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Chen B, Sun X, Li X, Cai L, Zhao D, Du K, Pan M, Qiu M. 4H-SiC Metalens: Mitigating Thermal Drift Effect in High-Power Laser Irradiation. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2025; 37:e2412414. [PMID: 39558784 DOI: 10.1002/adma.202412414] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/21/2024] [Revised: 10/28/2024] [Indexed: 11/20/2024]
Abstract
Enhancing energy density and efficiency in laser processing hinges on precise beam focusing, yet this often causes severe heat absorption and focus shifts in optical lenses. Traditional cooling methods increase cost and complexity, severely limiting versatility. Here, monolithic silicon carbide (SiC) metalens is introduced, which shows unparalleled thermal stability, integrated with a high-power laser. This metalens achieves diffraction-limited focusing with a numerical aperture (NA) of 0.5 and a focal length of 1 cm. Under a 1030 nm pulsed laser at 15 W for 1 h, it shows a minimal temperature rise of 3.2 °C and a tiny focal shift of 14 µm (0.1% relative), only 6% of the shift in conventional lenses. When used to cut a 4H-SiC substrate with the same laser, the metalens exhibit only an 11.4% change in cutting depth after 1 h of operation, correlating with the focal shift results. The results unveil a groundbreaking class of compact SiC photonics devices nearly impervious to heat absorption, representing a monumental leap for high-power laser systems and opening new horizons for their applications and efficiency.
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Affiliation(s)
- Boqu Chen
- College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310007, China
- Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, 18 Shilongshan Road, Hangzhou, 310030, China
| | - Xiaoyu Sun
- College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310007, China
- Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, 18 Shilongshan Road, Hangzhou, 310030, China
| | - Xiaoxuan Li
- Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, 18 Shilongshan Road, Hangzhou, 310030, China
| | - Lu Cai
- Moldnano (Hangzhou) Technology Co. LTD., Hangzhou, 311100, China
| | - Ding Zhao
- Westlake Institute for Optoelectronics, Fuyang, Hangzhou, 311421, China
| | - Kaikai Du
- Moldnano (Hangzhou) Technology Co. LTD., Hangzhou, 311100, China
| | - Meiyan Pan
- Ji Hua Laboratory, Foshan, 528200, China
| | - Min Qiu
- Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, 18 Shilongshan Road, Hangzhou, 310030, China
- Westlake Institute for Optoelectronics, Fuyang, Hangzhou, 311421, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, 310024, China
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Zhang Z, Sun Q, Qu A, Yang M, Li Z. Metasurface-enabled 3D imaging via local bright spot gray scale matching using the structured light dot array. OPTICS LETTERS 2024; 49:6325-6328. [PMID: 39485478 DOI: 10.1364/ol.538443] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/01/2024] [Accepted: 10/11/2024] [Indexed: 11/03/2024]
Abstract
Three-dimensional (3D) imaging is widely utilized in various applications, such as light detection, autonomous vehicles, and machine vision. However, conventional 3D imaging systems often rely on bulky optical components. Metasurfaces, as next-generation optical devices, possess flexible wavefront modulation capabilities and excellent combination with computer vision algorithms. Here, we propose a large field-of-view (FOV) structured light dot array projection device based on a metasurface, covering a 2π-FOV, for projecting coded point clouds in Fourier space. We explore a local bright spot gray scale matching algorithm for depth extraction, enabling 3D imaging. This algorithm simplifies the data processing flow and optimizes depth extraction and feature matching processes through a customized region gray scale comparison. As a result, it effectively reduces computational complexity and enhances tolerance to image quality fluctuations. The proposed approach provides new possibilities for developing compact and high-performance planar 3D optical imaging devices, which will drive the advancement of fields such as computer vision and artificial intelligence.
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Sun Q, Tian Z, Xu C, Yu A, Li F, Yun F. Double-Layer Metasurface Integrated with Micro-LED for Naked-Eye 3D Display. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:1624. [PMID: 39452961 PMCID: PMC11510304 DOI: 10.3390/nano14201624] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/19/2024] [Revised: 10/07/2024] [Accepted: 10/08/2024] [Indexed: 10/26/2024]
Abstract
Naked-eye 3D micro-LED display combines the characteristics of 3D display with the advantages of micro-LED. However, the 3D micro-LED display is still at the conceptual stage, limited by its intrinsic emission properties of large divergence angle and non-coherence, as well as difficulties in achieving large viewing angles with high luminous efficiency. In this work, we propose a double-layer metasurface film integrating functions of collimation with multiple deflections, constituting a micro-LED naked-eye 3D display system. The system is characterized through numerical simulations using the 3D finite-difference time-domain method. The simulation results show that the double-layer metasurface film restricts 90% of the emitted light of the micro-LED to the vicinity of the 0° angle, improving its spatial coherence. Subsequently, a large-angle, low-crosstalk outgoing from -45° to 45° is achieved, while providing a deflection efficiency of over 80% and a pixel density of up to 605. We believe this design provides a feasible approach for realizing naked-eye 3D micro-LED displays with a large field of view, low crosstalk, and high resolution.
