Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference RF Reference Cell.
JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY 1995;
100:383-400. [PMID:
29151749 PMCID:
PMC4887239 DOI:
10.6028/jres.100.029]
[Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Accepted: 03/27/1995] [Indexed: 05/22/2023]
Abstract
A review is presented of kinetic-energy distribution measurements for ions striking grounded surfaces in a Gaseous Electronics Conference (GEC) rf Reference Cell. Two experimental arrangements that have been used to measure ion energies in the GEC Cell are described, and a comparison of their performance under different operating conditions is presented. Significant results from ion-energy analysis in the Reference Cell are highlighted, including evidence of effects due to surface conditions on ion sampling, verification of electrical behavior of the cell, inferences about ion-molecule reactions indicated by the shapes of measured ion kinetic-energy distributions (IEDs), and the use of measured IEDs for the validation of theoretical models. The paper concludes with a detailed study of IEDs measured for rf plasmas generated in mixtures of argon and oxygen, using both experimental arrangements.
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