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Liu H, Zhou Z, Lou L. Wireless Temperature Measurement for Curved Surfaces Based on AlN Surface Acoustic Wave Resonators. MICROMACHINES 2024; 15:562. [PMID: 38793135 PMCID: PMC11123193 DOI: 10.3390/mi15050562] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/22/2024] [Revised: 04/21/2024] [Accepted: 04/23/2024] [Indexed: 05/26/2024]
Abstract
In this paper, we propose a novel method for temperature measurement using surface acoustic wave (SAW) temperature sensors on curved or irregular surfaces. We integrate SAW resonators onto flexible printed circuit boards (FPCBs) to ensure better conformity of the temperature sensor with the surface of the object under test. Compared to traditional rigid PCBs, FPCBs offer greater dynamic flexibility, lighter weight, and thinner thickness, which make them an ideal choice for making SAW devices working for temperature measurements under curved surfaces. We design a temperature sensor array consisting of three devices with different operating frequencies to measure the temperature at multiple points on the surface of the object. To distinguish between different target points in the sensor array, each sensor operates at a different frequency, and the operating frequency bands do not overlap. This differentiation is achieved using Frequency Division Multiple Access (FDMA) technology. Experimental results indicate that the frequency temperature coefficients of these sensors are -30.248 ppm/°C, -30.195 ppm/°C, and -30.115 ppm/°C, respectively. In addition, the sensor array enables wireless communication via antenna and transceiver circuits. This innovation heralds enhanced adaptability and applicability for SAW temperature sensor applications.
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Affiliation(s)
- Huali Liu
- School of Microelectronics, Shanghai University, Shanghai 201800, China; (H.L.); (Z.Z.)
- The Shanghai Industrial µTechnology Research Institute, Shanghai 201899, China
| | - Zhixin Zhou
- School of Microelectronics, Shanghai University, Shanghai 201800, China; (H.L.); (Z.Z.)
- The Shanghai Industrial µTechnology Research Institute, Shanghai 201899, China
| | - Liang Lou
- School of Microelectronics, Shanghai University, Shanghai 201800, China; (H.L.); (Z.Z.)
- The Shanghai Industrial µTechnology Research Institute, Shanghai 201899, China
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2
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Yang Y, Dejous C, Hallil H. Trends and Applications of Surface and Bulk Acoustic Wave Devices: A Review. MICROMACHINES 2022; 14:mi14010043. [PMID: 36677104 PMCID: PMC9864654 DOI: 10.3390/mi14010043] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/18/2022] [Revised: 12/20/2022] [Accepted: 12/21/2022] [Indexed: 06/01/2023]
Abstract
The past few decades have witnessed the ultra-fast development of wireless telecommunication systems, such as mobile communication, global positioning, and data transmission systems. In these applications, radio frequency (RF) acoustic devices, such as bulk acoustic waves (BAW) and surface acoustic waves (SAW) devices, play an important role. As the integration technology of BAW and SAW devices is becoming more mature day by day, their application in the physical and biochemical sensing and actuating fields has also gradually expanded. This has led to a profusion of associated literature, and this article particularly aims to help young professionals and students obtain a comprehensive overview of such acoustic technologies. In this perspective, we report and discuss the key basic principles of SAW and BAW devices and their typical geometries and electrical characterization methodology. Regarding BAW devices, we give particular attention to film bulk acoustic resonators (FBARs), due to their advantages in terms of high frequency operation and integrability. Examples illustrating their application as RF filters, physical sensors and actuators, and biochemical sensors are presented. We then discuss recent promising studies that pave the way for the exploitation of these elastic wave devices for new applications that fit into current challenges, especially in quantum acoustics (single-electron probe/control and coherent coupling between magnons and phonons) or in other fields.
