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For: Morgan AE, Broadbent EK, Reader AH. Formation of Titanium Nitride/Silicide Bilayers by Rapid Thermal Anneal in Nitrogen. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-52-279] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
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