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Chen K, Kapadia R, Harker A, Desai S, Seuk Kang J, Chuang S, Tosun M, Sutter-Fella CM, Tsang M, Zeng Y, Kiriya D, Hazra J, Madhvapathy SR, Hettick M, Chen YZ, Mastandrea J, Amani M, Cabrini S, Chueh YL, Ager Iii JW, Chrzan DC, Javey A. Direct growth of single-crystalline III-V semiconductors on amorphous substrates. Nat Commun 2016; 7:10502. [PMID: 26813257 PMCID: PMC4737854 DOI: 10.1038/ncomms10502] [Citation(s) in RCA: 36] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/20/2015] [Accepted: 12/17/2015] [Indexed: 11/09/2022] Open
Abstract
The III-V compound semiconductors exhibit superb electronic and optoelectronic properties. Traditionally, closely lattice-matched epitaxial substrates have been required for the growth of high-quality single-crystal III-V thin films and patterned microstructures. To remove this materials constraint, here we introduce a growth mode that enables direct writing of single-crystalline III-V's on amorphous substrates, thus further expanding their utility for various applications. The process utilizes templated liquid-phase crystal growth that results in user-tunable, patterned micro and nanostructures of single-crystalline III-V's of up to tens of micrometres in lateral dimensions. InP is chosen as a model material system owing to its technological importance. The patterned InP single crystals are configured as high-performance transistors and photodetectors directly on amorphous SiO2 growth substrates, with performance matching state-of-the-art epitaxially grown devices. The work presents an important advance towards universal integration of III-V's on application-specific substrates by direct growth.
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Affiliation(s)
- Kevin Chen
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Rehan Kapadia
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Audrey Harker
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.,Department of Chemical Engineering, University of California, Berkeley, California 94720, USA
| | - Sujay Desai
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Jeong Seuk Kang
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Steven Chuang
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Mahmut Tosun
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Carolin M Sutter-Fella
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Michael Tsang
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Yuping Zeng
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Daisuke Kiriya
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Jubin Hazra
- Department of Electrical Engineering, University of Southern California, Los Angeles, California 90089, USA
| | - Surabhi Rao Madhvapathy
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Mark Hettick
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Yu-Ze Chen
- Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
| | - James Mastandrea
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.,Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA
| | - Matin Amani
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Stefano Cabrini
- Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, 94720 California, USA
| | - Yu-Lun Chueh
- Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
| | - Joel W Ager Iii
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Daryl C Chrzan
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.,Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA
| | - Ali Javey
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.,Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
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