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Prasad P, Raut P, Goel S, Barnwal RP, Bodhe GL. Electronic nose and wireless sensor network for environmental monitoring application in pulp and paper industry: a review. ENVIRONMENTAL MONITORING AND ASSESSMENT 2022; 194:855. [PMID: 36207610 DOI: 10.1007/s10661-022-10479-w] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/04/2022] [Accepted: 09/10/2022] [Indexed: 06/16/2023]
Abstract
Pulp and paper industries emit various odorous gases during the pulp production and paper-making phase, which are unpleasant and have harmful effects on the human body. The working staffs are continuously exposed to these gases and develop various health issues. Hence, regular monitoring and analysis of such gases are necessary to avoid any sudden high concentration exposure and to prevent adverse health effects on the staff. An electronic nose (EN) has an array of gas sensors with an alert system for early detection of gases. Various ENs have been developed for varying applications till date. The detailed knowledge of the sensors used, their sensitivity and technology is helpful in development of any EN. The objective of this study is to comprehensively review various developed ENs with respect to their gas sensing and pattern recognition (PR) technologies. The information on gases released from pulp and paper industries is also compiled. The evolution of EN technology, its various applications, challenges in developing EN and its utility in safeguarding the industrial workers' life have been described. Further, gap analysis among previously developed EN, contemporary EN and wireless sensor network (WSN) is elaborated. It will facilitate future researchers for better selection of sensors and PR technologies while developing EN. The commonly used sensing technologies are described with their advantages, disadvantages and working principles. Metal oxide semiconductor (MOS) gas sensor and ANN algorithm show better result and hence recommended in the development of EN, whereas ZigBee protocol has been widely used for WSN.
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Affiliation(s)
- Poonam Prasad
- Cleaner Technology and Modelling Division, CSIR-National Environmental Engineering Research Institute, Nagpur, MS, India.
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad, 201002, India.
| | - Piyush Raut
- Cleaner Technology and Modelling Division, CSIR-National Environmental Engineering Research Institute, Nagpur, MS, India
| | - Sangita Goel
- Environmental Audit and Policy Implementation Division, CSIR-National Environmental Engineering Research Institute, Nagpur, MS, India
| | - Rajesh P Barnwal
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad, 201002, India
- Information Technology Division, CSIR-Central Mechanical Engineering Research Institute, Durgapur, WB, India
| | - G L Bodhe
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad, 201002, India
- Quality Management System Division, CSIR-National Environmental Engineering Research Institute, Nagpur, MS, India
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Bulk and Surface Acoustic Wave Sensor Arrays for Multi-Analyte Detection: A Review. SENSORS 2019; 19:s19245382. [PMID: 31817599 PMCID: PMC6960530 DOI: 10.3390/s19245382] [Citation(s) in RCA: 31] [Impact Index Per Article: 6.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/18/2019] [Revised: 11/28/2019] [Accepted: 11/29/2019] [Indexed: 01/05/2023]
Abstract
Bulk acoustic wave (BAW) and surface acoustic wave (SAW) sensor devices have successfully been used in a wide variety of gas sensing, liquid sensing, and biosensing applications. Devices include BAW sensors using thickness shear modes and SAW sensors using Rayleigh waves or horizontally polarized shear waves (HPSWs). Analyte specificity and selectivity of the sensors are determined by the sensor coatings. If a group of analytes is to be detected or if only selective coatings (i.e., coatings responding to more than one analyte) are available, the use of multi-sensor arrays is advantageous, as the evaluation of the resulting signal patterns allows qualitative and quantitative characterization of the sample. Virtual sensor arrays utilize only one sensor but combine it with enhanced signal evaluation methods or preceding sample separation, which results in similar results as obtained with multi-sensor arrays. Both array types have shown to be promising with regard to system integration and low costs. This review discusses principles and design considerations for acoustic multi-sensor and virtual sensor arrays and outlines the use of these arrays in multi-analyte detection applications, focusing mainly on developments of the past decade.
