Hybrid Metamaterial Absorber Platform for Sensing of CO2 Gas at Mid-IR

Multiband terahertz metamaterial perfect absorber for microorganisms detection

We report a multi-resonant terahertz (THz) metamaterial perfect absorber (MPA)-based biosensor in the working frequency range of [Formula: see text] for sensing of microorganisms (such as fungi, yeast) and wheat pesticides. Nearly [Formula: see text] absorption is realized at [Formula: see text] and [Formula: see text]. We designed our THz MPA sensor making resonators' gap area compatible with the microorganisms' size. To obtain optimum performance of the MPA, a mapping of amplitudes and shifts in the absorption resonance peaks with different structural parameters of the resonators is carried out. A very high-frequency shift is obtained for microorganisms such as Penicillium chrysogenum (fungi), yeast, and pesticides (Imidacloprid, N, N-Diethyldithiocarbamate sodium salt trihydrate, Daminozide, N, N-Diethyldithiocarbamate sodium salt hydrate, and Dicofol). An equivalent circuit model using Advance Design System (ADS) software is developed. The calculated results through the model show similar trends as obtained in the simulations using CST. Investigations of the effect of incidence angle of THz wave on the absorption spectra of the MPA are also carried out. It is found that incidence angle does not impact the stability of the lower resonance absorption peak (1.79THz). Due to the wide working frequency range, the proposed sensor is extremely suitable for the detection of all range of pesticides because their specific absorption fingerprint lies in the frequency range of 0-3.8THz. We believe that our sensor could be a potential detection tool for detecting pesticide residues in agriculture and food products. The THz MPA-based biosensor is capable of detecting a very small change in the effective dielectric constant of the MPA environment. Therefore, it can also offer huge opportunities in label-free biosensing for future biomedical applications.

Dynamic construction of refractive index-dependent vibrations using surface plasmon-phonon polaritons

One of the fundamental hurdles in infrared spectroscopy is the failure of molecular identification when their infrared vibrational fingerprints overlap. Refractive index (RI) is another intrinsic property of molecules associated with electronic polarizability, but with limited contribution to molecular identification in mixed environments currently. Here, we investigate the coupling mode of localized surface plasmon and surface phonon polaritons for vibrational de-overlapping. The coupling mode is sensitive to the molecular refractive index, attributed to the RI-induced vibrational variations of surface phonon polaritons (SPhP) within the Reststrahlen band, referred to as RI-dependent SPhP vibrations. The RI-dependent SPhP vibrations are linked to molecular RI features. According to the deep-learning-augmented demonstration of bond-breaking-bond-making dynamic profiling in biological reaction, we substantiate that the RI-dependent SPhP vibrations effectively disentangle overlapping vibrational modes, achieving a 92% identification accuracy even for the strongly overlapping vibrational modes in the reaction. Our findings offer insights into the realm of light-matter interaction and provide a valuable toolkit for biomedicine applications.

Dual-band chirality-selective absorbing by plasmonic metasurfaces with breaking mirror and rotational symmetry

In this work, we proposed a state-of-the-art metasurface model that breaks the mirror symmetry and rotation symmetry of the structure. It consists of two-layer rotating gold split rings, and has the capability of chirality-selective absorption for circularly polarized light (CPL) in two bands. The absorption peaks for left- and right- circularly polarized (LCP&RCP) light appeared at 989 nm and 1404 nm, respectively, with the maximum absorptivity of 98.5% and 96.3%, respectively. By changing the rotation angle of the two-layer gold split rings, it could also be designed as a single-band chiral metasurface absorber, which only absorbed RCP light but not LCP light, and the absorptivity of RCP light could be up to 97.4%. Furthermore, we found our designed absorbers had the characteristics of great circular dichroism (CD) and symmetric absorption. The physical mechanism of the selective absorption of CPL by the absorbers may be explained by the current vector analysis. In addition, the absorption peak could be tuned with the changing of the geometrical parameters of the structure. The proposed chirality-selective metasurface absorbers could be used in CD spectral detection, optical communication, optical filtering, and other fields.

Research Progress in Surface-Enhanced Infrared Absorption Spectroscopy: From Performance Optimization, Sensing Applications, to System Integration

Infrared absorption spectroscopy is an effective tool for the detection and identification of molecules. However, its application is limited by the low infrared absorption cross-section of the molecule, resulting in low sensitivity and a poor signal-to-noise ratio. Surface-Enhanced Infrared Absorption (SEIRA) spectroscopy is a breakthrough technique that exploits the field-enhancing properties of periodic nanostructures to amplify the vibrational signals of trace molecules. The fascinating properties of SEIRA technology have aroused great interest, driving diverse sensing applications. In this review, we first discuss three ways for SEIRA performance optimization, including material selection, sensitivity enhancement, and bandwidth improvement. Subsequently, we discuss the potential applications of SEIRA technology in fields such as biomedicine and environmental monitoring. In recent years, we have ushered in a new era characterized by the Internet of Things, sensor networks, and wearable devices. These new demands spurred the pursuit of miniaturized and consolidated infrared spectroscopy systems and chips. In addition, the rise of machine learning has injected new vitality into SEIRA, bringing smart device design and data analysis to the foreground. The final section of this review explores the anticipated trajectory that SEIRA technology might take, highlighting future trends and possibilities.

Triboelectric-induced ion mobility for artificial intelligence-enhanced mid-infrared gas spectroscopy

Isopropyl alcohol molecules, as a biomarker for anti-virus diagnosis, play a significant role in the area of environmental safety and healthcare relating volatile organic compounds. However, conventional gas molecule detection exhibits dramatic drawbacks, like the strict working conditions of ion mobility methodology and weak light-matter interaction of mid-infrared spectroscopy, yielding limited response of targeted molecules. We propose a synergistic methodology of artificial intelligence-enhanced ion mobility and mid-infrared spectroscopy, leveraging the complementary features from the sensing signal in different dimensions to reach superior accuracy for isopropyl alcohol identification. We pull in "cold" plasma discharge from triboelectric generator which improves the mid-infrared spectroscopic response of isopropyl alcohol with good regression prediction. Moreover, this synergistic methodology achieves ~99.08% accuracy for a precise gas concentration prediction, even with interferences of different carbon-based gases. The synergistic methodology of artificial intelligence-enhanced system creates mechanism of accurate gas sensing for mixture and regression prediction in healthcare.

Coupled Tamm Phonon and Plasmon Polaritons for Designer Planar Multiresonance Absorbers

Wavelength-selective absorbers (WS-absorbers) are of interest for various applications, including chemical sensing and light sources. Lithography-free fabrication of WS-absorbers can be realized via Tamm plasmon polaritons (TPPs) supported by distributed Bragg reflectors (DBRs) on plasmonic materials. While multifrequency and nearly arbitrary spectra can be realized with TPPs via inverse design algorithms, demanding and thick DBRs are required for high quality-factors (Q-factors) and/or multiband TPP-absorbers, increasing the cost and reducing fabrication error tolerance. Here, high Q-factor multiband absorption with limited DBR layers (3 layers) is experimentally demonstrated by Tamm hybrid polaritons (THPs) formed by coupling TPPs and Tamm phonon polaritons when modal frequencies are overlapped. Compared to the TPP component, the Q-factors of THPs are improved twofold, and the angular broadening is also reduced twofold, facilitating applications where narrow-band and nondispersive WS-absorbers are needed. Moreover, an open-source algorithm is developed to inversely design THP-absorbers consisting of anisotropic media and exemplify that the modal frequencies can be assigned to desirable positions. Furthermore, it is demonstrated that inversely designed THP-absorbers can realize same spectral resonances with fewer DBR layers than a TPP-absorber, thus reducing the fabrication complexity and enabling more cost-effective, lithography-free, wafer-scale WS-absorberss for applications such as free-space communications and gas sensing.

