An underwater vest containing an antioxidant MXene hydrogel for sensitive recognition of fish locomotion

The perception of fish locomotion is important for understanding their adaptive behaviors and ethological characteristics. However, the main strategy used for extracting fish attitudes involves the use of a vision-based monitoring system, which is limited in its range of observation and cannot perform tracking for long times. Here, we report the use of a wearable tagging electronic device, referred to as an underwater vest, to capture the surrounding flow field disturbances triggered by swimming or momentary postural changes. All of these goals were achieved by integrating a pair of pseudocapacitive pressure-sensing units and a flexible circuit board. Notably, additional conditions, such as variable hydraulic pressures and minimal changes in fish posture, require high stability and sensitivity of the sensing units. Thus, hybrid hydrogel electrodes were developed through cross-linking MXene with holey-reduced graphene oxide nanosheets and further modification with 1-ethyl-3-methylimidazolium dicyanamide ionic liquids, which increased the interfacial capacitance and long-term interfacial activity of the MXene. Consequently, the sensing unit exhibited ultrahigh sensitivity (Smax~136,207 kPa-1) in an aquatic environment for 60 days and superior high-pressure resolution (10 Pa) within a wide working range of 1 MPa. Ultimately, an underwater vest integrated with such sensing units clearly distinguished and recorded fish locomotion. We believe that the designed device may open avenues in flow field monitoring and ocean current detection and provide new insights into the development of sensitive underwater tagging.

A passive wireless surface acoustic wave (SAW) sensor system for detecting warfare agents based on fluoroalcohol polysiloxane film

Long-term monitoring of environmental warfare agengts is a challenge for chemical gas sensors. To address this issue, we developed a 433 MHz passive wireless surface acoustic wave (WSAW) gas sensor for dimethyl methylphosphonate (DMMP) detection. This WSAW gas sensor includes a YZ lithium niobate (LiNbO3) substrate with metallic interdigital transducers (IDTs) etched on it, and an antenna was placed near the IDT. A DMMP-sensitive viscoelastic polymer fluoroalcoholpolysiloxane (SXFA) film was prepared on a LiNbO3 substrate, and mode modeling coupling was used to optimize the design parameters. The sensor can function properly in an environments between -30 °C and 100 °C with humidity less than 60% RH. When the wireless transmission distance was within the range of 0-90 cm, the sensor noise increased with distance, and the stability was less than 32°/h. While optimizing the film thickness of SXFA, a relationship was observed between sensor sensitivity and film thickness. When the film thickness of SXFA reached 450 nm, the optimal value was reached. At a distance of 20 cm between the transmitting and receiving antennas, DMMP was detected at different concentrations with the developed WSAW gas sensor. The lower detection limit of DMMP was 0.48 mg/m3, the sensitivity of the sensor was 4.63°/(mg/m3), and repeatable performance of the sensor was confirmed.

Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis

Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology applications. For such a direct CMOS-CNT integration, a key requirement is the development of necessary post-processing steps on CMOS chips for fabricating CMOS-MEMS polysilicon heaters that can locally generate the required CNT synthesis temperatures (~650-900 °C). In our post-CMOS processing, a subtractive fabrication technique is used for micromachining the polysilicon heaters, where the passivation layers in CMOS are used as masks to protect the electronics. For dielectric etching, it is necessary to achieve high selectivity, uniform etching and a good etch rate to fully expose the polysilicon layers without causing damage. We achieved successful post-CMOS processing by developing two-step reactive ion etching (RIE) of the SiO2 dielectric layer and making design improvements to a second-generation CMOS chip. After the dry etching process, CMOS-MEMS microheaters are partially suspended by SiO2 wet etching with minimum damage to the exposed aluminium layers, to obtain high thermal isolation. The fabricated microheaters are then successfully utilized for synthesizing CNTs by a local thermal CVD process. The CMOS post-processing challenges and design aspects to fabricate CMOS-MEMS polysilicon microheaters for such high-temperature applications are detailed in this article. Our developed process for heterogeneous monolithic integration of CMOS-CNT shows promise for wafer-level manufacturing of CNT-based sensors by incorporating additional steps in an already existing foundry CMOS process.

