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For: Saxena R, Cho W, Rodriguez O, Gill WN, Plawsky JL. Barrier Layer Morphological Stability and Adhesion to Porous Low-κ Dielectrics. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-812-f3.12] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
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