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Lugo-Hernández E, Mirea T, Carmona JM, Clement M, Olivares J, Carlos Collado J, Mateu J. Analysis of spurious peaks at series resonance in solidly mounted resonators by combined BVD-Mason modelling. Ultrasonics 2023; 131:106958. [PMID: 36841091 DOI: 10.1016/j.ultras.2023.106958] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/19/2022] [Revised: 02/06/2023] [Accepted: 02/11/2023] [Indexed: 06/18/2023]
Abstract
Solidly Mounted Resonators (SMRs) for high frequency RF filters and sensing applications often display spurious resonances that distort their frequency response. In this work, we try to identify the origin of spurious resonances accompanying the main series resonances in AlN-based SMRs with the help of modified Butterworth Van Dyke (BVD) and Mason's models. By manufacturing SMRs of different sizes and shapes and studying the influence of the position of the electrical probing spot, we have demonstrated both theoretically and experimentally that devices with larger areas are more likely to display these additional peaks. Our updated models accurately simulate the frequency response of the SMRs, revealing that spurious peaks are mostly related to the resistance of the electrodes. Our study clarifies the origin of the spurious resonances and offers solutions for both, the optimal design and measurement method of SMRs.
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Affiliation(s)
- E Lugo-Hernández
- Signal Theory and Communication Department, Universitat Politècnica de Catalunya, Carrer d'Esteve Terradas, 7, 08860 Castelldefels, Barcelona, Spain.
| | - T Mirea
- CEMDATIC-ETSI de Telecomunicación, Universidad Politécnica de Madrid, Avda. Complutense 30, Madrid, Spain
| | - J M Carmona
- CEMDATIC-ETSI de Telecomunicación, Universidad Politécnica de Madrid, Avda. Complutense 30, Madrid, Spain
| | - M Clement
- CEMDATIC-ETSI de Telecomunicación, Universidad Politécnica de Madrid, Avda. Complutense 30, Madrid, Spain
| | - J Olivares
- CEMDATIC-ETSI de Telecomunicación, Universidad Politécnica de Madrid, Avda. Complutense 30, Madrid, Spain
| | - J Carlos Collado
- Signal Theory and Communication Department, Universitat Politècnica de Catalunya, Carrer d'Esteve Terradas, 7, 08860 Castelldefels, Barcelona, Spain
| | - J Mateu
- Signal Theory and Communication Department, Universitat Politècnica de Catalunya, Carrer d'Esteve Terradas, 7, 08860 Castelldefels, Barcelona, Spain
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