High-quality factor mid-infrared absorber based on all-dielectric metasurfaces

The absorption spectrum of metasurface absorbers can be manipulated by changing structures. However, narrowband performance absorbers with high quality factors (Q-factor) are hard to achieve, mainly for the ohmic loss of metal resonators. Here, we propose an all-dielectric metasurface absorber with narrow absorption linewidth in the mid-infrared range. Magnetic quadrupole resonance is excited in the stacked Ge-Si₃N₄ nanoarrays with an absorption of 89.6% and a Q-factor of 6120 at 6.612 µm. The separate lossless Ge resonator and lossy Si₃N₄ layer realize high electromagnetic field gain and absorption, respectively. And the proposed method successfully reduced the intrinsic loss of the absorber, which reduced the absorption beyond the resonant wavelength and improved the absorption efficiency of Si₃N₄ in the low loss range. Furthermore, the absorption intensity and wavelength can be modulated by adjusting the geometric parameters of the structure. We believe this research has good application prospects in mid-infrared lasers, thermal emitters, gas feature sensing, and spectral detection.

Machine learning-augmented surface-enhanced spectroscopy toward next-generation molecular diagnostics

The world today is witnessing the significant role and huge demand for molecular detection and screening in healthcare and medical diagnosis, especially during the outbreak of COVID-19. Surface-enhanced spectroscopy techniques, including Surface-Enhanced Raman Scattering (SERS) and Infrared Absorption (SEIRA), provide lattice and molecular vibrational fingerprint information which is directly linked to the molecular constituents, chemical bonds, and configuration. These properties make them an unambiguous, nondestructive, and label-free toolkit for molecular diagnostics and screening. However, new issues in molecular diagnostics, such as increasing molecular species, faster spread of viruses, and higher requirements for detection accuracy and sensitivity, have brought great challenges to detection technology. Advancements in artificial intelligence and machine learning (ML) techniques show promising potential in empowering SERS and SEIRA with rapid analysis and automatic data processing to jointly tackle the challenge. This review introduces the combination of ML and SERS/SEIRA by investigating how ML algorithms can be beneficial to SERS/SEIRA, discussing the general process of combining ML and SEIRA/SERS, highlighting the molecular diagnostics and screening applications based on ML-combined SEIRA/SERS, and providing perspectives on the future development of ML-integrated SEIRA/SERS. In general, this review offers comprehensive knowledge about the recent advances and the future outlook regarding ML-integrated SEIRA/SERS for molecular diagnostics and screening.

Towards Highly Efficient Nitrogen Dioxide Gas Sensors in Humid and Wet Environments Using Triggerable-Polymer Metasurfaces

We report simulations on a highly-sensitive class of metasurface-based nitrogen dioxide (NO2) gas sensors, operating in the telecom C band around the 1550 nm line and exhibiting strong variations in terms of the reflection coefficient after assimilation of NO2 molecules. The unit architecture employs a polymer-based (polyvinylidene fluoride-PVDF or polyimide-PI) motif of either half-rings, rods, or disks having selected sizes and orientations, deposited on a gold substrate. On top of this, we add a layer of hydrophyllic polymer (POEGMA) functionalized with a NO2-responsive monomer (PAPUEMA), which is able to adsorb water molecules only in the presence of NO2 molecules. In this process, the POEGMA raises its hidrophyllicity, while not triggering a phase change in the bulk material, which, in turn, modifies its electrical properties. Contrary to absorption-based gas detection and electrical signal-based sensors, which experience considerable limitations in humid or wet environments, our method stands out by simple exploitation of the basic material properties of the functionalized polymer. The results show that NO2-triggered water molecule adsorption from humid and wet environments can be used in conjunction with our metasurface architecture in order to provide a highly-sensitive response in the desired spectral window. Additionally, instead of measuring the absorption spectrum of the NO2 gas, in which humidity counts as a parasitic effect due to spectral overlap, this method allows tuning to a desired wavelength at which the water molecules are transparent, by scaling the geometry and thicknesses of the layers to respond to a desired wavelength. All these advantages make our proposed sensor architecture an extremely-viable candidate for both biological and atmospheric NO2 gas-sensing applications.

Visible transparent mid-infrared broadband absorbers based on gradient refractive indexes and multi-size cavity resonances

We proposed a multi-layered nanorod structure with the same tilt angle and different diameters, which has high visible transmittance and strong 3-5 µm absorption based on the principles of the gradient of the refractive index and the multi-size cavity resonances. The indium tin oxide (ITO) was selected as the target material to fabricate the structure by using a glancing angle deposition method. The experimental results show that when the deposition angle θ is 80°, swing deposition is successively done with the rotation angle φ of ±8°, ± 5°, ± 3°, and 0° on the surface of the substrate, and the quartz crystal microbalance thicknesses of ITO nanorods are 220 nm for each deposition, the average transmittance is 80.5% in the range of 400-800 nm and the integrated absorption is 86% in the 3-5 µm band. Such a simple, low-cost, and easy-to-fabricate device has potential applications in window stealth materials and other related fields.

MOF/Polymer-Integrated Multi-Hotspot Mid-Infrared Nanoantennas for Sensitive Detection of CO2 Gas

Metal-organic frameworks (MOFs) have been extensively used for gas sorption, storage and separation owing to ultrahigh porosity, exceptional thermal stability, and wide structural diversity. However, when it comes to ultra-low concentration gas detection, technical bottlenecks of MOFs appear due to the poor adsorption capacity at ppm-/ppb-level concentration and the limited sensitivity for signal transduction. Here, we present hybrid MOF-polymer physi-chemisorption mechanisms integrated with infrared (IR) nanoantennas for highly selective and ultrasensitive CO₂ detection. To improve the adsorption capacity for trace amounts of gas molecules, MOFs are decorated with amino groups to introduce the chemisorption while maintaining the structural integrity for physisorption. Additionally, leveraging all major optimization methods, a multi-hotspot strategy is proposed to improve the sensitivity of nanoantennas by enhancing the near field and engineering the radiative and absorptive loss. As a benefit, we demonstrate the competitive advantages of our strategy against the state-of-the-art miniaturized IR CO₂ sensors, including low detection limit, high sensitivity (0.18%/ppm), excellent reversibility (variation within 2%), and high selectivity (against C₂H₅OH, CH₃OH, N₂). This work provides valuable insights into the integration of advanced porous materials and nanophotonic devices, which can be further adopted in ultra-low concentration gas monitoring in industry and environmental applications.

