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Nakamura N, Szypryt P, Dagel AL, Alpert BK, Bennett DA, Doriese WB, Durkin M, Fowler JW, Fox DT, Gard JD, Goodner RN, Harris JZ, Hilton GC, Jimenez ES, Kernen BL, Larson KW, Levine ZH, McArthur D, Morgan KM, O’Neil GC, Ortiz NJ, Pappas CG, Reintsema CD, Schmidt DR, Schultz PA, Thompson KR, Ullom JN, Vale L, Vaughan CT, Walker C, Weber JC, Wheeler JW, Swetz DS. Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer. SENSORS (BASEL, SWITZERLAND) 2024; 24:2890. [PMID: 38732996 PMCID: PMC11086152 DOI: 10.3390/s24092890] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/04/2024] [Revised: 04/27/2024] [Accepted: 04/30/2024] [Indexed: 05/13/2024]
Abstract
X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO2 integrated circuit, and a path toward finer resolution and enhanced imaging capabilities is discussed.
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Affiliation(s)
- Nathan Nakamura
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Paul Szypryt
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Amber L. Dagel
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Bradley K. Alpert
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
| | - Douglas A. Bennett
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
| | - William Bertrand Doriese
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
| | - Malcolm Durkin
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Joseph W. Fowler
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Dylan T. Fox
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Johnathon D. Gard
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Ryan N. Goodner
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - James Zachariah Harris
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Gene C. Hilton
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
| | - Edward S. Jimenez
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Burke L. Kernen
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Kurt W. Larson
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Zachary H. Levine
- National Institute of Standards and Technology, Gaithersburg, MD 20899, USA;
| | - Daniel McArthur
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Kelsey M. Morgan
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Galen C. O’Neil
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
| | - Nathan J. Ortiz
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Christine G. Pappas
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Carl D. Reintsema
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
| | - Daniel R. Schmidt
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
| | - Peter A. Schultz
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Kyle R. Thompson
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Joel N. Ullom
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Leila Vale
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
| | - Courtenay T. Vaughan
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Christopher Walker
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Joel C. Weber
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
- Department of Physics, University of Colorado, Boulder, CO 80309, USA
| | - Jason W. Wheeler
- Sandia National Laboratories, Albuquerque, NM 87123, USA; (A.L.D.); (D.T.F.); (R.N.G.); (E.S.J.); (B.L.K.); (D.M.); (P.A.S.); (K.R.T.); (C.T.V.); (C.W.); (J.W.W.)
| | - Daniel S. Swetz
- National Institute of Standards and Technology, Boulder, CO 80305, USA; (P.S.); (B.K.A.); (D.A.B.); (W.B.D.); (M.D.); (J.W.F.); (J.D.G.); (K.M.M.); (G.C.O.); (N.J.O.); (C.D.R.); (D.R.S.); (J.N.U.); (L.V.); (J.C.W.); (D.S.S.)
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