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Pan Y, Mu N, Liu B, Cao B, Wang W, Yang L. A Novel Surface Acoustic Wave Sensor Array Based on Wireless Communication Network. SENSORS (BASEL, SWITZERLAND) 2018; 18:E2977. [PMID: 30200649 PMCID: PMC6164968 DOI: 10.3390/s18092977] [Citation(s) in RCA: 12] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/18/2018] [Revised: 09/04/2018] [Accepted: 09/04/2018] [Indexed: 11/16/2022]
Abstract
A novel surface acoustic wave (SAW) sensor array based on wireless communication network is prepared. The array is composed of four SAW sensors, a wireless communication network module, and a global positioning system (GPS) module. The four SAW sensors of the array are coated with triethanolamine, polyepichlorohydrin, fluoroalcoholpolysiloxane, and L-glutamic acid hydrochloride to detect hydrogen sulfide (H₂S), 2-chloroethyl ethyl sulfide (CEES), dimethylmethylphosphonate (DMMP), and ammonia (NH₃) at film thicknesses of 50⁻100 nm. The wireless communication network module consists of an acquisition unit, a wireless control unit, and a microcontroller unit. By means of Zigbee and Lora technologies, the module receives and transmits the collected data to a PC work station in real-time; moreover, the module can control the sensor array's working mode and monitor the working status. Simultaneously, the testing location is determined by the GPS module integrated into the SAW sensor array. H₂S, CEES, DMMP, and NH₃ are detected in 300 m at different concentrations. Given the practical future application in environment in the future, the low, safe concentrations of 1.08, 0.59, 0.10, and 5.02 ppm for H₂S, CEES, DMMP, and NH₃, respectively, are detected at the lowest concentration, and the sensitivities of different sensors of the sensor array are 32.4, 14.9, 78.1 and 22.6 Hz/ppm, respectively. With the obtained fingerprints and pattern recognition technology, the detected gases can be recognized.
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Affiliation(s)
- Yong Pan
- State Key Laboratory of NBC Protection for Civilian, Beijing 102205, China.
| | - Ning Mu
- State Key Laboratory of NBC Protection for Civilian, Beijing 102205, China.
| | - Bo Liu
- State Key Laboratory of NBC Protection for Civilian, Beijing 102205, China.
| | - Bingqing Cao
- State Key Laboratory of NBC Protection for Civilian, Beijing 102205, China.
| | - Wen Wang
- State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.
| | - Liu Yang
- State Key Laboratory of NBC Protection for Civilian, Beijing 102205, China.
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An Investigation into Spike-Based Neuromorphic Approaches for Artificial Olfactory Systems. SENSORS 2017; 17:s17112591. [PMID: 29125586 PMCID: PMC5713038 DOI: 10.3390/s17112591] [Citation(s) in RCA: 23] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/29/2017] [Revised: 11/06/2017] [Accepted: 11/07/2017] [Indexed: 02/07/2023]
Abstract
The implementation of neuromorphic methods has delivered promising results for vision and auditory sensors. These methods focus on mimicking the neuro-biological architecture to generate and process spike-based information with minimal power consumption. With increasing interest in developing low-power and robust chemical sensors, the application of neuromorphic engineering concepts for electronic noses has provided an impetus for research focusing on improving these instruments. While conventional e-noses apply computationally expensive and power-consuming data-processing strategies, neuromorphic olfactory sensors implement the biological olfaction principles found in humans and insects to simplify the handling of multivariate sensory data by generating and processing spike-based information. Over the last decade, research on neuromorphic olfaction has established the capability of these sensors to tackle problems that plague the current e-nose implementations such as drift, response time, portability, power consumption and size. This article brings together the key contributions in neuromorphic olfaction and identifies future research directions to develop near-real-time olfactory sensors that can be implemented for a range of applications such as biosecurity and environmental monitoring. Furthermore, we aim to expose the computational parallels between neuromorphic olfaction and gustation for future research focusing on the correlation of these senses.