Metasurfaces for Sensing Applications: Gas, Bio and Chemical

Performance of photonic devices critically depends upon their efficiency on controlling the flow of light therein. In the recent past, the implementation of plasmonics, two-dimensional (2D) materials and metamaterials for enhanced light-matter interaction (through concepts such as sub-wavelength light confinement and dynamic wavefront shape manipulation) led to diverse applications belonging to spectroscopy, imaging and optical sensing etc. While 2D materials such as graphene, MoS₂ etc., are still being explored in optical sensing in last few years, the application of plasmonics and metamaterials is limited owing to the involvement of noble metals having a constant electron density. The capability of competently controlling the electron density of noble metals is very limited. Further, due to absorption characteristics of metals, the plasmonic and metamaterial devices suffer from large optical loss. Hence, the photonic devices (sensors, in particular) require that an efficient dynamic control of light at nanoscale through field (electric or optical) variation using substitute low-loss materials. One such option may be plasmonic metasurfaces. Metasurfaces are arrays of optical antenna-like anisotropic structures (sub-wavelength size), which are designated to control the amplitude and phase of reflected, scattered and transmitted components of incident light radiation. The present review put forth recent development on metamaterial and metastructure-based various sensors.

Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators

In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable metamaterial absorber for millimeter-wave application was demonstrated. To achieve the resonant-frequency tunability of the absorber, the unit cell of the proposed metamaterial was designed to be a symmetric split-ring resonator with a stress-induced MEMS cantilever array having initial out-of-plane deflections, and the cantilevers were electrostatically actuated to generate a capacitance change. The dimensional parameters of the absorber were determined via impedance matching using a full electromagnetic simulation. The designed absorber was fabricated on a glass wafer with surface micromachining processes using a photoresist sacrificial layer and the oxygen-plasma-ashing process to release the cantilevers. The performance of the fabricated absorber was experimentally validated using a waveguide measurement setup. The absorption frequency shifted down according to the applied DC (direct current) bias voltage from 28 GHz in the initial off state to 25.5 GHz in the pull-down state with the applied voltage of 15 V. The measured reflection coefficients at those frequencies were -5.68 dB and -33.60 dB, corresponding to the peak absorptivity rates of 72.9 and 99.9%, respectively.

Electrically Driven Hyperbolic Nanophotonic Resonators as High Speed, Spectrally Selective Thermal Radiators

We introduce and experimentally demonstrate electrically driven, spectrally selective thermal emitters based on globally aligned carbon nanotube metamaterials. The self-assembled metamaterial supports a high degree of nanotube ordering, enabling nanoscale ribbons patterned in the metamaterial to function both as Joule-heated incandescent filaments and as infrared hyperbolic resonators imparting spectral selectivity to the thermal radiation. Devices batch-fabricated on a single chip emit polarized thermal radiation with peak wavelengths dictated by their hyperbolic resonances, and their nanoscale heated dimensions yield modulation rates as high as 1 MHz. As a proof of concept, we show that two sets of thermal emitters on the same chip, operating with different peak wavelengths and modulation rates, can be used to sense carbon dioxide with one detector. We anticipate that the combination of batch fabrication, modulation bandwidth, and spectral tuning with chip-based nanotube thermal emitters will enable new modalities in multiplexed infrared sources.

Wavelength-multiplexed hook nanoantennas for machine learning enabled mid-infrared spectroscopy

Infrared (IR) plasmonic nanoantennas (PNAs) are powerful tools to identify molecules by the IR fingerprint absorption from plasmon-molecules interaction. However, the sensitivity and bandwidth of PNAs are limited by the small overlap between molecules and sensing hotspots and the sharp plasmonic resonance peaks. In addition to intuitive methods like enhancement of electric field of PNAs and enrichment of molecules on PNAs surfaces, we propose a loss engineering method to optimize damping rate by reducing radiative loss using hook nanoantennas (HNAs). Furthermore, with the spectral multiplexing of the HNAs from gradient dimension, the wavelength-multiplexed HNAs (WMHNAs) serve as ultrasensitive vibrational probes in a continuous ultra-broadband region (wavelengths from 6 μm to 9 μm). Leveraging the multi-dimensional features captured by WMHNA, we develop a machine learning method to extract complementary physical and chemical information from molecules. The proof-of-concept demonstration of molecular recognition from mixed alcohols (methanol, ethanol, and isopropanol) shows 100% identification accuracy from the microfluidic integrated WMHNAs. Our work brings another degree of freedom to optimize PNAs towards small-volume, real-time, label-free molecular recognition from various species in low concentrations for chemical and biological diagnostics.

Infrared spectroscopy with plasmonic nanoantennas is limited by small overlap between molecules and hot spots, and sharp resonance peaks. The authors demonstrate spectral multiplexing of hook nanoantennas with gradient dimensions as ultrasensitive vibrational probes in a continuous ultra-broadband region and utilize machine learning for enhanced sensing performance.

Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

In this paper, we propose a highly selective and efficient gas detection system based on a narrow-band IR metasurface emitter integrated with a resistive heater. In order to develop the sensor for the detection of specific gases, both the microheater and metasurface structures have been optimized in terms of geometry and materials. Devices with different metamaterial structures and geometries for the heater have been tested. Our prototype showed that the modification of the spectral response of metasurface-based structures is easily achieved by adapting the geometrical parameters of the plasmonic micro-/nanostructures in the metasurface. The advantage of this system is the on-chip integration of a thermal source with broad IR radiation with the metasurface structure, obtaining a compact selective radiation source. From the experimental data, narrow emission peaks (FWHM as low as 0.15 μm), corresponding to the CO₂, CH₄, and CO absorption bands, with a radiant power of a few mW were obtained. It has been shown that, by changing the bias voltage, a shift of a few tens of nm around the central emission wavelength can be obtained, allowing fine optimization for gas detection applications.

Reconfigurable terahertz metamaterials: From fundamental principles to advanced 6G applications

Terahertz (THz) electromagnetic spectrum ranging from 0.1THz to 10THz has become critical for sixth generation (6G) applications, such as high-speed communication, fingerprint chemical sensing, non-destructive biosensing, and bioimaging. However, the limited response of naturally existing materials THz waves has induced a gap in the electromagnetic spectrum, where a lack of THz functional devices using natural materials has occurred in this gap. Metamaterials, artificially composed structures that can engineer the electromagnetic properties to manipulate the waves, have enabled the development of many THz devices, known as "metadevices". Besides, the tunability of THz metadevices can be achieved by tunable structures using microelectromechanical system (MEMS) technologies, as well as tunable materials including phase change materials (PCMs), electro-optical materials (EOMs), and thermo-optical materials (TOMs). Leveraging various tuning mechanisms together with metamaterials, tremendous research works have demonstrated reconfigurable functional THz devices, playing an important role to fill the THz gap toward the 6G applications. This review introduces reconfigurable metadevices from fundamental principles of metamaterial resonant system to the design mechanisms of functional THz metamaterial devices and their related applications. Moreover, we provide perspectives on the future development of THz photonic devices for state-of-the-art applications.