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Affiliation(s)
- Qinyue Sun
- Shaanxi Provincial Key Laboratory of Photonics & Information Technology, Xi’an Jiaotong University, Xi’an 710049, China; (Q.S.); (C.X.); (A.Y.); (F.L.)
- Solid-State Lighting Engineering Research Center, Xi’an Jiaotong University, Xi’an 710049, China
| | - Zhenhuan Tian
- Shaanxi Provincial Key Laboratory of Photonics & Information Technology, Xi’an Jiaotong University, Xi’an 710049, China; (Q.S.); (C.X.); (A.Y.); (F.L.)
- Solid-State Lighting Engineering Research Center, Xi’an Jiaotong University, Xi’an 710049, China
| | - Chuangcheng Xu
- Shaanxi Provincial Key Laboratory of Photonics & Information Technology, Xi’an Jiaotong University, Xi’an 710049, China; (Q.S.); (C.X.); (A.Y.); (F.L.)
- Solid-State Lighting Engineering Research Center, Xi’an Jiaotong University, Xi’an 710049, China
| | - Angsu Yu
- Shaanxi Provincial Key Laboratory of Photonics & Information Technology, Xi’an Jiaotong University, Xi’an 710049, China; (Q.S.); (C.X.); (A.Y.); (F.L.)
- Solid-State Lighting Engineering Research Center, Xi’an Jiaotong University, Xi’an 710049, China
| | - Feng Li
- Shaanxi Provincial Key Laboratory of Photonics & Information Technology, Xi’an Jiaotong University, Xi’an 710049, China; (Q.S.); (C.X.); (A.Y.); (F.L.)
- Solid-State Lighting Engineering Research Center, Xi’an Jiaotong University, Xi’an 710049, China
| | - Feng Yun
- Shaanxi Provincial Key Laboratory of Photonics & Information Technology, Xi’an Jiaotong University, Xi’an 710049, China; (Q.S.); (C.X.); (A.Y.); (F.L.)
- Solid-State Lighting Engineering Research Center, Xi’an Jiaotong University, Xi’an 710049, China
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Wan H, Ou K, Yang H, Wei Z. Multifunctional Meta-Devices for Full-Polarization Rotation and Focusing in the Near-Infrared. MICROMACHINES 2024; 15:710. [PMID: 38930680 PMCID: PMC11205365 DOI: 10.3390/mi15060710] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/13/2024] [Revised: 05/15/2024] [Accepted: 05/16/2024] [Indexed: 06/28/2024]
Abstract
The creation of multi-channel focused beams with arbitrary polarization states and their corresponding optical torques finds effective applications in the field of optical manipulation at the micro-nanoscale. The existing metasurface-based technologies for polarization rotation have made some progress, but they have been limited to single functions and have not yet achieved the generation of full polarization. In this work, we propose a multi-channel and spatial-multiplexing interference strategy for the generation of multi-channel focusing beams with arbitrary polarization rotation based on all-dielectric birefringent metasurfaces via simultaneously regulating the propagation phase and the geometric phase and independently controlling the wavefronts at different circular polarizations. For the proof of concept, we demonstrate highly efficient multi-channel polarization rotation meta-devices. The meta-devices demonstrate ultra-high polarization extinction ratios and high focusing efficiencies at each polarization channel. Our work provides a compact and versatile wavefront-shaping methodology for full-polarization control, paving a new path for planar multifunctional meta-optical devices in optical manipulation at micro-nano dimensions.
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Affiliation(s)
- Hengyi Wan
- Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;
- MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai 200092, China
- Shanghai Frontiers Science Center of Digital Optics, Shanghai 200092, China
| | - Kai Ou
- Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;
- MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai 200092, China
- Shanghai Frontiers Science Center of Digital Optics, Shanghai 200092, China
| | - Hui Yang
- School of Physics and Electronics, Hunan Normal University, Changsha 410081, China;
| | - Zeyong Wei
- Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;
- MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai 200092, China
- Shanghai Frontiers Science Center of Digital Optics, Shanghai 200092, China
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Vanmol K, Abdul Nazar AA, Thienpont H, Ferranti F, Van Erps J. Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation. OPTICS EXPRESS 2024; 32:10190-10203. [PMID: 38571236 DOI: 10.1364/oe.514237] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/01/2023] [Accepted: 02/16/2024] [Indexed: 04/05/2024]
Abstract
We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high-numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.
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