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Pitters J, Croshaw J, Achal R, Livadaru L, Ng S, Lupoiu R, Chutora T, Huff T, Walus K, Wolkow RA. Atomically Precise Manufacturing of Silicon Electronics. ACS NANO 2024; 18:6766-6816. [PMID: 38376086 PMCID: PMC10919096 DOI: 10.1021/acsnano.3c10412] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/23/2023] [Revised: 02/01/2024] [Accepted: 02/06/2024] [Indexed: 02/21/2024]
Abstract
Atomically precise manufacturing (APM) is a key technique that involves the direct control of atoms in order to manufacture products or components of products. It has been developed most successfully using scanning probe methods and has received particular attention for developing atom scale electronics with a focus on silicon-based systems. This review captures the development of silicon atom-based electronics and is divided into several sections that will cover characterization and atom manipulation of silicon surfaces with scanning tunneling microscopy and atomic force microscopy, development of silicon dangling bonds as atomic quantum dots, creation of atom scale devices, and the wiring and packaging of those circuits. The review will also cover the advance of silicon dangling bond logic design and the progress of silicon quantum atomic designer (SiQAD) simulators. Finally, an outlook of APM and silicon atom electronics will be provided.
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Affiliation(s)
- Jason Pitters
- Nanotechnology
Research Centre, National Research Council
of Canada, Edmonton, Alberta T6G 2M9, Canada
| | - Jeremiah Croshaw
- Department
of Physics, University of Alberta, Edmonton, Alberta T6G 2E1, Canada
| | - Roshan Achal
- Department
of Physics, University of Alberta, Edmonton, Alberta T6G 2E1, Canada
- Quantum
Silicon Inc., Edmonton, Alberta T6G 2M9, Canada
| | - Lucian Livadaru
- Department
of Physics, University of Alberta, Edmonton, Alberta T6G 2E1, Canada
- Quantum
Silicon Inc., Edmonton, Alberta T6G 2M9, Canada
| | - Samuel Ng
- Department
of Electrical and Computer Engineering, University of British Columbia, Vancouver, British Columbia V6T 1Z4, Canada
| | - Robert Lupoiu
- School
of Engineering, Stanford University, Stanford, California 94305, United States
| | - Taras Chutora
- Department
of Physics, University of Alberta, Edmonton, Alberta T6G 2E1, Canada
| | - Taleana Huff
- Canadian
Bank Note Company, Ottawa, Ontario K1Z 1A1, Canada
| | - Konrad Walus
- Department
of Electrical and Computer Engineering, University of British Columbia, Vancouver, British Columbia V6T 1Z4, Canada
| | - Robert A. Wolkow
- Department
of Physics, University of Alberta, Edmonton, Alberta T6G 2E1, Canada
- Quantum
Silicon Inc., Edmonton, Alberta T6G 2M9, Canada
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Ziatdinov M, Ghosh A, Wong CY, Kalinin SV. AtomAI framework for deep learning analysis of image and spectroscopy data in electron and scanning probe microscopy. NAT MACH INTELL 2022. [DOI: 10.1038/s42256-022-00555-8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/13/2022]
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Ranawat YS, Jaques YM, Foster AS. Generalised deep-learning workflow for the prediction of hydration layers over surfaces. J Mol Liq 2022. [DOI: 10.1016/j.molliq.2022.120571] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
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Wyrick J, Wang X, Namboodiri P, Kashid RV, Fei F, Fox J, Silver R. Enhanced Atomic Precision Fabrication by Adsorption of Phosphine into Engineered Dangling Bonds on H-Si Using STM and DFT. ACS NANO 2022; 16:19114-19123. [PMID: 36317737 DOI: 10.1021/acsnano.2c08162] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/16/2023]
Abstract
The doping of Si using the scanning probe hydrogen depassivation lithography technique has been shown to enable placing and positioning small numbers of P atoms with nanometer accuracy. Several groups have now used this capability to build devices that exhibit desired quantum behavior determined by their atomistic details. What remains elusive, however, is the ability to control the precise number of atoms placed at a chosen site with 100% yield, thereby limiting the complexity and degree of perfection achievable. As an important step toward precise control of dopant number, we explore the adsorption of the P precursor molecule, phosphine, into atomically perfect dangling bond patches of intentionally varied size consisting of three adjacent Si dimers along a dimer row, two adjacent dimers, and one single dimer. Using low temperature scanning tunneling microscopy, we identify the adsorption products by generating and comparing to a catalog of simulated images, explore atomic manipulation after adsorption in select cases, and follow up with incorporation of P into the substrate. For one-dimer patches, we demonstrate that manipulation of the adsorbed species leads to single P incorporation in 12 out of 12 attempts. Based on the observations made in this study, we propose this one-dimer patch method as a robust approach that can be used to fabricate devices where it is ensured that each site of interest has exactly one P atom.
