Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams

Ultrafast lasers have revolutionized material processing, opening a wealth of new applications in many areas of science. A recent technology that allows the cleaving of transparent materials via non-ablative processes is based on focusing and translating a high-intensity laser beam within a material to induce a well-defined internal stress plane. This then enables material separation without debris generation. Here, we use a non-diffracting beam engineered to have a transverse elliptical spatial profile to generate high-aspect-ratio elliptical channels in glass of a dimension 350  nm×710  nm and subsequent cleaved surface uniformity at the sub-micron level.

Spatiotemporal structure of femtosecond Bessel beams from spatial light modulators

We numerically investigate the spatiotemporal structure of Bessel beams generated with spatial light modulators (SLMs). Grating-like phase masks enable the spatial filtering of undesired diffraction orders produced by SLMs. Pulse front tilt and temporal broadening effects are investigated. In addition, we explore the influence of phase wrapping and show that the spatiotemporal structure of SLM-generated femtosecond Bessel beams is similar to Bessel X-pulses at short propagation distance and to subluminal pulsed Bessel beams at long propagation distance.

Sending femtosecond pulses in circles: highly nonparaxial accelerating beams

We use caustic beam shaping on 100 fs pulses to experimentally generate nonparaxial accelerating beams along a 60° circular arc, moving laterally by 14 µm over a 28 µm propagation length. This is the highest degree of transverse acceleration reported to our knowledge. Using diffraction integral theory and numerical beam propagation simulations, we show that circular acceleration trajectories represent a unique class of nonparaxial diffraction-free beam profile which also preserves the femtosecond temporal structure in the vicinity of the caustic.

Arbitrary accelerating micron-scale caustic beams in two and three dimensions

We generate arbitrary convex accelerating beams by direct application of an appropriate spatial phase profile on an incident Gaussian beam. The spatial phase calculation exploits the geometrical properties of optical caustics and the Legendre transform. Using this technique, accelerating sheet caustic beams with parabolic profiles (i.e. Airy beams), as well as quartic and logarithmic profiles are experimentally synthesized from an incident Gaussian beam, and we show compatibility with material processing applications using an imaging system to reduce the main intensity lobe at the caustic to sub-10 micron transverse dimension. By applying additional and rotational spatial phase, we generate caustic-bounded sheet and volume beams, which both show evidence of the recently predicted effect of abrupt autofocussing. In addition, an engineered accelerating profile with femtosecond pulses is applied to generate a curved zone of refractive index modification in glass. These latter results provide proof of principle demonstration of how this technique may yield new degrees of freedom in both nonlinear optics and femtosecond micromachining.

High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams

We present a systematic study of femtosecond laser microchannel machining in glass using nondiffracting Bessel beams. In particular, our results identify a source and focusing parameter working window where high aspect ratio taper-free microchannels can be reproducibly produced without sample translation. With appropriate source parameters, we machine channels of 2 microm diameter and with aspect ratios up to 40. We propose the filamentation stability of the Bessel beam propagation as the critical factor underlying the controlled and reproducible results that have been obtained.

Surface nanoprocessing with nondiffracting femtosecond Bessel beams

We demonstrate the application of nondiffracting Bessel beams for reproducible nanometric-scale feature patterning in glass. A femtosecond pulse zero-order Bessel beam with a central spot radius of 360 nm was used to write 500 nm radius nanocraters over a longitudinal positioning range exceeding 20 microm, with a variation in radius of less than 10%. The use of Bessel beams significantly reduces constraints on critical sample positioning in the nanoscale writing regime, enabling the use of femtosecond pulses for fast inscription of nanometer-scale features over large sample areas.