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For: Chu SY, Shen MX, Yeh TH, Chen CH, Lee CT, Lee HY. Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System. Sensors (Basel) 2020;20:s20216159. [PMID: 33138043 PMCID: PMC7662978 DOI: 10.3390/s20216159] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/30/2020] [Revised: 10/27/2020] [Accepted: 10/28/2020] [Indexed: 06/11/2023]
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