A Novel Method for the Micro-Clearance Measurement of a Precision Spherical Joint Based on a Spherical Differential Capacitive Sensor

Wide Temperature Range and Low Temperature Drift Eddy Current Displacement Sensor Using Digital Correlation Demodulation

Conventional eddy-current sensors have the advantages of being contactless and having high bandwidth and high sensitivity. They are widely used in micro-displacement measurement, micro-angle measurement, and rotational speed measurement. However, they are based on the principle of impedance measurement, so the influence of temperature drift on sensor accuracy is difficult to overcome. A differential digital demodulation eddy current sensor system was designed to reduce the influence of temperature drift on the output accuracy of the eddy current sensor. The differential sensor probe was used to eliminate common-mode interference caused by temperature, and the differential analog carrier signal was digitized by a high-speed ADC. In the FPGA, the amplitude information is resolved using the double correlation demodulation method. The main sources of system errors were determined, and a test device was designed using a laser autocollimator. Tests were conducted to measure various aspects of sensor performance. Testing showed the following metrics for the differential digital demodulation eddy current sensor: nonlinearity 0.68% in the range of ±2.5 mm, resolution 760 nm, maximum bandwidth 25 kHz, and significant suppression in the temperature drift compared to analog demodulation methods. The tests show that the sensor has high precision, low temperature drift and great flexibility, and it can instead of conventional sensors in applications with large temperature variability.

Analysis and Correction of Measurement Error of Spherical Capacitive Sensor Caused by Assembly Error of the Inner Frame in the Aeronautical Optoelectronic Pod

The ball joint is a multi-degree-of-freedom transmission pair, if it can replace the inner frame in the aviation photoelectric pod to carry the optical load, which will greatly simplify the system structure of the photoelectric pod and reduce the space occupied by the inner frame. However, installation errors in ball joint siting introduce nonlinear errors that are difficult to correct and two degree of freedom angular displacement of the ball joint is difficult to detect, which limits application in the precision control of two degrees of freedom systems. Studies of spherical capacitive sensors to date have not tested sensors for use in an inner frame stabilisation mechanism nor have they analysed the influence of installation error on sensor output. A two-axis angular experimental device was designed to measure the performance of a ball joint capacitive sensor in a frame stabilisation mechanism in an aeronautical optoelectronic pod, and a mathematical model to compensate for ball joint capacitive sensor installation error was created and tested. The experimental results show that the resolution of the capacitive sensor was 0.02° in the operating range ±4°, the repeatability factor was 0.86%, and the pulse response time was 39 μs. The designed capacitive sensor has a simple structure, high measurement accuracy, and strong robustness, and it can be integrated into ball joint applications in the frames of aeronautical photoelectric pods.

Error Analysis of a Spherical Capacitive Sensor for the Micro-Clearance Detection in Spherical Joints

Spherical joints have attracted increasing interest in the engineering applications of machine tools, industrial robots, medical equipment, and so on. As one of the promising methods of detecting the micro-clearance in spherical joints, the measurement accuracy of a spherical capacitive sensor could be affected by imperfectness during the manufacturing and installation of the sensor. This work presents error analysis of a spherical capacitive sensor with a differential structure and explores the dependence of the differential capacitance on manufacturing and the installation imperfectness. Five error sources are examined: the shape of the ball and the capacitive plate, the axial and radial offset of the plate, and the inclined installation of the plate. The mathematical models for calculating the capacitance errors of the spherical capacitive sensor are deduced and validated through a simulation using Ansoft Maxwell. The results show that the measurement accuracy of the spherical capacitive sensor is significantly affected by the shape of plates and ball, the axial offset, and the inclined angle of the plate. In contrast, the effect of the radial offset of the plate is quite small.

A New Method for Measuring the Rotational Angles of a Precision Spherical Joint Using Eddy Current Sensors

Precision spherical joint is a spherical motion pair that can realize rotation with three degrees of freedom. This joint is widely used in robots, parallel mechanisms, and high-end medical equipment, as well as in aerospace and other fields. However, the rotation orientation and angle cannot be determined when the joint is in passive motion. The real-time determination of the rotation orientation and angle is crucial to the improvement of the motion control accuracy of the equipment where the joint is installed in. In this study, a new measurement method that utilizes eddy current sensors is proposed to identify the special features of the joint ball and realize angle measurements indirectly. The basic idea is to manufacture the specific shape features on the ball without affecting its movement accuracy and mechanical performance. An eddy current sensor array is distributed in the ball socket. When the ball head rotates, the features on the ball opposite to the sensor, as well as the output signal of every eddy current sensor, change. The measurement model that establishes the relationship between the output signal of the eddy current sensor array and the rotation direction and angle of the ball head is constructed by learning and training an artificial neural network. A prototype is developed using the proposed scheme, and the model simulation and feasibility experiment are subsequently performed. Results show that the root mean square angular error of a single axis within a range of ±14° is approximately 20 min, which suggests the feasibility of the proposed method.

An Improved Capacitive Sensor for Detecting the Micro-Clearance of Spherical Joints

Due to the flexible and compact structures, spherical joints are widely used in parallel manipulators and industrial robots. Real-time detection of the clearance between the ball and the socket in spherical joints is beneficial to compensate motion errors of mechanical systems and improve their transmission accuracy. This work proposes an improved capacitive sensor for detecting the micro-clearance of spherical joints. First, the structure of the capacitive sensor is proposed. Then, the mathematical model for the differential capacitance of the sensor and the eccentric micro-displacement of the ball is deduced. Finally, the capacitance values of the capacitive sensor are simulated with Ansoft Maxwell. The simulated values of the differential capacitances at different eccentric displacements agree well with the theoretical ones, indicating the feasibility of the proposed detection method. In addition, the simulated results show that the proposed capacitive sensor could effectively reduce the capacitive fringe effect, improving the measurement accuracy.

A Novel Approach for Detecting Rotational Angles of a Precision Spherical Joint Based on a Capacitive Sensor

Precision spherical joints are commonly employed as multiple degree-of-freedom (DOF) mechanical hinges in many engineering applications, e.g., robots and parallel manipulators. Real-time and precise measurement of the rotational angles of spherical joints is not only beneficial to the real-time and closed-loop control of mechanical transmission systems, but also is of great significance in the prediction and compensation of their motion errors. This work presents a novel approach for rotational angle measurement of spherical joints with a capacitive sensor. First, the 3-DOF angular motions of a spherical joint were analyzed. Then, the structure of the proposed capacitive sensor was presented, and the mathematical model for the rotational angles of a spherical joint and the capacitance of the capacitors was deduced. Finally, the capacitance values of the capacitors at different rotations were simulated using Ansoft Maxwell software. The simulation results show that the variation in the simulated capacitance values of the capacitors is similar to that of the theoretical values, suggesting the feasibility and effectiveness of the proposed capacitive detection method for rotational angles of spherical joints.