Contacting individual graphene nanoribbons using carbon nanotube electrodes

Graphene nanoribbons synthesized using bottom-up approaches can be structured with atomic precision, allowing their physical properties to be precisely controlled. For applications in quantum technology, the manipulation of single charges, spins or photons is required. However, achieving this at the level of single graphene nanoribbons is experimentally challenging due to the difficulty of contacting individual nanoribbons, particularly on-surface synthesized ones. Here we report the contacting and electrical characterization of on-surface synthesized graphene nanoribbons in a multigate device architecture using single-walled carbon nanotubes as the electrodes. The approach relies on the self-aligned nature of both nanotubes, which have diameters as small as 1 nm, and the nanoribbon growth on their respective growth substrates. The resulting nanoribbon-nanotube devices exhibit quantum transport phenomena-including Coulomb blockade, excited states of vibrational origin and Franck-Condon blockade-that indicate the contacting of individual graphene nanoribbons.

High-performance broadband flexible photodetector based on Gd3Fe5O12-assisted double van der Waals heterojunctions

Flexible photodetectors are fundamental components for developing wearable systems, which can be widely used for medical detection, environmental monitoring and flexible imaging. However, compared with 3D materials, low-dimensional materials have degraded performance, a key challenge for current flexible photodetectors. Here, a high-performance broadband photodetector has been proposed and fabricated. By combining the high mobility of graphene (Gr) with the strong light-matter interactions of single-walled carbon nanotubes (SWCNTs) and molybdenum disulfide (MoS2), the flexible photodetector exhibits a greatly improved photoresponse covering the visible to near-infrared range. Additionally, a thin layer of gadolinium iron garnet (Gd3Fe5O12, GdlG) film is introduced to improve the interface of the double van der Waals heterojunctions to reduce the dark current. The SWCNT/GdIG/Gr/GdIG/MoS2 flexible photodetector exhibits a high photoresponsivity of 47.375 A/W and a high detectivity of 1.952 × 1012 Jones at 450 nm, a high photoresponsivity of 109.311 A/W and a high detectivity of 4.504 × 1012 Jones at 1080 nm, and good mechanical stability at room temperature. This work demonstrates the good capacity of GdIG-assisted double van der Waals heterojunctions on flexible substrates and provides a new solution for constructing high-performance flexible photodetectors.

Mechanically resilient, alumina-reinforced carbon nanotube arrays for in-plane shock absorption in micromechanical devices

Microelectromechanical systems (MEMS) are of considerable interest due to their compact size and low power consumption when used in modern electronics. MEMS devices intrinsically incorporate three-dimensional (3D) microstructures for their intended operations; however, these microstructures are easily broken by mechanical shocks accompanying high-magnitude transient acceleration, inducing device malfunction. Although various structural designs and materials have been proposed to overcome this limit, developing a shock absorber for easy integration into existing MEMS structures that effectively dissipates impact energy remains challenging. Here, a vertically aligned 3D nanocomposite based on ceramic-reinforced carbon nanotube (CNT) arrays is presented for in-plane shock-absorbing and energy dissipation around MEMS devices. This geometrically aligned composite consists of regionally-selective integrated CNT arrays and a subsequent atomically thick alumina layer coating, which serve as structural and reinforcing materials, respectively. The nanocomposite is integrated with the microstructure through a batch-fabrication process and remarkably improves the in-plane shock reliability of a designed movable structure over a wide acceleration range (0-12,000g). In addition, the enhanced shock reliability through the nanocomposite was experimentally verified through comparison with various control devices.

Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes

Nanoscale cantilevers (nanocantilevers) made from carbon nanotubes (CNTs) provide tremendous benefits in sensing and electromagnetic applications. This nanoscale structure is generally fabricated using chemical vapor deposition and/or dielectrophoresis, which contain manual, time-consuming processes such as the placing of additional electrodes and careful observation of single-grown CNTs. Here, we demonstrate a simple and Artificial Intelligence (AI)-assisted method for the efficient fabrication of a massive CNT-based nanocantilever. We used randomly positioned single CNTs on the substrate. The trained deep neural network recognizes the CNTs, measures their positions, and determines the edge of the CNT on which an electrode should be clamped to form a nanocantilever. Our experiments demonstrate that the recognition and measurement processes are automatically completed in 2 s, whereas comparable manual processing requires 12 h. Notwithstanding the small measurement error by the trained network (within 200 nm for 90% of the recognized CNTs), more than 34 nanocantilevers were successfully fabricated in one process. Such high accuracy contributes to the development of a massive field emitter using the CNT-based nanocantilever, in which the output current is obtained with a low applied voltage. We further showed the benefit of fabricating massive CNT-nanocantilever-based field emitters for neuromorphic computing. The activation function, which is a key function in a neural network, was physically realized using an individual CNT-based field emitter. The introduced neural network with the CNT-based field emitters recognized handwritten images successfully. We believe that our method can accelerate the research and development of CNT-based nanocantilevers for realizing promising future applications.

