Gwangju61005, Republic of Korea
| | - Ji-Eun Yeo
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Cheomdangwagi-ro 123, Buk-gu, Gwangju61005, Republic of Korea
| | - Hyo Eun Jeong
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Cheomdangwagi-ro 123, Buk-gu, Gwangju61005, Republic of Korea
| | - Dong Eun Yoo
- National Nanofab Center, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon34141, Republic of Korea
| | - Dong Wook Lee
- National Nanofab Center, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon34141, Republic of Korea
| | - Yeon-Wha Oh
- National Nanofab Center, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon34141, Republic of Korea
| | - Sanghee Jung
- National Nanofab Center, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon34141, Republic of Korea
| | - Il-Seok Kang
- National Nanofab Center, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon34141, Republic of Korea
| | - Hyeon-Ho Jeong
- School of Electrical Engineering and Computer Science and Department of Semiconductor Engineering, Gwangju Institute of Science and Technology, Gwangju61005, Republic of Korea
| | - Young Min Song
- School of Electrical Engineering and Computer Science, Department of Semiconductor Engineering, and Artificial Intelligence (AI) Graduate School, Gwangju Institute of Science and Technology (GIST), Cheomdangwagi-ro 123, Buk-gu, Gwangju61005, Republic of Korea
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