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Houbertz R, Schulz J, Fröhlich L, Domann G, Popall M, Serbin J, Chichkov B. Inorganic-organic Hybrid Materials for Real 3-D Sub-νm Lithography. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-780-y4.12] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
Abstract
AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.
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Jacob S, Poinsignon C, Popall M. Inorganic–organic hybrid protonic polymeric materials for fuel cells based on polycondensed and organically cross-linked sulfonyl- and styrene-functionalized alkoxysilanes. Electrochim Acta 2005. [DOI: 10.1016/j.electacta.2005.02.042] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
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