Low-hysteresis, pressure-insensitive, and transparent capacitive strain sensor for human activity monitoring

Wearable strain sensors have been widely used for human activity monitoring. Most reported strain sensors have mainly focused on material engineering, high stretchability and large gauge factors. Few works have focused on strain sensor's robustness and reliability, including low hysteresis, good long-term stability, good electrode material stability, and low coupling effects under multi-input signals, which are the factors that limit practical strain sensor applications. To develop a high-performance strain sensor, we propose a flexible capacitive sensor structure with three-dimensional (3D) interdigital electrodes fabricated by vertically aligned carbon nanotubes. Compared with a traditional resistive strain sensor and a capacitive strain sensor with vertical sandwich electrodes, a strain sensor with horizontal parallel interdigital electrodes can benefit from low cross talk in terms of the normal force and improve substrate transparency. Additionally, embedding 3D electrodes into the substrate improves ultrahigh robustness with a low-pressure coupling effect under normal force. Moreover, compared with other reported works, the electrode variation under strain is small (less than 1.6%), which means that the perturbation of inert properties on device performance is small. Finally, the fabricated strain sensor achieves an ultralow hysteresis (0.35%), excellent pressure-insensitive performance (less than 0.8%), fast response (60 ms), good long-term stability, and good transparency. As an application example, a flexible strain sensor was successfully demonstrated as a wearable device for the precise monitoring of different types of human activities, including bending of the finger, knee, elbow, wrist, and neck with large strain signals and small strain signals generated by a mouth-opening activity. This excellent performance indicates that the flexible strain sensor is a promising candidate for human motion detection, soft robotics, and medical care.

High-speed identification of suspended carbon nanotubes using Raman spectroscopy and deep learning

The identification of nanomaterials with the properties required for energy-efficient electronic systems is usually a tedious human task. A workflow to rapidly localize and characterize nanomaterials at the various stages of their integration into large-scale fabrication processes is essential for quality control and, ultimately, their industrial adoption. In this work, we develop a high-throughput approach to rapidly identify suspended carbon nanotubes (CNTs) by using high-speed Raman imaging and deep learning analysis. Even for Raman spectra with extremely low signal-to-noise ratios (SNRs) of 0.9, we achieve a classification accuracy that exceeds 90%, while it reaches 98% for an SNR of 2.2. By applying a threshold on the output of the softmax layer of an optimized convolutional neural network (CNN), we further increase the accuracy of the classification. Moreover, we propose an optimized Raman scanning strategy to minimize the acquisition time while simultaneously identifying the position, amount, and metallicity of CNTs on each sample. Our approach can readily be extended to other types of nanomaterials and has the potential to be integrated into a production line to monitor the quality and properties of nanomaterials during fabrication.

A customizable, low-power, wireless, embedded sensing platform for resistive nanoscale sensors

Customizable, portable, battery-operated, wireless platforms for interfacing high-sensitivity nanoscale sensors are a means to improve spatiotemporal measurement coverage of physical parameters. Such a platform can enable the expansion of IoT for environmental and lifestyle applications. Here we report a platform capable of acquiring currents ranging from 1.5 nA to 7.2 µA full-scale with 20-bit resolution and variable sampling rates of up to 3.125 kSPS. In addition, it features a bipolar voltage programmable in the range of -10 V to +5 V with a 3.65 mV resolution. A Finite State Machine steers the system by executing a set of embedded functions. The FSM allows for dynamic, customized adjustments of the nanosensor bias, including elevated bias schemes for self-heating, measurement range, bandwidth, sampling rate, and measurement time intervals. Furthermore, it enables data logging on external memory (SD card) and data transmission over a Bluetooth low energy connection. The average power consumption of the platform is 64.5 mW for a measurement protocol of three samples per second, including a BLE advertisement of a 0 dBm transmission power. A state-of-the-art (SoA) application of the platform performance using a CNT nanosensor, exposed to NO₂ gas concentrations from 200 ppb down to 1 ppb, has been demonstrated. Although sensor signals are measured for NO₂ concentrations of 1 ppb, the 3σ limit of detection (LOD) of 23 ppb is determined (1σ: 7 ppb) in slope detection mode, including the sensor signal variations in repeated measurements. The platform's wide current range and high versatility make it suitable for signal acquisition from resistive nanosensors such as silicon nanowires, carbon nanotubes, graphene, and other 2D materials. Along with its overall low power consumption, the proposed platform is highly suitable for various sensing applications within the context of IoT.

