Radio Frequency Resonator-Based Flexible Wireless Pressure Sensor with MWCNT-PDMS Bilayer Microstructure

A Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Hollow Hemisphere Dielectric Layer

Capacitive pressure sensors based on porous structures have been widely researched and applied to a variety of practical applications. To date, it remains a big challenge to develop a capacitive pressure sensor with a high sensitivity and good linearity over a wide pressure range. In this paper, a sensitive, flexible, porous capacitive pressure sensor was designed and manufactured by means of the "salt template method" and man-made grooves. To this aim, the size of the salt particles used for forming pores/air voids, time taken for thorough dissolution of salt particles, and the depth of the man-made groove by a pin were taken into consideration to achieve a better effect. With pores and the groove, the sensor is more liable be compressed, which will result in a dramatic decrease in distance between the two electrodes and a conspicuous increase of the effective dielectric constant. The optimize-designed sensor represents a sensitivity 6-8 times more than the sensor without the groove in the pressure range of 0-10 kPa, not to mention the sensor without pores or the groove, and it can keep good linearity within the measurement range (0-50 kPa). Besides, the sensor shows a low detection limit of 3.5 Pa and a fast response speed (≈50 ms), which makes it possible to detect a tiny applied pressure immediately. The fabricated sensor can be applied to wearable devices to monitor finger and wrist bending, and it can be used in the object identification of mechanical claws and object cutting of mechanical arms, and so on.

Graded Mxene-Doped Liquid Metal as Adhesion Interface Aiming for Conductivity Enhancement of Hybrid Rigid-Soft Interconnection

Hybrid rigid-soft electronic system combines the biocompatibility of stretchable electronics and the computing capacity of silicon-based chips, which has a chance to realize a comprehensive stretchable electronic system with perception, control, and algorithm in near future. However, a reliable rigid-soft interconnection interface is urgently required to ensure both the conductivity and stretchability under a large strain. To settle this demand, this paper proposes a graded Mxene-doped liquid metal (LM) method to achieve a stable solid-liquid composite interconnect (SLCI) between the rigid chip and stretchable interconnect lines. To overcome the surface tension of LM, a high-conductive Mxene is doped for the balance between adhesion and liquidity of LM. And the high-concentration doping could prevent the contact failure with chip pins, while the low-concentration doping tends to maintain the stretchability. Based on this dosage-graded interface structure, the solid light-emitting diode (LED) and other devices integrated into the stretchable hybrid electronic system could achieve an excellent conductivity insensitive to the exerted tensile strain. In addition, the hybrid electronic system is demonstrated for skin-mounted and tire-mounted temperature-test applications under the tensile strain up to 100%. This Mxene-doped LM method aims to obtain a robust interface between rigid components and flexible interconnects by attenuating the inherent Young's modulus mismatch between rigid and flexible systems and makes it a promising candidate for effective interconnection between solid electronics and soft electronics.

Editorial for a Special Issue of Selected Papers from the 23rd Annual Conference and 12th International Conference of the Chinese Society of Micro-NanoTechnology (CSMNT 2021)

The Annual Conference and International Conference of the Chinese Association of Micro-NanoTechnology is a comprehensive, cross-disciplinary, high-level academic conference that has been held annually since 1994 and has become an important academic event in the field of micro- and nanotechnology [...].

Full Soft Capacitive Omnidirectional Tactile Sensor Based on Micro-Spines Electrode and Hemispheric Dielectric Structure

Flourishing in recent years, intelligent electronics is desirably pursued in many fields including bio-symbiotic, human physiology regulatory, robot operation, and human–computer interaction. To support this appealing vision, human-like tactile perception is urgently necessary for dexterous object manipulation. In particular, the real-time force perception with strength and orientation simultaneously is critical for intelligent electronic skin. However, it is still very challenging to achieve directional tactile sensing that has eminent properties, and at the same time, has the feasibility for scale expansion. Here, a fully soft capacitive omnidirectional tactile (ODT) sensor was developed based on the structure of MWCNTs coated stripe electrode and Ecoflex hemisphere array dielectric. The theoretical analysis of this structure was conducted for omnidirectional force detection by finite element simulation. Combined with the micro-spine and the hemispheric hills dielectric structure, this sensing structure could achieve omnidirectional detection with high sensitivity (0.306 ± 0.001 kPa⁻¹ under 10 kPa) and a wide response range (2.55 Pa to 160 kPa). Moreover, to overcome the inherent disunity in flexible sensor units due to nano-materials and polymer, machine learning approaches were introduced as a prospective technical routing to recognize various loading angles and finally performed more than 99% recognition accuracy. The practical validity of the design was demonstrated by the detection of human motion, physiological activities, and gripping of a cup, which was evident to have great potential for tactile e-skin for digital medical and soft robotics.