A voltage-controllable VO2 based metamaterial perfect absorber for CO2 gas sensing application

Vanadium dioxide (VO₂) based metamaterial perfect absorbers (MPAs) have high potential application values in sensing gas molecules. However, a tuning mechanism via temperature manipulation lacks the compatibility with electronic devices. In this study, a voltage-controllable device is proposed by integrating an MPA and micro-electro-mechanical system (MEMS) based microheater for CO₂ gas sensing application. The MPA is composed of a metal-dielectric-metal (MDM) structure and tailored to form an H-shaped metamaterial. The central bar of the H-shaped metamaterial is composed of a VO₂ material, which exhibits perfect absorption in the CO₂ gas absorption spectrum, i.e., at a wavelength of 2.70 μm. The intergated microheater is patterned by using fractal theory to provide high heating temperature and high uniformity of surface temperature. By precisely driving a DC bias voltage on the microheater, the MPA is heated and it can exhibit switchable optical properties with high efficiency. These results provide a strategy to open an avenue for sensors, absorbers, switches, and programmable devices in infrared wavelength range applications.

Theoretical Demonstration of the Interest of Using Porous Germanium to Fabricate Multilayer Vertical Optical Structures for the Detection of SF6 Gas in the Mid-Infrared

Porous germanium is a promising material for sensing applications in the mid-infrared wavelength range due to its biocompatibility, large internal surface area, open pores network and widely tunable refractive index, as well as its large spectral transparency window ranging from 2 to 15 μm. Multilayers, such as Bragg reflectors and microcavities, based on porous germanium material, are designed and their optical spectra are simulated to enable SF₆ gas-sensing applications at a wavelength of 10.55 µm, which corresponds to its major absorption line. The impact of both the number of successive layers and their respective porosity on the multilayer structures reflectance spectrum is investigated while favoring low layer thicknesses and thus the ease of multilayers manufacturing. The suitability of these microcavities for mid-infrared SF₆ gas sensing is then numerically assessed. Using an asymmetrical microcavity porous structure, a sensitivity of 0.01%/ppm and a limit of detection (LOD) around 1 ppb for the SF₆ gas detection are calculated. Thanks to both the porous nature allowing gases to easily infiltrate the overall structure and Ge mid-infrared optical properties, a theoretical detection limit nearly 1000 times lower than the current state of the art is simulated.

Integration of a Metal-Organic Framework Film with a Tubular Whispering-Gallery-Mode Microcavity for Effective CO2 Sensing

Carbon dioxide (CO₂) sensing using an optical technique is of great importance in the environment and industrial emission monitoring. However, limited by the poor specific adsorption of gas molecules as well as insufficient coupling efficiency, there is still a long way to go toward realizing a highly sensitive optical CO₂ gas sensor. Herein, by combining the advantages of a whispering-gallery-mode microcavity and a metal-organic framework (MOF) film, a porous functional microcavity (PF-MC) was fabricated with the assistance of the atomic layer deposition technique and was applied to CO₂ sensing. In this functional composite, the rolled-up microcavity provides the ability to tune the propagation of light waves and the electromagnetic coupling with the surroundings via an evanescent field, while the nanoporous MOF film contributes to the specific adsorption of CO₂. The composite demonstrates a high sensitivity of 188 nm RIU^-1 (7.4 pm/% with respect to the CO₂ concentration) and a low detection limit of ∼5.85 × 10^-5 RIU. Furthermore, the PF-MC exhibits great selectivity to CO₂ and outstanding reproducibility, which is promising for the next-generation optical gas sensing devices.

Surface-enhanced mid-infrared absorption spectroscopy using miniaturized-disc metasurface

Surface-enhanced infrared spectroscopy is an important technique for improving the signal-to-noise ratio of spectroscopic material identification measurements in the mid-infrared fingerprinting region. However, the lower bound of the fingerprinting region receives much less attention due to a scarcity of transparent materials, more expensive sources, and weaker plasmonic effects. In this paper, we present a miniaturized metasurface unit cell for surface-enhanced infrared spectroscopy of the 15-[Formula: see text]m vibrational band of CO[Formula: see text]. The unit cell consists of a gold disc, patterned along the edge with fine gaps/wires to create a resonant metamaterial liner. In simulation, our plasmonic metamaterial-lined disc achieves greater than [Formula: see text] the average field intensity enhancement of a comparable dipole array and a miniaturized size of [Formula: see text] using complex, 100-nm features that are patterned using 100-kV electron-beam lithography. In a simple experiment, the metamaterial-lined disc metasurface shows a high tolerance to fabrication imperfections and enhances the absorption of CO[Formula: see text] at 15 [Formula: see text]m. The resonant wavelength and reflection magnitude can be tuned over a wide range by adjusting the liner feature sizes and the metasurface array pitch to target other vibrational bands. This work is a step toward low-cost, more compact on-chip integrated gas sensors.

Broadband Bi-Directional Polarization-Insensitive Metamaterial Absorber

Conventional metamaterial absorbers eliminate the transmitted electromagnetic wave by attaching the metal plate with the unidirectional absorption performance; these absorbers limit the practical applications to a large extent. In this paper, we present a broadband bi-directional metamaterial absorber by etching chip resistors on the resonators for expanding the bandwidth, and two orthogonal I-shaped structures are pasted on the both sides of the ultra-thin substrate (FR-4) instead of the metal plate for enhancing absorptance of the absorber. Simulated results show that absorptance of the designed absorber is larger than 0.9 in 1.43-2.51 GHz along the forward and backward directions under both TE and TM polarizations. Microwave experiments in the chamber are performed to verify the simulations, and the experimental results exhibit the excellent agreement with the simulations. Additionally, two I-shaped structures are orthogonally pasted on an ultrathin substrate, leading to the impedance-matching of both forward and backward directions, and the absorptance can be tailed dynamically via the middle layer of the substrate. The physics of the absorption are visualized by using a transmission line based on equivalent circuits. We claim that the designed bi-directional metamaterial absorber can be a good candidate for electromagnetic stealth and energy harvesting.

Mechanically stretchable metamaterial with tunable mid-infrared optical properties

Over the past decade, tremendous efforts have been devoted to the design of metamaterials with ultrahigh absorption. These perfect absorbers can realize the annihilation of incident electromagnetic waves by eliminating reflection and transmission of microwaves, infrared, visible, and ultraviolet. However, the optical properties are usually unchanged due to a rigid structure. In this work, we propose a mechanically stretchable metamaterial composed of polydimethylsiloxane and gold with tunable optical properties in the mid-infrared region. A large variation of absorptances with different gold filling ratios is demonstrated as well as the corresponding electric field distributions. Under moderate uniaxial and biaxial tensions, the proposed two-dimensional grating structure has achieved a dynamic tuning of infrared thermal properties, including a sharp reflectance-absorptance switch. This mechanically stretchable metamaterial can serve different optical and sensing functions due to its facile tunability.