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Affiliation(s)
- Jonathan Wyrick
- Atom Scale Device Group, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
| | - Xiqiao Wang
- Atom Scale Device Group, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
- Joint Quantum Institute, University of Maryland, College Park, Maryland 20740, United States
| | - Pradeep Namboodiri
- Atom Scale Device Group, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
| | - Ranjit Vilas Kashid
- Atom Scale Device Group, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
| | - Fan Fei
- Atom Scale Device Group, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
- Department of Physics, University of Maryland, College Park, Maryland 20740, United States
| | - Joseph Fox
- Atom Scale Device Group, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
- Department of Physics, University of Maryland, College Park, Maryland 20740, United States
| | - Richard Silver
- Atom Scale Device Group, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
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Ranawat YS, Jaques YM, Foster AS. Predicting hydration layers on surfaces using deep learning. NANOSCALE ADVANCES 2021; 3:3447-3453. [PMID: 36133729 PMCID: PMC9419798 DOI: 10.1039/d1na00253h] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 04/03/2021] [Accepted: 05/03/2021] [Indexed: 06/16/2023]
Abstract
Characterisation of the nanoscale interface formed between minerals and water is essential to the understanding of natural processes, such as biomineralization, and to develop new technologies where function is dominated by the mineral-water interface. Atomic force microscopy offers the potential to characterize solid-liquid interfaces in high-resolution, with several experimental and theoretical studies offering molecular scale resolution by linking measurements directly to water density on the surface. However, the theoretical techniques used to interpret such results are computationally intensive and development of the approach has been limited by interpretation challenges. In this work, we develop a deep learning architecture to learn the solid-liquid interface of polymorphs of calcium carbonate, allowing for the rapid predictions of density profiles with reasonable accuracy.
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Affiliation(s)
| | - Ygor M Jaques
- Department of Applied Physics, Aalto University Finland
| | - Adam S Foster
- Department of Applied Physics, Aalto University Finland
- WPI Nano Life Science Institute (WPI-NanoLSI), Kanazawa University Kakuma-machi Kanazawa 920-1192 Japan
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Zuzak R, Szymonski M, Godlewski S. Extended iron phthalocyanine islands self-assembled on a Ge(001):H surface. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2021; 12:232-241. [PMID: 33747697 PMCID: PMC7940817 DOI: 10.3762/bjnano.12.19] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/31/2020] [Accepted: 02/19/2021] [Indexed: 06/12/2023]
Abstract
Self-assembly of iron(II) phthalocyanine (FePc) molecules on a Ge(001):H surface results in monolayer islands extending over hundreds of nanometers and comprising upright-oriented entities. Scanning tunneling spectroscopy reveals a transport gap of 2.70 eV in agreement with other reports regarding isolated FePc molecules. Detailed analysis of single FePc molecules trapped at surface defects indicates that the molecules stay intact upon adsorption and can be manipulated away from surface defects onto a perfectly hydrogenated surface. This allows for their isolation from the germanium surface.
