Micro cantilever movement detection with an amorphous silicon array of position sensitive detectors

Thin-Film-Based Multifunctional System for Optical Detection and Thermal Treatment of Biological Samples

In this work, we present a multifunctional Lab-on-Chip (LoC) platform based on hydrogenated amorphous silicon sensors suitable for a wide range of application in the fields of biochemical and food quality control analysis. The proposed system includes a LoC fabricated on a 5 cm × 5 cm glass substrate and a set of electronic boards for controlling the LoC functionalities. The presented Lab-on-Chip comprises light and temperature sensors, a thin film resistor acting as a heating source, and an optional thin film interferential filter suitable for fluorescence analysis. The developed electronics allows to control the thin film heater, a light source for fluorescence and absorption measurements, and the photosensors to acquire luminescent signals. All these modules are enclosed in a black metal box ensuring the portability of the whole platform. System performances have been evaluated in terms of sensor optical performances and thermal control achievements. For optical sensors, we have found a minimum number of detectable photons of 8 × 10⁴ s^-1·cm^-2 at room temperature, 1.6 × 10⁶ s^-1·cm^-2 in presence of fluorescence excitation source, and 2.4 × 10⁶ s^-1·cm^-2 at 90 °C. From a thermal management point of view, we have obtained heating and cooling rates both equal to 2.2 °C/s, and a temperature sensor sensitivity of about 3 mV/°C even in presence of light. The achieved performances demonstrate the possibility to simultaneously use all integrated sensors and actuators, making promising the presented platform for a wide range of application fields.

An integrated low-power lock-in amplifier and its application to gas detection

This paper presents a new micropower analog lock-in amplifier (LIA) suitable for battery-operated applications thanks to its reduced size and power consumption as well as its operation with single-supply voltage. The proposed LIA was designed in a 0.18 μm CMOS process with a single supply voltage of 1.8 V. Experimental results show a variable DC gain ranging from 24.7 to 42 dB, power consumption of 417 μW and integration area of 0.013 mm². The LIA performance was demonstrated by measuring carbon monoxide concentrations as low as 1 ppm in dry N₂. The experimental results show that the response to CO of the sensing system can be considerably improved by means of the proposed LIA.

Dynamic Characteristics of Micro-Beams Considering the Effect of Flexible Supports

Normally, the boundaries are assumed to allow small deflections and moments for MEMS beams with flexible supports. The non-ideal boundary conditions have a significant effect on the qualitative dynamical behavior. In this paper, by employing the principle of energy equivalence, rigorous theoretical solutions of the tangential and rotational equivalent stiffness are derived based on the Boussinesq's and Cerruti's displacement equations. The non-dimensional differential partial equation of the motion, as well as coupled boundary conditions, are solved analytically using the method of multiple time scales. The closed-form solution provides a direct insight into the relationship between the boundary conditions and vibration characteristics of the dynamic system, in which resonance frequencies increase with the nonlinear mechanical spring effect but decrease with the effect of flexible supports. The obtained results of frequencies and mode shapes are compared with the cases of ideal boundary conditions, and the differences between them are contrasted on frequency response curves. The influences of the support material property on the equivalent stiffness and resonance frequency shift are also discussed. It is demonstrated that the proposed model with the flexible supports boundary conditions has significant effect on the rigorous quantitative dynamical analysis of the MEMS beams. Moreover, the proposed analytical solutions are in good agreement with those obtained from finite element analyses.

3D scanning characteristics of an amorphous silicon position sensitive detector array system

The 3D scanning electro-optical characteristics of a data acquisition prototype system integrating a 32 linear array of 1D amorphous silicon position sensitive detectors (PSD) were analyzed. The system was mounted on a platform for imaging 3D objects using the triangulation principle with a sheet-of-light laser. New obtained results reveal a minimum possible gap or simulated defect detection of approximately 350 μm. Furthermore, a first study of the angle for 3D scanning was also performed, allowing for a broad range of angles to be used in the process. The relationship between the scanning angle of the incident light onto the object and the image displacement distance on the sensor was determined for the first time in this system setup. Rendering of 3D object profiles was performed at a significantly higher number of frames than in the past and was possible for an incident light angle range of 15 ° to 85 °.