3D-Printed Liquid Cell Resonator with Piezoelectric Actuation for In-Line Density-Viscosity Measurements

Fabrication of Beta-Barium Borate Sensing Head for Non-Invasive Measurement of Fluidic Concentration Variations

In this study, a beta-barium borate sensing head (BBO-SH) was fabricated and evaluated for the measurements of fluidic concentration variations by using a non-invasive technique. The BBO-SH could be coupled to a fluidic container through thin interlayer water in a heterodyne interferometer based on the phase interrogation. To ensure the sensing head's stability, the package of BBO-SH uses the prism and the coverslip bounded with UV glue, which can resist environmental damage due to moisture. After each use, the sensing head could be easily cleaned. The sensitivity of the BBO-SH remained stable after repeated measurements over a period of 139 days. Finally, the achievable measurement resolutions of the concentration and refractive index are 52 ppm and 1 × 10^-6 RIU, respectively, for the sodium chloride solution. The achievable measurement resolutions of the concentration and refractive index were 55 ppm and 8.8 × 10^-7 RIU, respectively, for the hydrochloric acid solution.

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monolithically fabricated with a 130 nm complementary metal-oxide semiconductor (CMOS) process. The electrode configuration allows the entire system to be implemented in a single device, where one electrode is used as an input and the other as an output. Experimental verification was carried out by exploiting the features of piezoelectric devices such as resonators and acoustic transducers, where a frequency shift and amplitude variation are expected because of a change in density and viscosity. A sensitivity of 482 ± 14 Hz/kg/m³ demonstrates the potential of the system compared to other dual-electrode PMUTs. In addition, according to the acoustic measurement, the sound velocity, fluid compressibility, and viscosity coefficient can be extracted, which, to the best of our knowledge, is novel in these PMUT systems.