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Dahm RT, Erlandsen R, Trier F, Sambri A, Gennaro ED, Guarino A, Stampfer L, Christensen DV, Granozio FM, Jespersen TS. Size-Controlled Spalling of LaAlO 3/SrTiO 3 Micromembranes. ACS Appl Mater Interfaces 2021; 13:12341-12346. [PMID: 33661598 DOI: 10.1021/acsami.0c21612] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
The ability to form freestanding oxide membranes of nanoscale thickness is of great interest for enabling material functionality and for integrating oxides in flexible electronic and photonic technologies. Recently, a route has been demonstrated for forming conducting heterostructure membranes of LaAlO3 and SrTiO3, the canonical system for oxide electronics. In this route, the epitaxial growth of LaAlO3 on SrTiO3 resulted in a strained state that relaxed by producing freestanding membranes with random sizes and locations. Here, we extend the method to enable self-formed LaAlO3/SrTiO3 micromembranes with control over membrane position, their lateral sizes from 2 to 20 μm, and with controlled transfer to other substrates of choice. This method opens up the possibility to study and use the two-dimensional electron gas in LaAlO3/SrTiO3 membranes for advanced device concepts.
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Affiliation(s)
- Rasmus T Dahm
- Center for Quantum Devices, Niels Bohr Institute, University of Copenhagen, Universitetsparken 5, 2100 Copenhagen, Denmark
- Department of Energy Conversion and Storage, Technical University of Denmark, Fysikvej, Building 310, 2800 Kgs. Lyngby, Denmark
| | - Ricci Erlandsen
- Center for Quantum Devices, Niels Bohr Institute, University of Copenhagen, Universitetsparken 5, 2100 Copenhagen, Denmark
- Department of Energy Conversion and Storage, Technical University of Denmark, Fysikvej, Building 310, 2800 Kgs. Lyngby, Denmark
| | - Felix Trier
- Center for Quantum Devices, Niels Bohr Institute, University of Copenhagen, Universitetsparken 5, 2100 Copenhagen, Denmark
| | - Alessia Sambri
- CNR-SPIN, Complesso Universitario di Monte S. Angelo, Via Cintia, 80126 Naples, Italy
| | - Emiliano Di Gennaro
- Dipartimento di Fisica "E. Pancini", Compl. Univ. di Monte S. Angelo, Università di Napoli "Federico II", Via Cintia, 80126 Napoli, Italy
| | - Anita Guarino
- Department of Physical Sciences and Technologies of Matter, CNR-DSFTM NFFA Trieste Area Science Park, Basovizza Strada Statale 14, 34149 Trieste, Italy
| | - Lukas Stampfer
- Center for Quantum Devices, Niels Bohr Institute, University of Copenhagen, Universitetsparken 5, 2100 Copenhagen, Denmark
| | - Dennis V Christensen
- Department of Energy Conversion and Storage, Technical University of Denmark, Fysikvej, Building 310, 2800 Kgs. Lyngby, Denmark
| | | | - Thomas S Jespersen
- Center for Quantum Devices, Niels Bohr Institute, University of Copenhagen, Universitetsparken 5, 2100 Copenhagen, Denmark
- Department of Energy Conversion and Storage, Technical University of Denmark, Fysikvej, Building 310, 2800 Kgs. Lyngby, Denmark
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