SiOC-Coated Silicon Nitride Platform for Efficient Phase Actuators

Experimental validation of a building block of passive devices and stochastic analysis of PICs based on SiOC technology

Silicon oxycarbide (SiOC) with a wide tunable refractive index window and low absorption coefficient has emerged as an appealing material platform in integrated photonics. Its physical, optical and chemical properties can be tailored over a large window through changes in composition. The circuit simulation based on the building-block approach is a useful framework for deep exploitation of the potential of photonics in the large-scale integration of complex circuits. In this manuscript, the simulation and experimental results of the waveguide and directional coupler based on SiOC technology have been investigated. A simplified model for the coupling coefficient, within defined limits of width, coupling length and gap, of parallel waveguides of the directional coupler has been proposed and validated experimentally. The building blocks of the waveguide and directional coupler have been prepared and parametrized. The proposed models of these passive devices have been exploited in commercially available circuit simulator for the circuit and stochastic simulations of SiOC based photonic circuits.