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For: Baller T, van Zwol J, de Zwart S, van Veen G, Fell H, Dieleman J. Angle Resolved Time-of-Flight Measurements of the Excimer Laser Induced Etching of Silicon in a Chlorine Environment. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-129-299] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]

For:	Baller T, van Zwol J, de Zwart S, van Veen G, Fell H, Dieleman J. Angle Resolved Time-of-Flight Measurements of the Excimer Laser Induced Etching of Silicon in a Chlorine Environment. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-129-299] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]

Number	Cited by Other Article(s)
1	Feil H, Baller TS, Dieleman J. Effects of post-desorption collisions on the energy distribution of SiCl molecules pulsed-laser desorbed from Cl-covered Si surfaces: Monte-Carlo simulations compared to experiments. ACTA ACUST UNITED AC 1992. [DOI: 10.1007/bf00331673] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse Affiliation(s) Collapse

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Cited by Other Article(s)

Feil H, Baller TS, Dieleman J. Effects of post-desorption collisions on the energy distribution of SiCl molecules pulsed-laser desorbed from Cl-covered Si surfaces: Monte-Carlo simulations compared to experiments. ACTA ACUST UNITED AC 1992. [DOI: 10.1007/bf00331673] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]