1
|
Alphazan T, Díaz Álvarez A, Martin F, Grampeix H, Enyedi V, Martinez E, Rochat N, Veillerot M, Dewitte M, Nys JP, Berthe M, Stiévenard D, Thieuleux C, Grandidier B. Shallow Heavily Doped n++ Germanium by Organo-Antimony Monolayer Doping. ACS Appl Mater Interfaces 2017; 9:20179-20187. [PMID: 28534397 DOI: 10.1021/acsami.7b02645] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Functionalization of Ge surfaces with the aim of incorporating specific dopant atoms to form high-quality junctions is of particular importance for the development of solid-state devices. In this study, we report the shallow doping of Ge wafers with a monolayer doping strategy that is based on the controlled grafting of Sb precursors and the subsequent diffusion of Sb into the wafer upon annealing. We also highlight the key role of citric acid in passivating the surface before its reaction with the Sb precursors and the benefit of a protective SiO2 overlayer that enables an efficient incorporation of Sb dopants with a concentration higher than 1020 cm-3. Microscopic four-point probe measurements and photoconductivity experiments show the full electrical activation of the Sb dopants, giving rise to the formation of an n++ Sb-doped layer and an enhanced local field-effect passivation at the surface of the Ge wafer.
Collapse
Affiliation(s)
- Thibault Alphazan
- Univ. Grenoble Alpes, CEA, LETI , MINATEC Campus, F-38000 Grenoble, France
- C2P2, CPE Lyon , 43 Bd du 11 Nov. 1918, 69616 Villeurbanne cedex, France
| | - Adrian Díaz Álvarez
- Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520 - IEMN , F-59000 Lille, France
| | - François Martin
- Univ. Grenoble Alpes, CEA, LETI , MINATEC Campus, F-38000 Grenoble, France
| | - Helen Grampeix
- Univ. Grenoble Alpes, CEA, LETI , MINATEC Campus, F-38000 Grenoble, France
| | - Virginie Enyedi
- Univ. Grenoble Alpes, CEA, LETI , MINATEC Campus, F-38000 Grenoble, France
| | - Eugénie Martinez
- Univ. Grenoble Alpes, CEA, LETI , MINATEC Campus, F-38000 Grenoble, France
| | - Névine Rochat
- Univ. Grenoble Alpes, CEA, LETI , MINATEC Campus, F-38000 Grenoble, France
| | - Marc Veillerot
- Univ. Grenoble Alpes, CEA, LETI , MINATEC Campus, F-38000 Grenoble, France
| | - Marc Dewitte
- Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520 - IEMN , F-59000 Lille, France
| | - Jean-Philippe Nys
- Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520 - IEMN , F-59000 Lille, France
| | - Maxime Berthe
- Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520 - IEMN , F-59000 Lille, France
| | - Didier Stiévenard
- Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520 - IEMN , F-59000 Lille, France
| | - Chloé Thieuleux
- C2P2, CPE Lyon , 43 Bd du 11 Nov. 1918, 69616 Villeurbanne cedex, France
| | - Bruno Grandidier
- Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520 - IEMN , F-59000 Lille, France
| |
Collapse
|