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Dory JB, Castro-Chavarria C, Verdy A, Jager JB, Bernard M, Sabbione C, Tessaire M, Fédéli JM, Coillet A, Cluzel B, Noé P. Ge-Sb-S-Se-Te amorphous chalcogenide thin films towards on-chip nonlinear photonic devices. Sci Rep 2020; 10:11894. [PMID: 32681142 PMCID: PMC7367863 DOI: 10.1038/s41598-020-67377-9] [Citation(s) in RCA: 12] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/06/2019] [Accepted: 05/13/2020] [Indexed: 11/18/2022] Open
Abstract
Thanks to their unique optical properties Ge–Sb–S–Se–Te amorphous chalcogenide materials and compounds offer tremendous opportunities of applications, in particular in near and mid-infrared range. This spectral range is for instance of high interest for photonics or optical sensors. Using co-sputtering technique of chalcogenide compound targets in a 200 mm industrial deposition tool, we show how by modifying the amorphous structure of GeSbwSxSeyTez chalcogenide thin films one can significantly tailor their linear and nonlinear optical properties. Modelling of spectroscopic ellipsometry data collected on the as-deposited chalcogenide thin films is used to evaluate their linear and nonlinear properties. Moreover, Raman and Fourier-transform infrared spectroscopies permitted to get a description of their amorphous structure. For the purpose of applications, their thermal stability upon annealing is also evaluated. We demonstrate that depending on the GeSbwSxSeyTez film composition a trade-off between a high transparency in near- or mid-infrared ranges, strong nonlinearity and good thermal stability can be found in order to use such materials for applications compatible with the standard CMOS integration processes of microelectronics and photonics.
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Affiliation(s)
- J-B Dory
- Université Grenoble Alpes, CEA, LETI, MINATEC Campus, 17 Avenue des Martyrs, 38000, Grenoble, France
| | - C Castro-Chavarria
- Université Grenoble Alpes, CEA, LETI, MINATEC Campus, 17 Avenue des Martyrs, 38000, Grenoble, France
| | - A Verdy
- Université Grenoble Alpes, CEA, LETI, MINATEC Campus, 17 Avenue des Martyrs, 38000, Grenoble, France
| | - J-B Jager
- Université Grenoble Alpes, CEA, IRIG, MINATEC Campus, 17 Avenue des Martyrs, 38000, Grenoble, France
| | - M Bernard
- Université Grenoble Alpes, CEA, LETI, MINATEC Campus, 17 Avenue des Martyrs, 38000, Grenoble, France
| | - C Sabbione
- Université Grenoble Alpes, CEA, LETI, MINATEC Campus, 17 Avenue des Martyrs, 38000, Grenoble, France
| | - M Tessaire
- Université Grenoble Alpes, CEA, LETI, MINATEC Campus, 17 Avenue des Martyrs, 38000, Grenoble, France
| | - J-M Fédéli
- Université Grenoble Alpes, CEA, LETI, MINATEC Campus, 17 Avenue des Martyrs, 38000, Grenoble, France
| | - A Coillet
- ICB, UMR CNRS 6303, Université de Bourgogne Franche Comté, 9, Avenue Alain-Savary, BP 47870, 21078, Dijon cedex, France
| | - B Cluzel
- ICB, UMR CNRS 6303, Université de Bourgogne Franche Comté, 9, Avenue Alain-Savary, BP 47870, 21078, Dijon cedex, France
| | - P Noé
- Université Grenoble Alpes, CEA, LETI, MINATEC Campus, 17 Avenue des Martyrs, 38000, Grenoble, France.
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Pin C, Jager JB, Tardif M, Picard E, Hadji E, de Fornel F, Cluzel B. Optical tweezing using tunable optical lattices along a few-mode silicon waveguide. Lab Chip 2018; 18:1750-1757. [PMID: 29774333 DOI: 10.1039/c8lc00298c] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Fourteen years ago, optical lattices and holographic tweezers were considered as a revolution, allowing for trapping and manipulating multiple particles at the same time using laser light. Since then, near-field optical forces have aroused tremendous interest as they enable efficient trapping of a wide range of objects, from living cells to atoms, in integrated devices. Yet, handling at will multiple objects using a guided light beam remains a challenging task for current on-chip optical trapping techniques. We demonstrate here on-chip optical trapping of dielectric microbeads and bacteria using one-dimensional optical lattices created by near-field mode beating along a few-mode silicon nanophotonic waveguide. This approach allows not only for trapping large numbers of particles in periodic trap arrays with various geometries, but also for manipulating them via diverse transport and repositioning techniques. Near-field mode-beating optical lattices may be readily implemented in lab-on-a-chip devices, addressing numerous scientific fields ranging from bio-analysis to nanoparticle processing.
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Affiliation(s)
- C Pin
- Groupe Optique de Champ Proche, Laboratoire Interdisciplinaire Carnot de Bourgogne UMR CNRS 6303, Université de Bourgogne Franche-Comté, 21078 Dijon, France.
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Lin G, Qian B, Orucević F, Candela Y, Jager JB, Cai Z, Lefèvre-Seguin V, Hare J. Excitation mapping of whispering gallery modes in silica microcavities. Opt Lett 2010; 35:583-585. [PMID: 20160825 DOI: 10.1364/ol.35.000583] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
We report the direct observation of the electromagnetic-field distribution of whispering gallery modes in silica microcavities (spheres and toroids). It is revealed by their excitation efficiency with a tapered fiber coupler swept along the meridian. The originality of this method lies in the use of the coupler itself for the near-field mapping, eliminating the need of additional tools used in previous work. This method is successfully applied to microspheres and microtoroids.
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Affiliation(s)
- G Lin
- Laboratoire Kastler Brossel, ENS, UPMC-Paris 6, CNRS, 24 rue Lhomond, 75005 Paris, France
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Noé P, Okuno H, Jager JB, Delamadeleine E, Demichel O, Rouvière JL, Calvo V, Maurizio C, D'Acapito F. The evolution of the fraction of Er ions sensitized by Si nanostructures in silicon-rich silicon oxide thin films. Nanotechnology 2009; 20:355704. [PMID: 19671977 DOI: 10.1088/0957-4484/20/35/355704] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
Photoluminescence (PL) and time-resolved PL experiments as a function of the elaboration process are performed on Er-doped silicon-rich silicon oxide (SRO:Er) thin films grown under NH(3) atmosphere. These PL measurements of the Er(3+) emission at 1.54 microm under non-resonant pumping with the Er f-f transitions are obtained for different Er(3+) concentrations, ranging from 0.05 to 1.4 at.%, and various post-growth annealing temperatures of the layers. High resolution transmission electron microscopy (HRTEM) and energy-filtered TEM (EFTEM) analysis show a high density of Si nanostructures composed of amorphous and crystalline nanoclusters varying from 2.7 x 10(18) to 10(18) cm(-3) as a function of the post-growth annealing temperature. Measurements of PL lifetime and effective Er excitation cross section for all the samples under non-resonant optical excitation with the Er(3+) atomic energy levels show that the number of Er(3+) ions sensitized by the silicon-rich matrix decreases as the annealing temperature is increased from 500 to 1050 degrees C. The origin of this effect is attributed to the reduction of the density of sensitizers for Er ions in the SRO matrix when the annealing temperature increases. Finally, extended x-ray absorption fine-structure spectroscopy (EXAFS) shows a strong correlation between the number of emitters and the mean local order around the erbium ions.
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Affiliation(s)
- P Noé
- INAC/SP2M, Commissariat à l'Energie Atomique-MINATEC, 17 rue des Martyrs, Grenoble Cedex, France
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