Multifunctional Chemical Sensing Platform Based on Dual-Resonant Infrared Plasmonic Perfect Absorber for On-Chip Detection of Poly(ethyl cyanoacrylate)

Multifunctional chemical sensing is highly desirable in industry, agriculture, and environmental sciences, but remains challenging due to the diversity of chemical substances and reactions. Surface-enhanced infrared absorption (SEIRA) spectroscopy can potentially address the above problems by ultra-sensitive detection of molecular fingerprint vibrations. Here, a multifunctional chemical sensing platform based on dual-resonant SEIRA device for sensitive and multifunctional on-chip detection of poly(ethyl cyanoacrylate) (PECA) is reported. It is experimentally demonstrated that the SEIRA sensing platform achieves multiple functions required by the PECA glue industry, including vibrational detection, thickness measurement, and in situ observation of polymerization and curing, which are usually realized by separately using a spectrometer, a viscometer, and an ellipsometer in the past. Specifically, the all-in-one sensor offers a dual-band fingerprint vibration identification, sub-nm level detection limit, and ultrahigh sensitivity of 0.76%/nm in thickness measurement, and second-level resolution in real-time observation of polymerization and curing. This work not only provides a valuable toolkit for ultra-sensitive and multifunctional on-chip detection of PECA, but also gives new insights into the SEIRA technology for multi-band, multi-functional, and on-chip chemical sensing.

Heterogeneous Wafer Bonding Technology and Thin-Film Transfer Technology-Enabling Platform for the Next Generation Applications beyond 5G

Wafer bonding technology is one of the most effective methods for high-quality thin-film transfer onto different substrates combined with ion implantation processes, laser irradiation, and the removal of the sacrificial layers. In this review, we systematically summarize and introduce applications of the thin films obtained by wafer bonding technology in the fields of electronics, optical devices, on-chip integrated mid-infrared sensors, and wearable sensors. The fabrication of silicon-on-insulator (SOI) wafers based on the Smart CutTM process, heterogeneous integrations of wide-bandgap semiconductors, infrared materials, and electro-optical crystals via wafer bonding technology for thin-film transfer are orderly presented. Furthermore, device design and fabrication progress based on the platforms mentioned above is highlighted in this work. They demonstrate that the transferred films can satisfy high-performance power electronics, molecular sensors, and high-speed modulators for the next generation applications beyond 5G. Moreover, flexible composite structures prepared by the wafer bonding and de-bonding methods towards wearable electronics are reported. Finally, the outlooks and conclusions about the further development of heterogeneous structures that need to be achieved by the wafer bonding technology are discussed.

Infrared Plasmonic Biosensor with Tetrahedral DNA Nanostructure as Carriers for Label-Free and Ultrasensitive Detection of miR-155

MicroRNAs play an important role in early development, cell proliferation, apoptosis, and cell death, and are aberrantly expressed in many types of cancers. To understand their function and diagnose cancer at an early stage, it is crucial to quantitatively detect microRNA without invasive labels. Here, a plasmonic biosensor based on surface-enhanced infrared absorption (SEIRA) for rapid, label-free, and ultrasensitive detection of miR-155 is reported. This technology leverages metamaterial perfect absorbers stimulating the SEIRA effect to provide up to 1000-fold near-field intensity enhancement over the microRNA fingerprint spectral bands. Additionally, it is discovered that the limit of detection (LOD) of the biosensor can be greatly improved by using tetrahedral DNA nanostructure (TDN) as carriers. By using near-field enhancement of SEIRA and specific binding of TDN, the biosensor achieves label-free detection of miR-155 with a high sensitivity of 1.162% pm^-1 and an excellent LOD of 100 × 10^-15 m. The LOD is about 5000 times lower than that using DNA single strand as probes and about 100 times lower than that of the fluorescence detection method. This work can not only provide a powerful diagnosis tool for the microRNAs detection but also gain new insights into the field of label-free and ultrasensitive SEIRA-based biosensing.

Controlling mid-infrared plasmons in graphene nanostructures through post-fabrication chemical doping

Engineering the doping level in graphene nanostructures to yield controlled and intense localized surface plasmon resonance (LSPR) is fundamental for their practical use in applications such as molecular sensing for point of care or environmental monitoring. In this work, we experimentally study how chemical doping of graphene nanostructures using ethylene amines affects their mid-infrared plasmonic response following the induced change in electrical transport properties. Combining post-fabrication silanization and amine doping allows to prepare the surface to support a strong LSPR response at zero bias. These findings pave the way to design highly doped graphene LSPR surfaces for infrared sensors operating in real environments.

Volatile organic compounds sensing based on Bennet doubler-inspired triboelectric nanogenerator and machine learning-assisted ion mobility analysis

Ion mobility analysis is a well-known analytical technique for identifying gas-phase compounds in fast-response gas-monitoring systems. However, the conventional plasma discharge system is bulky, operates at a high temperature, and inappropriate for volatile organic compounds (VOCs) concentration detection. Therefore, we report a machine learning (ML)-enhanced ion mobility analyzer with a triboelectric-based ionizer, which offers good ion mobility selectivity and VOC recognition ability with a small-sized device and non-strict operating environment. Based on the charge accumulation mechanism, a multi-switched manipulation triboelectric nanogenerator (SM-TENG) can provide a direct current (DC) bias at the order of a few hundred, which can be further leveraged as the power source to obtain a unique and repeatable discharge characteristic of different VOCs, and their mixtures, with a special tip-plate electrode configuration. Aiming to tackle the grand challenge in the detection of multiple VOCs, the ML-enhanced ion mobility analysis method was successfully demonstrated by extracting specific features automatically from ion mobility spectrometry data with ML algorithms, which significantly enhance the detection ability of the SM-TENG based VOC analyzer, showing a portable real-time VOC monitoring solution with rapid response and low power consumption for future internet of things based environmental monitoring applications.

Tailoring bolometric properties of a TiOx/Ti/TiOx tri-layer film for integrated optical gas sensors

In this paper, we systematically investigated tailoring bolometric properties of a proposed heat-sensitive TiO_x/Ti/TiO_x tri-layer film for a waveguide-based bolometer, which can play a significant role as an on-chip detector operating in the mid-infrared wavelength range for the integrated optical gas sensors on Ge-on-insulator (Ge-OI) platform. As a proof-of-concept, bolometric test devices with a TiO_x single-layer and TiO_x/Ti/TiO_x tri-layer films were fabricated by varying the layer thickness and thermal treatment condition. Comprehensive characterization was examined by the scanning transmission electron microscopy (STEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS) analyses in the prepared films to fully understand the microstructure and interfacial properties and the effects of thermal treatment. Quantitative measurements of the temperature- and time-dependent resistance variations were conducted to deduce the minimum detectable change in temperature (ΔT_min) of the prepared films. Furthermore, based on these experimentally obtained results, limit-of-detection (LoD) for the carbon dioxide gas sensing was estimated to demonstrate the feasibility of the proposed waveguide-based bolometer with the TiO_x/Ti/TiO_x tri-layer film as an on-chip detector on the Ge-OI platform. It was found that the LoD can reach ∼3.25 ppm and/or even lower with the ΔT_min of 11.64 mK in the device with the TiO_x/Ti/TiO_x (47/6/47 nm) tri-layer film vacuum-annealed at 400 °C for 15 min, which shows great enhancement of ∼7.7 times lower value compared to the best case of TiO_x single-layer films. Our theoretical and experimental demonstration for tailoring bolometric properties of a TiO_x/Ti/TiO_x tri-layer film provides fairly useful insight on how to improve LoD in the integrated optical gas sensor with the bolometer as an on-chip detector.