Controlled growth of a single carbon nanotube on an AFM probe

Carbon nanotubes (CNTs) can be used as atomic force microscopy (AFM) tips for high-resolution scanning due to their small diameter, high aspect ratio and outstanding wear resistance. However, previous approaches for fabricating CNT probes are complex and poorly controlled. In this paper, we introduce a simple method to selectively fabricate a single CNT on an AFM tip by controlling the trigger threshold to adjust the amount of growth solution attached to the tip. The yield rate is over 93%. The resulting CNT probes are suitable in length, without the need for a subsequent cutting process. We used the CNT probe to scan the complex nanostructure with a high aspect ratio, thereby solving the long-lasting problem of mapping complex nanostructures.

Biomimetic cell-actuated artificial muscle with nanofibrous bundles

Biohybrid artificial muscle produced by integrating living muscle cells and their scaffolds with free movement in vivo is promising for advanced biomedical applications, including cell-based microrobotic systems and therapeutic drug delivery systems. Herein, we provide a biohybrid artificial muscle constructed by integrating living muscle cells and their scaffolds, inspired by bundled myofilaments in skeletal muscle. First, a bundled biohybrid artificial muscle was fabricated by the integration of skeletal muscle cells and hydrophilic polyurethane (HPU)/carbon nanotube (CNT) nanofibers into a fiber shape similar to that of natural skeletal muscle. The HPU/CNT nanofibers provided a stretchable basic backbone of the 3-dimensional fiber structure, which is similar to actin-myosin scaffolds. The incorporated skeletal muscle fibers contribute to the actuation of biohybrid artificial muscle. In fact, electrical field stimulation reversibly leads to the contraction of biohybrid artificial muscle. Therefore, the current development of cell-actuated artificial muscle provides great potential for energy delivery systems as actuators for implantable medibot movement and drug delivery systems. Moreover, the innervation of the biohybrid artificial muscle with motor neurons is of great interest for human-machine interfaces.

Electrochemical measurement of serotonin by Au-CNT electrodes fabricated on microporous cell culture membranes

Gut-brain axis (GBA) communication relies on serotonin (5-HT) signaling between the gut epithelium and the peripheral nervous system, where 5-HT release patterns from the basolateral (i.e., bottom) side of the epithelium activate nerve afferents. There have been few quantitative studies of this gut-neuron signaling due to a lack of real-time measurement tools that can access the basolateral gut epithelium. In vitro platforms allow quantitative studies of cultured gut tissue, but they mainly employ offline and endpoint assays that cannot resolve dynamic molecular-release patterns. Here, we present the modification of a microporous cell culture membrane with carbon nanotube-coated gold (Au-CNT) electrodes capable of continuous, label-free, and direct detection of 5-HT at physiological concentrations. Electrochemical characterization of single-walled carbon nanotube (SWCNT)-coated Au electrodes shows increased electroactive surface area, 5-HT specificity, sensitivity, and saturation time, which are correlated with the CNT film drop-cast volume. Two microliters of CNT films, with a 10-min saturation time, 0.6 μA/μM 5-HT sensitivity, and reliable detection within a linear range of 500 nM-10 μM 5-HT, can be targeted for high-concentration, high-time-resolution 5-HT monitoring. CNT films (12.5 μL) with a 2-h saturation time, 4.5 μA/μM 5-HT sensitivity, and quantitative detection in the linear range of 100 nM-1 μM can target low concentrations with low time resolution. These electrodes achieved continuous detection of dynamic diffusion across the porous membrane, mimicking basolateral 5-HT release from cells, and detection of cell-released 5-HT from separately cultured RIN14B cell supernatant. Electrode-integrated cell culture systems such as this can improve in vitro molecular detection mechanisms and aid in quantitative GBA signaling studies.