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Devkota J, Ohodnicki PR, Greve DW. SAW Sensors for Chemical Vapors and Gases. SENSORS 2017; 17:s17040801. [PMID: 28397760 PMCID: PMC5422162 DOI: 10.3390/s17040801] [Citation(s) in RCA: 77] [Impact Index Per Article: 11.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/23/2017] [Revised: 03/30/2017] [Accepted: 04/04/2017] [Indexed: 01/19/2023]
Abstract
Surface acoustic wave (SAW) technology provides a sensitive platform for sensing chemicals in gaseous and fluidic states with the inherent advantages of passive and wireless operation. In this review, we provide a general overview on the fundamental aspects and some major advances of Rayleigh wave-based SAW sensors in sensing chemicals in a gaseous phase. In particular, we review the progress in general understanding of the SAW chemical sensing mechanism, optimization of the sensor characteristics, and the development of the sensors operational at different conditions. Based on previous publications, we suggest some appropriate sensing approaches for particular applications and identify new opportunities and needs for additional research in this area moving into the future.
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Affiliation(s)
- Jagannath Devkota
- National Energy Technology Laboratory, Pittsburgh, PA 15236, USA.
- Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, USA.
| | - Paul R Ohodnicki
- National Energy Technology Laboratory, Pittsburgh, PA 15236, USA.
- Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, USA.
| | - David W Greve
- National Energy Technology Laboratory, Pittsburgh, PA 15236, USA.
- Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, USA.
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Wu CC, Liu SC, Chiu SW, Tang KT. A Low Noise CMOS Readout Based on a Polymer-Coated SAW Array for Miniature Electronic Nose. SENSORS 2016; 16:s16111777. [PMID: 27792131 PMCID: PMC5134436 DOI: 10.3390/s16111777] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/30/2016] [Revised: 10/18/2016] [Accepted: 10/19/2016] [Indexed: 11/16/2022]
Abstract
An electronic nose (E-Nose) is one of the applications for surface acoustic wave (SAW) sensors. In this paper, we present a low-noise complementary metal-oxide-semiconductor (CMOS) readout application-specific integrated circuit (ASIC) based on an SAW sensor array for achieving a miniature E-Nose. The center frequency of the SAW sensors was measured to be approximately 114 MHz. Because of interference between the sensors, we designed a low-noise CMOS frequency readout circuit to enable the SAW sensor to obtain frequency variation. The proposed circuit was fabricated in Taiwan Semiconductor Manufacturing Company (TSMC) 0.18 μm 1P6M CMOS process technology. The total chip size was nearly 1203 × 1203 μm². The chip was operated at a supply voltage of 1 V for a digital circuit and 1.8 V for an analog circuit. The least measurable difference between frequencies was 4 Hz. The detection limit of the system, when estimated using methanol and ethanol, was 0.1 ppm. Their linearity was in the range of 0.1 to 26,000 ppm. The power consumption levels of the analog and digital circuits were 1.742 mW and 761 μW, respectively.
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Affiliation(s)
- Cheng-Chun Wu
- Department of Electrical Engineering, National Tsing Hua University/No. 101, Sec. 2, Kuang-Fu Road, Hsinchu 30013, Taiwan.
| | - Szu-Chieh Liu
- Department of Electrical Engineering, National Tsing Hua University/No. 101, Sec. 2, Kuang-Fu Road, Hsinchu 30013, Taiwan.
| | - Shih-Wen Chiu
- Department of Electrical Engineering, National Tsing Hua University/No. 101, Sec. 2, Kuang-Fu Road, Hsinchu 30013, Taiwan.
| | - Kea-Tiong Tang
- Department of Electrical Engineering, National Tsing Hua University/No. 101, Sec. 2, Kuang-Fu Road, Hsinchu 30013, Taiwan.
