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For: Mani SS, Fleming JG, Sniegowski JJ, Boer MPD, Irwin LW, Walraven JA, Tanner DM, Dugger MT. Chemical Vapor Deposition Coating for Micromachines. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-616-21] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
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