Abargues R, Marqués-Hueso J, Canet-Ferrer J, Pedrueza E, Valdés JL, Jiménez E, Martínez-Pastor JP. High-resolution electron-beam patternable nanocomposite containing metal nanoparticles for plasmonics.
Nanotechnology 2008;
19:355308. [PMID:
21828848 DOI:
10.1088/0957-4484/19/35/355308]
[Citation(s) in RCA: 24] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
Polymer nanocomposites containing noble metal nanoparticles are promising materials for plasmonic applications. In this paper, we report on a high-resolution negative-tone nanocomposite resist based on poly(vinyl alcohol) where silver nanoparticles and nanopatterns are simultaneously generated by electron-beam lithography. Our results indicate nanostructures with a relatively high concentration of nanoparticles and, consequently, an electromagnetic coupling among the nanoparticles. Therefore, the patternable nanocomposite described in this work may be a suitable material for future plasmonic circuitry.
Collapse