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Zhang H, Fan G, Li S, Cai X, Wei J, Jing G, Li Y, Zhang Z. Integrated Opto-mechanical Cantilever Sensor with a Rib Waveguide. J Microsc 2022; 286:240-244. [PMID: 35289403 DOI: 10.1111/jmi.13097] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/09/2022] [Revised: 03/02/2022] [Accepted: 03/03/2022] [Indexed: 11/27/2022]
Abstract
An integrated opto-mechanical cantilever sensor with a rib waveguide is reported in this paper. The device consists of a rib waveguide cantilever with buried waveguides on silicon. The rib cantilever is introduced to match better with the buried waveguide, further for increasing the interface coupling efficiency. With this configuration, single-mode operating can be achieved in transverse direction without decreasing the width of optical waveguide cantilever. The system sensitivity is 1.1 μm-1 which is increased by about 21%, compared with the conventional structure. This article is protected by copyright. All rights reserved.
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Affiliation(s)
- Hongru Zhang
- Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, 100044, China
| | - Guofang Fan
- Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, 100044, China
| | - Shi Li
- National Institute of Metrology, Beijing, 100029, China
| | - Xiaoyu Cai
- Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai, 201203, China
| | - Jiasi Wei
- Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai, 201203, China
| | - Gaoshan Jing
- Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, 100444, China
| | - Yuan Li
- Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai, 201203, China
| | - Zhiping Zhang
- The Academy for Engineering&Technology, Fudan University, Shanghai, 200433, China
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