Progress in micro/nano sensors and nanoenergy for future AIoT-based smart home applications

Self-sustainable sensing systems composed of micro/nano sensors and nano-energy harvesters contribute significantly to developing the internet of things (IoT) systems. As one of the most promising IoT applications, smart home relies on implementing wireless sensor networks with miniaturized and multi-functional sensors, and distributed, reliable, and sustainable power sources, namely energy harvesters with a variety of conversion mechanisms. To extend the capabilities of IoT in the smart home, a technology fusion of IoT and artificial intelligence (AI), called the artificial intelligence of things (AIoT), enables the detection, analysis, and decision-making functions with the aids of machine learning assisted algorithms to form a smart home based intelligent system. In this review, we introduce the conventional rigid microelectromechanical system (MEMS) based micro/nano sensors and energy harvesters, followed by presenting the advances in the wearable counterparts for better human interactions. We then discuss the viable integration approaches for micro/nano sensors and energy harvesters to form self-sustainable IoT systems. Whereafter, we emphasize the recent development of AIoT based systems and the corresponding applications enabled by the machine learning algorithms. Smart home based healthcare technology enabled by the integrated multi-functional sensing platform and bioelectronic medicine is also presented as an important future direction, as well as wearable photonics sensing system as a complement to the wearable electronics sensing system.

Soil moisture remote sensing using SIW cavity based metamaterial perfect absorber

Continuous and accurate sensing of water content in soil is an essential and useful measure in the agriculture industry. Traditional sensors developed to perform this task suffer from limited lifetime and also need to be calibrated regularly. Further, maintenance, support, and deployment of these sensors in remote environments provide additional challenges to the use of conventional soil moisture sensors. In this paper, a metamaterial perfect absorber (MPA) based soil moisture sensor is introduced. The ability of MPAs to absorb electromagnetic signals with near 100% efficiency facilitates the design of highly accurate and low-profile radio frequency passive sensors. MPA based sensor can be fabricated from highly durable materials and can therefore be made more resilient than traditional sensors. High resolution sensing is achieved through the creation of physical channels in the substrate integrated waveguide (SIW) cavity. The proposed sensor does not require connection for both electromagnetic signals or for adding a testing sample. Importantly, an external power supply is not needed, making the MPA based sensor the perfect solution for remote and passive sensing in modern agriculture. The proposed MPA based sensor has three absorption bands due to the various resonance modes of the SIW cavity. By changing the soil moisture level, the absorption peak shifts by 10 MHz, 23.3 MHz, and 60 MHz, which is correlated with the water content percentage at the first, second and third absorption bands, respectively. Finally, a [Formula: see text] cell array with a total size of [Formula: see text] has been fabricated and tested. A strong correlation between measurement and simulation results validates the design procedure.

Tunable Split-Disk Metamaterial Absorber for Sensing Application

We present four designs of tunable split-disk metamaterial (SDM) absorbers. They consist of a bottom gold (Au) mirror layer anchored on Si substrate and a suspended-top SDM nanostructure with one, two, three, and four splits named SDM-1, SDM-2, SDM-3, and SDM-4, respectively. By tailoring the geometrical configurations, the four SDMs exhibit different tunable absorption resonances spanning from 1.5 µm to 5.0 µm wavelength range. The resonances of absorption spectra can be tuned in the range of 320 nm, and the absorption intensities become lower by increasing the gaps of the air insulator layer. To increase the sensitivity of the proposed devices, SDMs exhibit high sensitivities of 3312 nm/RIU (refractive index unit, RIU), 3362 nm/RIU, 3342 nm/RIU, and 3567 nm/RIU for SDM-1, SDM-2, SDM-3, and SDM-4, respectively. The highest correlation coefficient is 0.99999. This study paves the way to the possibility of optical gas sensors and biosensors with high sensitivity.

Toward Healthcare Diagnoses by Machine-Learning-Enabled Volatile Organic Compound Identification

As a natural monitor of health conditions for human beings, volatile organic compounds (VOCs) act as significant biomarkers for healthcare monitoring and early stage diagnosis of diseases. Most existing VOC sensors use semiconductors, optics, and electrochemistry, which are only capable of measuring the total concentration of VOCs with slow response, resulting in the lack of selectivity and low efficiency for VOC detection. Infrared (IR) spectroscopy technology provides an effective solution to detect chemical structures of VOC molecules by absorption fingerprints induced by the signature vibration of chemical stretches. However, traditional IR spectroscopy for VOC detection is limited by the weak light-matter interaction, resulting in large optical paths. Leveraging the ultrahigh electric field induced by plasma, the vibration of the molecules is enhanced to improve the light-matter interaction. Herein, we report a plasma-enhanced IR absorption spectroscopy with advantages of fast response, accurate quantization, and good selectivity. An order of ∼kV voltage was achieved from the multiswitched manipulation of the triboelectric nanogenerator by repeated sliding. The VOC species and their concentrations were well-quantified from the wavelength and intensity of spectra signals with the enhancement from plasma. Furthermore, machine learning has visualized the relationship of different VOCs in the mixture, which demonstrated the feasibility of the VOC identification to mimic patients.

Perfect Absorption and Refractive-Index Sensing by Metasurfaces Composed of Cross-Shaped Hole Arrays in Metal Substrate

Achieving perfect electromagnetic wave absorption with a sub-nanometer bandwidth is challenging, which, however, is desired for high-performance refractive-index sensing. In this work, we theoretically study metasurfaces for sensing applications based on an ultra-narrow band perfect absorption in the infrared region, whose full width at half maximum (FWHM) is only 1.74 nm. The studied metasurfaces are composed of a periodic array of cross-shaped holes in a silver substrate. The ultra-narrow band perfect absorption is related to a hybrid mode, whose physical mechanism is revealed by using a coupling model of two oscillators. The hybrid mode results from the strong coupling between the magnetic resonances in individual cross-shaped holes and the surface plasmon polaritons on the top surface of the silver substrate. Two conventional parameters, sensitivity (S) and figure of merit (FOM), are used to estimate the sensing performance, which are 1317 nm/RIU and 756, respectively. Such high-performance parameters suggest great potential for the application of label-free biosensing.

Metal-Organic Framework-Surface-Enhanced Infrared Absorption Platform Enables Simultaneous On-Chip Sensing of Greenhouse Gases

Simultaneous on-chip sensing of multiple greenhouse gases in a complex gas environment is highly desirable in industry, agriculture, and meteorology, but remains challenging due to their ultralow concentrations and mutual interference. Porous microstructure and extremely high surface areas in metal-organic frameworks (MOFs) provide both excellent adsorption selectivity and high gases affinity for multigas sensing. Herein, it is described that integrating MOFs into a multiresonant surface-enhanced infrared absorption (SEIRA) platform can overcome the shortcomings of poor selectivity in multigas sensing and enable simultaneous on-chip sensing of greenhouse gases with ultralow concentrations. The strategy leverages the near-field intensity enhancement (over 1500-fold) of multiresonant SEIRA technique and the outstanding gas selectivity and affinity of MOFs. It is experimentally demonstrated that the MOF-SEIRA platform achieves simultaneous on-chip sensing of CO2 and CH4 with fast response time (<60 s), high accuracy (CO2: 1.1%, CH4: 0.4%), small footprint (100 × 100 µm2), and excellent linearity in wide concentration range (0-2.5 × 104 ppm). Additionally, the excellent scalability to detect more gases is explored. This work opens up exciting possibilities for the implementation of all-in-one, real-time, and on-chip multigas detection as well as provides a valuable toolkit for greenhouse gas sensing applications.

