Liu C, Tao W, Chen C, Liao Y. Fabricating Air Pressure Sensors in Hollow-Core Fiber Using Femtosecond Laser Pulse.
MICROMACHINES 2022;
14:mi14010101. [PMID:
36677162 PMCID:
PMC9862476 DOI:
10.3390/mi14010101]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/26/2022] [Revised: 12/13/2022] [Accepted: 12/25/2022] [Indexed: 05/14/2023]
Abstract
In this paper, a hollow core fiber was spliced with standard single-mode fibers to form a fiber optic gas pressure sensor, and its sensing characteristics with single hole or multi-holes punched on the hollow core fiber with femtosecond laser pulses were investigated. The experiments demonstrate that the air pressure sensitivity of the single hole sensor was -3.548 nm/MPa, with a linearity of 99.45%, while its response times for air pressure's rise and fall were 4.25 s and 2.52 s, respectively. The air pressure sensitivity of the ten-hole sensor was up to -3.786 nm/MPa, with a linearity of 99.47%, while its response times for air pressure's rise and fall were 2.17 s and 1.30 s, respectively. Theoretical analysis and experimental results indicate that the pressure sensitivity of the sensor with an anti-resonant reflecting guidance mechanism mainly comes from the refractive index change of the air inside the hollow core fiber. The proposed device with multi-holes drilled by a femtosecond laser has the advantages of fabrication simplicity, low cost, fast response time, good structural robustness, high repeatability, high sensitivity to air pressure, and insensitivity to temperature (only 10.3 pm/°C), which makes it attractive for high pressure sensing applications in harsh environments.
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