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For: Zhang M, Wu G, Ren D, Gao R, Qi ZM, Liang X. An Optical MEMS Acoustic Sensor Based on Grating Interferometer. Sensors (Basel) 2019;19:s19071503. [PMID: 30925691 PMCID: PMC6479327 DOI: 10.3390/s19071503] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/15/2019] [Revised: 03/24/2019] [Accepted: 03/25/2019] [Indexed: 11/16/2022]
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