Nanometer-Scale Heterogeneous Interfacial Sapphire Wafer Bonding for Enabling Plasmonic-Enhanced Nanofluidic Mid-Infrared Spectroscopy

As one of the most effective surface-enhanced infrared absorption (SEIRA) techniques, metal-insulator-metal structured metamaterial perfect absorbers possess an ultrahigh sensitivity and selectivity in molecular infrared fingerprint detection. However, most of the localized electromagnetic fields (i.e., hotspots) are confined in the dielectric layer, hindering the interaction between analytes and hotspots. By replacing the dielectric layer with the nanofluidic channel, we develop a sapphire (Al₂O₃)-based mid-infrared (MIR) hybrid nanofluidic-SEIRA (HN-SEIRA) platform for liquid sensors with the aid of a low-temperature interfacial heterogeneous sapphire wafer direct bonding technique. The robust atomic bonding interface is confirmed by transmission electron microscope observation. We also establish a design methodology for the HN-SEIRA sensor using coupled-mode theory to carry out the loss engineering and experimentally validate its feasibility through the accurate nanogap control. Thanks to the capillary force, liquid analytes can be driven into sensing hotspots without external actuation systems. Besides, we demonstrate an in situ real-time dynamic monitoring process for the acetone molecular diffusion in deionized water. A small concentration change of 0.29% is distinguished and an ultrahigh sensitivity (0.8364 pmol^-1 %) is achieved. With the aid of IR fingerprint absorption, our HN-SEIRA platform brings the selectivity of liquid molecules with similar refractive indexes. It also resolves water absorption issues in traditional IR liquid sensors thanks to the sub-nm long light path. Considering the wide transparency window of Al₂O₃ in MIR (up to 5.2 μm), the HN-SEIRA platform covers more IR absorption range for liquid sensing compared to fused glass commonly used in micro/nanofluidics. Leveraging the aforementioned advantages, our work provides insights into developing a MIR real-time liquid sensing platform with intrinsic IR fingerprint selectivity, label-free ultrahigh sensitivity, and ultralow analyte volume, demonstrating a way toward quantitative molecule identification and dynamic analysis for the chemical and biological reaction processes.

Optical Carbon Dioxide Detection in the Visible Down to the Single Digit ppm Range Using Plasmonic Perfect Absorbers

To tackle climate change and reduce CO₂ emissions, it is important to measure CO₂ output precisely. Even though there are many different techniques, no simple and cheap optical method in the visible is available. This work studies plasmonically enhanced optical carbon dioxide sensors in the visible wavelength range. The sensor samples are based on an inert plasmonic perfect absorber, which can be easily and cheaply fabricated by colloidal etching lithography. A CO₂-sensitive polyethylenimine (PEI) layer is then spin-coated on top to complete the samples. The samples are examined continuously by microspectroscopy during different CO₂ exposures to track spectral changes, particularly the position of the resonance centroid wavelength. The samples exhibit a resonance shift of up to 7 nm, depending on the CO₂ concentration and the temperature. The temperature influences the rise time as well as the sensitive concentration range. The concentration dependence of the resonance shift overall follows the shape of a Langmuir isotherm, which includes a nearly linear relation at lower concentrations and elevated temperatures and a saturating behavior at higher concentrations and lower temperatures. The results indicate that a sensitivity in the full range from 100 vol % to below 1 ppm can be achieved. The samples degenerate in a dry inert atmosphere in a matter of days but are useable over multiple weeks when exposed to humidity and CO₂. The PEI reacts very selectively to CO₂, showing no response to CO, NH₃, NO₂, CH₄, H₂, and only a very small response to O₂. Overall, polyethylenimine is very promising as a CO₂-sensitive material for many practical sensing applications over a wide range of concentrations. An adjustment of the temperature is mandatory to control the sensitivity and response time.

Photonic Metamaterial Absorbers: Morphology Engineering and Interdisciplinary Applications

Recent advances in nanofabrication technologies have spurred many breakthroughs in the field of photonic metamaterials that provide efficient ways of manipulating light-matter interaction at subwavelength scales. As one of the most important applications, photonic metamaterials can be used to implement novel optical absorbers. First the morphology engineering of various photonic metamaterial absorbers is discussed, which is highly associated with impendence matching conditions and resonance modes of the absorbers, thus directly determines their absorption efficiency, operational bandwidth, incident angle, and polarization dependence. Then, the recent achievements of various interdisciplinary applications based on photonic metamaterial absorbers, including structural color generation, ultrasensitive optical sensing, solar steam generation, and highly responsive photodetection, are reviewed. This report is expected to provide an overview and vision for the future development of photonic metamaterial absorbers and their applications in novel nanophotonic systems.

Schottky-Contacted Nanowire Sensors

The progress of the Internet-of-Things in the past few years has necessitated the support of high-performance sensors. Schottky-contacted nanowire sensors have attracted considerable attention owing to their high sensitivity and fast response time. Their progress is reviewed here, based on several kinds of important nanowires, for applications such as bio/chemical sensors, gas sensors, photodetectors, and strain sensors. Although Schottky-contacted nanowire sensors deliver excellent performance in these fields, they can be further improved by various methods, including defect engineering, surface modification, the piezotronic effect, and the piezophototronic effect, all of which are discussed here. With regard to practical applications, further efforts are required to address challenges such as the stability, selectivity, ultrafast response, multifunctionality, flexibility, distributed energy supply, and sustainability of Schottky-contacted nanowire sensors. Finally, future perspectives and solutions are discussed.

Scalable spectrally selective mid-infrared meta-absorbers for advanced radiative thermal engineering

Metamaterials with spectrally selective absorptance operating in the mid-infrared range have attracted much interest in numerous applications. However, it remains a challenge to economically fabricate scalable meta-absorbers with tailorable absorptance bands. This work demonstrates a conceptually simple and low-cost yet effective design strategy to achieve spectrally selective absorption with tailorable band positions at MIR by colloidal lithography. The strategy ingeniously uses residual diameter fluctuations of circular resonators etched through monodisperse colloidal particles for achieving superposition of multiple magnetic resonances and thereby a more than doubled absorption band, which is neglected in previous works. The proposed meta-absorber features densely packed thick aluminum resonators with a rather narrow diameter distribution and enhanced capacitive coupling among them. Moreover, the tailorability of the absorption band can be achieved by a parameterized variation in the fabrication process. As a proof of concept, infrared stealth and radiative cooling are demonstrated based on our meta-absorbers. The design and fabrication strategy create versatile metamaterials for advanced radiative thermal engineering.

Integration of MEMS IR detectors with MIR waveguides for sensing applications

Waveguides have been utilized for label-free and miniaturized mid-infrared gas sensors that operate on the evanescent field absorption principle. For integrated systems, photodetectors based on the photocarrier generation principle are previously integrated with waveguides. However, due to the thermal excitation of carriers at room temperature, they suffer from large dark currents and noise in the long-wavelength region. In this paper, we introduce the integration of a MEMS-based broadband infrared thermopile sensor with mid-infrared waveguides via flip-chip bonding technology and demonstrate a proof-of-concept gas (N₂O) sensor working at 3.9 µm. A photonic device with input and output grating couplers designed at 3.72 µm was fabricated on a silicon-on-insulator (SOI) platform and integrated with a bare thermopile chip on its output side via flip-chip bonding in order to realize an integrated photonic platform for a myriad range of sensing applications. A responsivity of 69 mV/W was measured at 3.72 µm for an 11 mm waveguide. A second device designed at 3.9 µm has a 1800 ppm resolution for N₂O sensing.