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Toniolo R, Pizzariello A, Dossi N, Lorenzon S, Abollino O, Bontempelli G. Room temperature ionic liquids as useful overlayers for estimating food quality from their odor analysis by quartz crystal microbalance measurements. Anal Chem 2013; 85:7241-7. [PMID: 23808811 DOI: 10.1021/ac401151m] [Citation(s) in RCA: 37] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Abstract
An array of quartz crystals coated with different room-temperature ionic liquids (RTILs) is proposed for the analysis of flavors by quartz crystal microbalance (QCM) measurements. Seven RTILs were adopted as sensing layers, all containing imidazolium or phosphonium cations, differing from one another in the length and branching of alkyl groups and neutralized by different anions. The array was at first applied to the analysis of 31 volatile organic compounds (VOCs), such as alcohols, phenols, aldehydes, esters, ketones, acids, amines, hydrocarbons and terpenes, chosen as representative components of a wide variety of food flavors. Multivariate data analysis by the principal component analysis (PCA) approach of the set of the corresponding responses led to separated clusters for these different chemical categories. To further prove the good performance of the RTIL-coated quartz crystal array as an "electronic nose", it was applied to the analysis of headspaces from cinnamon samples belonging to different botanical varieties ( Cinnamon zeylanicum and Cinnamon cassia ). PCA applied to responses recorded on different stocks of samples of both varieties showed that they could be fully discriminated.
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Affiliation(s)
- Rosanna Toniolo
- Department of Food Science, University of Udine, Udine, Italy.
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Chehri A, Jeon G, Choi B. Link-quality measurement and reporting in wireless sensor networks. SENSORS 2013; 13:3066-76. [PMID: 23459389 PMCID: PMC3658732 DOI: 10.3390/s130303066] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/21/2013] [Revised: 02/20/2013] [Accepted: 02/21/2013] [Indexed: 12/02/2022]
Abstract
Wireless Sensor networks (WSNs) are created by small hardware devices that possess the necessary functionalities to measure and exchange a variety of environmental data in their deployment setting. In this paper, we discuss the experiments in deploying a testbed as a first step towards creating a fully functional heterogeneous wireless network-based underground monitoring system. The system is mainly composed of mobile and static ZigBee nodes, which are deployed on the underground mine galleries for measuring ambient temperature. In addition, we describe the measured results of link characteristics such as received signal strength, latency and throughput for different scenarios.
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Affiliation(s)
- Abdellah Chehri
- School of Information Technology and Engineering, University of Ottawa, 800 King Edward Avenue Ottawa, Ontario, K1N 6N5, Canada; E-Mail:
| | - Gwanggil Jeon
- Department of Embedded Systems Engineering, University of Incheon, 12-1 Songdo-dong, Yeonsu-gu, Incheon 406-772, Korea; E-Mail:
- Author to whom correspondence should be addressed; E-Mail: ; Tel.: +82-32-835-8946; Fax: +82-32-835-0782
| | - Byoungjo Choi
- Department of Embedded Systems Engineering, University of Incheon, 12-1 Songdo-dong, Yeonsu-gu, Incheon 406-772, Korea; E-Mail:
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Reddy K, Guo Y, Liu J, Lee W, Oo MKK, Fan X. Rapid, sensitive, and multiplexed on-chip optical sensors for micro-gas chromatography. LAB ON A CHIP 2012; 12:901-905. [PMID: 22245960 DOI: 10.1039/c2lc20922e] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
We developed and characterized a rapid, sensitive and integrated optical vapor sensor array for micro-gas chromatography (μGC) applications. The sensor is based on the Fabry-Pérot (FP) interferometer formed by a micrometre-thin vapor-sensitive polymer layer coated on a silicon wafer. The thickness and the refractive index of the polymer vary in response to the vapor analyte, resulting in a change in the reflected intensity of the laser impinged on the sensor. In our study, four different polymers were coated on four wells pre-etched on a silicon wafer to form a spatially separated sensor array. A CMOS imager was employed to simultaneously monitor the polymers' response, thus enabling multiplexed detection of a vapor analyte passing through the GC column. A sub-second detection time was demonstrated. In addition, a sub-picogram detection limit was achieved, representing orders of magnitude improvement over the on-chip vapor sensors previously reported.
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Affiliation(s)
- Karthik Reddy
- Department of Biomedical Engineering, University of Michigan, Ann Arbor, MI 48109, USA
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