Multimodal chemo-/magneto-/phototaxis of 3G CNT-bots to power fuel cells

We report the development of a 3G microswimmer, namely, CNT-bot, capable of undergoing acid-, alkali-, magneto- and phototaxis inside acidic or alkaline baths of peroxide fuel and/or water. The use of carboxyl-functionalised multi-walled carbon nanotubes (MWCNTs) facilitated the propulsion of CNT-bots in an alkaline-water solution by ejecting carbon-dioxide bubbles. Furthermore, doping of magnetite nanoparticles (FeONPs), ferrous ions (Fe²⁺) and titanium dioxide nanoparticles (TiONPs) induces magnetic, chemical and photonic modes of propulsion. While FeONPs stimulated magnetotaxis at a rate of up to ~10 body lengths per second under the influence of a bar magnet, chemotaxis of a similar speed in a peroxide fuel was achieved by bubble-propulsion of oxygen gas originating from the Fenton reaction. In addition, the light-stimulated photo-Fenton reaction led to phototaxis of CNT-bots. A thin coating of magnesium imparted a half-faced Janus appearance to the CNT-bots, which facilitated motion in normal or acidic water media through the ejection of hydrogen gas bubbles. This chemotaxis could be transformed into pH-stimulated directional motion by establishing an acid or alkali concentration gradient across the peroxide and/or water baths. The capacity of CNT-bots to produce oxygen (hydrogen) bubbles in peroxide (acidic water) fuel was exploited to power a PEM fuel cell to generate electricity. The pure oxygen and hydrogen gases generated by CNT-bots in separate chambers were fed directly into the fuel cell in which the incessant motions of the particle facilitated the creation and release of the pure gases to achieve on-demand electricity generation. The motor could also induce dye degradation through advanced oxidation owing to the production of intermediate hydroxyl radicals during the Fenton reaction.

Electrospun CNT embedded ZnO nanofiber based biosensor for electrochemical detection of Atrazine: a step closure to single molecule detection

In this study we have reported the design and development of a facile, sensitive, selective, and label-free electrochemical sensing platform for the detection of atrazine based on MWCNT-embedded ZnO nanofibers. Electrospun nanofibers were characterized using scanning electron microscope (SEM), transmission electron microscope (TEM), X-ray diffraction (XRD), X-ray photoelectron spectroscope (XPS), UV-Visible spectroscope (UV-VIS), and Fourier-transform infrared spectroscope (FTIR). Electrochemical properties of MWCNT-ZnO nanofiber-modified electrodes were assessed using electrochemical impedance spectroscopy (EIS) and cyclic voltammetry (CV). Binding event of atrazine to anti-atrazine antibody, which immobilized on nanofiber-modified electrode via EDC and NHS chemistry, was transduced with EIS. Due to high conductivity, surface area, and low bandgap of MWCNT-ZnO nanofibers, we have achieved the sensitivity and limit of detection (LoD) of sensor as 21.61 (KΩ μg^-1 mL^-1) cm^-2 and 5.368 zM for a wide detection range of 10 zM-1 µM. The proposed immunosensing platform has good stability, selectivity, repeatability, and reproducibility, and are less prone to interference.

Mechanically strengthened graphene-Cu composite with reduced thermal expansion towards interconnect applications

High-density integration technologies with copper (Cu) through-silicon via (TSV) have emerged as viable alternatives for achieving the requisite integration densities for the portable electronics and micro-electro-mechanical systems (MEMSs) package. However, significant thermo-mechanical stresses can be introduced in integrated structures during the manufacturing process due to mismatches of thermal expansion and the mechanical properties between Cu and silicon (Si). The high-density integration demands an interconnection material with a strong mechanical strength and small thermal expansion mismatch. In this study, a novel electroplating method is developed for the synthesis of a graphene-copper (G-Cu) composite with electrochemically exfoliated graphenes. The fabrication and evaluation of the G-Cu composite microstructures, including the microcantilevers and micromirrors supported by the composite, are reported. We evaluated not only the micromechanical properties of the G-Cu composite based on in-situ mechanical resonant frequency measurements using a laser Doppler vibrometer but also the coefficients of thermal expansion (CTE) of the composite based on curvature radius measurements at a temperature range of 20-200 °C. The Young's modulus and shear modulus of the composite are approximately 123 and 51 GPa, which are 1.25 times greater and 1.22 times greater, respectively, than those of pure Cu due to the reinforcement of graphene. The G-Cu composite exhibits a 23% lower CTE than Cu without sacrificing electrical conductivity. These results show that the mechanically strengthened G-Cu composite with reduced thermal expansion is an ideal and reliable interconnection material instead of Cu for complex integration structures.