Progress of infrared guided-wave nanophotonic sensors and devices

Nanophotonics, manipulating light-matter interactions at the nanoscale, is an appealing technology for diversified biochemical and physical sensing applications. Guided-wave nanophotonics paves the way to miniaturize the sensors and realize on-chip integration of various photonic components, so as to realize chip-scale sensing systems for the future realization of the Internet of Things which requires the deployment of numerous sensor nodes. Starting from the popular CMOS-compatible silicon nanophotonics in the infrared, many infrared guided-wave nanophotonic sensors have been developed, showing the advantages of high sensitivity, low limit of detection, low crosstalk, strong detection multiplexing capability, immunity to electromagnetic interference, small footprint and low cost. In this review, we provide an overview of the recent progress of research on infrared guided-wave nanophotonic sensors. The sensor configurations, sensing mechanisms, sensing performances, performance improvement strategies, and system integrations are described. Future development directions are also proposed to overcome current technological obstacles toward industrialization.

Perfect Absorption Efficiency Circular Nanodisk Array Integrated with a Reactive Impedance Surface with High Field Enhancement

Infrared (IR) absorbers based on a metal–insulator–metal (MIM) have been widely investigated due to their high absorption performance and simple structure. However, MIM absorbers based on ultrathin spacers suffer from low field enhancement. In this study, we propose a new MIM absorber structure to overcome this drawback. The proposed absorber utilizes a reactive impedance surface (RIS) to boost field enhancement without an ultrathin spacer and maintains near-perfect absorption by impedance matching with the vacuum. The RIS is a metallic patch array on a grounded dielectric substrate that can change its surface impedance, unlike conventional metallic reflectors. The final circular nanodisk array mounted on the optimum RIS offers an electric field enhancement factor of 180 with nearly perfect absorption of 98% at 230 THz. The proposed absorber exhibits robust performance even with a change in polarization of the incident wave. The RIS-integrated MIM absorber can be used to enhance the sensitivity of a local surface plasmon resonance (LSPR) sensor and surface-enhanced IR spectroscopy.

Tunable multi-resonance of terahertz metamaterial using split-disk resonators

We present three tunable multi-resonance of terahertz (THz) metamaterials. They are composed of single-, dual-, and triple-split-disk resonators (SDRs) on Si substrates, which are denoted as SDR-1, SDR-2, and SDR-3, respectively. They exhibit extraordinary electromagnetic characteristics. SDR-1 exhibits polarization-dependence owing to the asymmetrical SDR structure. To increase the flexibility and applicability of SDR configuration, SDR-2 and SDR-3 are presented to modify the distances between the SDR layers. By moving the top SDR layer of SDR-2, a controllable resonance with a 0.32 THz shifting and tunable free spectrum range (FSR) of 0.15 THz at transverse magnetic mode is achieved, while an electromagnetically induced transparency-like effect appears at the transverse electric mode. The spectral bandwidth of SDR-3 can be tuned to 0.10 THz, and the resonant intensity becomes controllable by moving the middle SDR layer of SDR-3. Furthermore, by moving the top SDR layer of SDR-3, the tuning ranges of resonance, FSR, and bandwidth of SDR-3 are 0.23 THz, 0.20 THz, and 0.08 THz, respectively. Such designs of SDR configurations provide a high-efficient THz resonator in the THz-wave applications such as filters, switches, polarizers, sensors, imaging, and so on.

Ultrasensitive Transmissive Infrared Spectroscopy via Loss Engineering of Metallic Nanoantennas for Compact Devices

Miniaturized infrared spectroscopy is highly desired for widespread applications, including environment monitoring, chemical analysis, and biosensing. Nanoantennas, as a promising approach, feature strong field enhancement and provide opportunities for ultrasensitive molecule detection even in the nanoscale range. However, current efforts for higher sensitivities by nanogaps usually suffer a trade-off between the performance and fabrication cost. Here, novel crooked nanoantennas are designed with a different paradigm based on loss engineering to overcome the above bottleneck. Compared to the commonly used straight nanoantennas, the crooked nanoantennas feature higher sensitivity and a better fabrication tolerance. Molecule signals are increased by 25 times, reaching an experimental enhancement factor of 2.8 × 10⁴. The optimized structure enables a transmissive CO₂ sensor with sensitivities up to 0.067% ppm^-1. More importantly, such a performance is achieved without sub-100 nm structures, which are common in previous works, enabling compatibility with commercial optical lithography. The mechanism of our design can be explained by the interplay of radiative and absorptive losses of nanoantennas that obeys the coupled-mode theory. Leveraging the advantage of the transmission mode in an optical system, our work paves the way toward cheap, compact, and ultrasensitive infrared spectroscopy.

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

Ultra-High Refractive Index Sensing Structure Based on a Metal-Insulator-Metal Waveguide-Coupled T-Shape Cavity with Metal Nanorod Defects

An ultra-high plasmonic refractive index sensing structure composed of a metal-insulator-metal (MIM) waveguide coupled to a T-shape cavity and several metal nanorod defects is proposed and investigated by using finite element method. The designed plasmonic MIM waveguide can constitute a cavity resonance zone and the metal nanorod defects can effectively trap the light in the T-shape cavity. The results reveal that both the size of defects in wider rectangular cavity and the length of narrower rectangular cavity are primary factors increasing the sensitivity performance. The sensitivity can achieve as high as 8280 nm/RIU (RIU denotes the refractive index unit), which is the highest sensitivity reported in plasmonic MIM waveguide-based sensors to our knowledge. In addition, the proposed structure can also serve as a temperature sensor with temperature sensitivity as high as 3.30 nm/°C. The designed structure with simplicity and ease of fabrication can be applied in sensitivity nanometer scale refractive index sensor and may potentially be used in optical on-chip nanosensor.

Four-Mode Programmable Metamaterial Using Ternary Foldable Origami

Designing a multifunctional metamaterial with programmable feature has become a new trend in mechanical, acoustic, and electromagnetic research fields due to the controllability of their structural behaviors and functionalities. The codable or reconfigurable structures have shown more remarkable characteristics than the traditional and conventional metamaterials to implement functional programmability. However, structural complexity and hi-tech requirement are the biggest constraints to their practical applications. This paper numerically and experimentally investigates a programmable metamaterial based on ternary foldable origami in the gigahertz-frequency regime. The proposed metamaterial provides four transformable modes corresponding to four different functions of electromagnetic reflector and frequency-selectable absorbers by programming unique ternary foldable origami coded as "0", "1", and "2" for different folding levels. Interestingly, the proposed foldable origami consists of a simple dielectric paper and a bottom conductor, while there is no conductive pattern on the top. Therefore, the proposed programmable metamaterial is extremely robust and can be extended to a multiresonance mode and origami computing.