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Affiliation(s)
- Rafal Zuzak
- Centre for Nanometer-Scale Science and Advanced Materials, NANOSAM, Faculty of Physics, Astronomy, and Applied Computer Science, Jagiellonian University, Łojasiewicza 11, PL 30-348 Kraków, Poland
| | - Marek Szymonski
- Centre for Nanometer-Scale Science and Advanced Materials, NANOSAM, Faculty of Physics, Astronomy, and Applied Computer Science, Jagiellonian University, Łojasiewicza 11, PL 30-348 Kraków, Poland
| | - Szymon Godlewski
- Centre for Nanometer-Scale Science and Advanced Materials, NANOSAM, Faculty of Physics, Astronomy, and Applied Computer Science, Jagiellonian University, Łojasiewicza 11, PL 30-348 Kraków, Poland
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Croshaw J, Huff T, Rashidi M, Wood J, Lloyd E, Pitters J, Wolkow RA. Ionic charge distributions in silicon atomic surface wires. NANOSCALE 2021; 13:3237-3245. [PMID: 33533379 DOI: 10.1039/d0nr08295c] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Using a non-contact atomic force microscope (nc-AFM), we examine continuous dangling bond (DB) wire structures patterned on the hydrogen terminated silicon (100)-2 × 1 surface. By probing the DB structures at varying energies, we identify the formation of previously unobserved ionic charge distributions which are correlated to the net charge of DB wires and their predicted degrees of freedom in lattice distortions. Performing spectroscopic analysis, we identify higher energy configurations corresponding to alternative lattice distortions as well as tip-induced charging effects. By varying the length and orientation of these DB structures, we further highlight key features in the formation of these ionic surface phases.
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Affiliation(s)
- Jeremiah Croshaw
- Department of Physics, University of Alberta, Edmonton, Alberta T6G 2J1, Canada. and Quantum Silicon Inc., Edmonton, Alberta T6G 2M9, Canada
| | - Taleana Huff
- Nanotechnology Research Centre, National Research Council Canada, Edmonton, Alberta T6G 2M9, Canada
| | - Mohammad Rashidi
- Department of Physics, University of Alberta, Edmonton, Alberta T6G 2J1, Canada.
| | - John Wood
- Department of Physics, University of Alberta, Edmonton, Alberta T6G 2J1, Canada.
| | - Erika Lloyd
- Department of Physics, University of Alberta, Edmonton, Alberta T6G 2J1, Canada.
| | - Jason Pitters
- Nanotechnology Research Centre, National Research Council Canada, Edmonton, Alberta T6G 2M9, Canada
| | - Robert A Wolkow
- Department of Physics, University of Alberta, Edmonton, Alberta T6G 2J1, Canada. and Quantum Silicon Inc., Edmonton, Alberta T6G 2M9, Canada and Nanotechnology Research Centre, National Research Council Canada, Edmonton, Alberta T6G 2M9, Canada
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Pavlova TV. Hydrogen inserted into the Si(100)-2 × 1-H surface: a first-principles study. Phys Chem Chem Phys 2020; 22:21851-21857. [PMID: 32966437 DOI: 10.1039/d0cp03691a] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/16/2022]
Abstract
Hydrogen can be inserted into Si(100)-2 × 1-H during surface preparation or during the hydrogen desorption lithography used to create atomic-scale devices. Here, a hydrogen atom inserted into a hydrogen monolayer on the Si(100)-2 × 1 surface has been studied using density functional theory. Hydrogen-induced defects were considered in their neutral, negative, and positive charge states. It was found that hydrogen forms a dihydride unit on the surface in the most stable neutral and negative charge states. Hydrogen located in the groove between dimer rows is also one of the most stable negative charge states. In the positive charge state, hydrogen forms a three-center bond inside a Si dimer, Si-H-Si, similar to the bulk case. A comparison of simulated scanning tunneling microscopy (STM) images with the experimental data available in the literature showed that neutral and negatively charged hydrogen-induced defects were already observed in experiments. The results reveal that the H atom inserted into a hydrogen monolayer on the Si(100)-2 × 1 surface can lead to the formation of a positively or negatively charged defect. It is shown that H atoms in the considered configurations can play a role in various surface reactions.
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Affiliation(s)
- Tatiana V Pavlova
- Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow, Russia. and National Research University Higher School of Economics, Moscow, Russia
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