1
|
Anwar F, Tao M, Schwartzberg A, Ogletree F, Altoe MV, Raja A, Cabrini S. Transferable nano-patterned ALD Membrane. Nanotechnology 2023. [PMID: 37167958 DOI: 10.1088/1361-6528/acd45b] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/13/2023]
Abstract
We demonstrate fabrication of nano-patterned thin ALD (Atomic layer deposition) membrane (suspended/transferable) by using a bi-layer resist process where the bottom layer resist acts as a sacrificial layer. This method enables an all dry deterministic transfer of nano-patterned ALD membrane on desired substrate, allowing assembly of multitude of hetero-structures \& functionalities that are not yet accessible. Unlike conventional ways of achieving patterned alumina membrane reported in literature our technique requires significantly less fabrication steps and paves the way for novel ALD membrane-based technology.
Collapse
Affiliation(s)
- Farhana Anwar
- Lawrence Berkeley National Laboratory, One Cyclotron Road, Berkeley, California, 94720, UNITED STATES
| | - Matt Tao
- University of California Berkeley Department of Physics, 1 Cal Berkeley Spc 9, Berkeley, CA 94720, Berkeley, California, 94720-7300, UNITED STATES
| | - Adam Schwartzberg
- Molecular Foundry Chemical Sciences Division, Lawrence Berkeley National Laboratory, Inorganic Nanostructures Facility , 1 Cyclotron Road, MS67-R3207, Berkeley, CA 94720, USA, Berkeley, 94720, UNITED STATES
| | - Frank Ogletree
- Molecuar Foundry, Lawrence Berkeley National Laboratory, , 1 Cyclotron Rd, Berkeley, CA 94720, Berkeley, 94720, UNITED STATES
| | - Maria Virginia Altoe
- Molecuar Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd, Berkeley, CA 94720, 1 Cyclotron Rd, Berkeley, CA 94720, Berkeley, 94720, UNITED STATES
| | - Archana Raja
- Molecuar Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd, Berkeley, CA 94720, Berkeley, CA 94720, 94720, UNITED STATES
| | - Stefano Cabrini
- Molecular Foundry , Lawrence Berkeley National Laboratory, One Cyclotron road, MS67-R3207, Berkeley, California, 94720, UNITED STATES
| |
Collapse
|